17 ALD System Manufacturers in 2024
This section provides an overview for ald systems as well as their applications and principles. Also, please take a look at the list of 17 ald system manufacturers and their company rankings. Here are the top-ranked ald system companies as of November, 2024: 1.Nano-Master, Inc., 2.ASM, 3.MSE Supplies.
Table of Contents
Engaged in research on nitride semiconductor growth using the MBE method at Waseda University Graduate School. After graduating from graduate school in 2016, he joined a non-ferrous metal manufacturer.
Engaged in equipment maintenance and engineering work at metal smelting plants. Moved to a chemical manufacturer in 2022. Engaging in similar tasks.
What Is an ALD System?
An ALD system is a technology that creates nano-scale thin films through the atomic layer deposition technique. Known for its precise control of film thickness and dense, step-by-step film coating, ALD can be slow in deposition speed. It often uses organometallic materials, which can be harmful and flammable, necessitating careful handling and specialized knowledge.
Uses of ALD Systems
ALD systems are integral in semiconductor and flat panel display (FPD) production, particularly in DRAM manufacturing. Applications include:
- Gate Oxide Films for transistors.
- Barrier Films to prevent metal contamination and insulation degradation.
- Anti-permeation Films for OLED panels and other applications.
They are also used in the biomedical industry for coating artificial joints and bones and in drug delivery systems.
Principle of ALD Devices
An ALD system typically consists of a vacuum chamber, material gas supply and exhaust parts, and a control unit. The process involves introducing a precursor into the chamber, adsorbing it onto the substrate, and then oxidizing or nitriding it to form a thin film. This cycle is repeated to deposit multiple atomic layers. Effective purging is crucial to prevent film quality degradation due to residual precursors or oxidation sources. Thermal ALD and plasma ALD are two methods to enhance deposition efficiency.
Other Information on ALD Systems
1. Difference Between ALD, CVD, and PVD
While ALD is similar to CVD, the key difference lies in ALD's ability to deposit films one layer at a time. PVD, on the other hand, physically deposits material particles. Compared to CVD and PVD, ALD excels in depositing films on narrow and deep structures, particularly effective in coating objects with many small pores.
2. Global Market for ALD Systems
The global ALD market is expected to reach $6.5 billion by 2028. Although CVD currently dominates the thin film deposition market, ALD plays a vital role in semiconductor manufacturing due to its superior deposition capabilities and is anticipated to continue growing in importance.
List of 17 ALD System Manufacturers
*Including some distributors, etc.
Sort by Features
- Default
- Company Size: largest first
- Year Founded: oldest first
- Year Founded: earliest first
Sort by Area
- United States of America
- Australia
- Finland
- France
- Germany
- Japan
- Netherlands
- United Kingdom
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Nano-Master, Inc.
Atomic Layer Deposition Systems
Manufacturer Overview
Nano-Master, Inc., established in 1992 and based in Austin, Texas, United States, is a manufacturer of single wafer-thin film processing systems. The company also manufactures sputtering, Ion beam milling, ALD, Dual chamber systems, and plasma ashing. Its products are used in different industries, such as semiconductors, nanotechnology, optoelectronics, and photovoltaic apps. The company provides solutions in plasma processing, sputtering, ion beam etching, and single-wafer chemical processing. The company has sold its products to research centers, national laboratories, and universities.
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Veeco Instruments, Inc.
Atomic Layer Deposition Systems
Manufacturer Overview
Veeco Instruments Inc., founded in 1945, is a supplier headquartered in Plainview, New York, specializing in technology solutions for semiconductor manufacturers and scientific markets. Veeco offers a range of processing systems, including laser spike annealing technology, the AP200/300 series of lithography systems designed on the customizable Unity Platform™, ion beam systems for etch and deposition performance, as well as metal organic chemical vapor deposition (MOCVD) systems for thin film deposition. Veeco acquired Epiluvac AB, a Swedish manufacturer of chemical vapor deposition (CVD) systems, to perform advanced silicon carbide (SiC) applications, particularly in the electric vehicle manufacturing industry.
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Svt Associates
Atomic Layer Deposition Systems
Manufacturer Overview
Svt Associates, founded in 1993 and headquartered in Eden Prairie, Minnesota, is a manufacturer of molecular beam epitaxy systems and other thin film deposition equipment. The company specializes in designing and manufacturing solutions for thin film deposition, plasma etching, and advanced spectroscopy. Its main products include atomic layer deposition equipment, physical vapor deposition, pulsed laser deposition, and deposition equipment. These technologies find applications in the semiconductor, optics, and nanotechnology industries. The company's laboratory also offers thin film epitaxial, process development services, and contract research.
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Distributor Overview
MSE Supplies is a supplier of materials and equipment for research and manufacturing that has been in business since 2011, and is based in Tucson, Arizona. The company offers various materials, laboratory equipment, and analytical instruments, including high purity lab crucibles, single crystals, wafer, and substrates, as well as vacuum pumps and hardened steel & tungsten carbide pellet pressing dies for pressing dry powder pellets, used for various laboratory and production applications. With expert support, multiple customization options and a diverse product catalog, MSE Supplies caters more than 5000 products to researchers and businesses in over 100 countries across the globe.
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CVD Equipment Corporation
Atomic Layer Deposition Systems
Distributor Overview
CVD Equipment Corporation, founded in 1982 and based in Central Islip, New York, is a supplier of chemical vapor deposition and thermal process equipment. The company designs, develops, and manufactures a broad range of equipment and process solutions used to develop and manufacture materials and coatings for industrial applications and research. Its products are used in production environments as well as within academic, federal, and corporate research and development centers. With its expertise in CVD and thermal process equipment design and manufacturing, it is uniquely positioned to address the high-growth silicon carbide (SiC) market driven by global EV adoption.
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SHOWA SHINKU CO., LTD.
Atomic Layer Deposition Equipment
Manufacturer Overview
Showa Shinku Co. Ltd., founded in 1953 and headquartered in Tokyo, Japan, is a manufacturer of vacuum equipment and components for quartz devices, optical thin films, and more. Its product line features vacuum evaporation equipment, sputtering equipment, ion plating equipment, atomic layer deposition equipment, and dry etching and ashing equipment. These products are integral to various manufacturing processes, particularly in the production of quartz devices, which hold significant importance in industrial applications.
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Manufacturer Overview
ASM was established in 1979 in Moosinning, Germany where they are known as a manufacturer of sensors. The company designs different types of sensors mainly Displacement sensors, Inclination sensors, and Angle sensors that have applications in fields where displacement, position, length, and distance has to be measured, tested, or monitored. They are used in Injection Molding machines, Power Plant construction, Vehicle testing, Powerlifters, and Portal cranes. In the medical industry, they are used for precise positioning for Tomography, mammography, OP tables, and patient couches.
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SENTECH Instruments GmbH
Atomic Layer Deposition Systems
Manufacturer Overview
SENTECH Instruments GmbH was founded in 1990 and is based in Berlin, Germany, and is a manufacturer of measuring instruments for various industrial applications. The company has membership in the German Ministry of Economics, the International Photovoltaic Equipment Association, and, the European Industry Association and provides systems and instruments for plasma etching, atomic layer deposition, cluster configuration, and, thin film measurement, as well as offers spectroscopic ellipsometry, laser ellipsometer, metrology for photovoltaics, and, silicon & thin film solar cells that have applications in the semiconductor, microsystems, photovoltaics, nanotechnology, and materials research industries.
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Oxford Instruments Plasma Technology
Atomic Layer Deposition Systems
Manufacturer Overview
Oxford Instruments Plasma Technology, founded in 1959 with headquarters in the UK, is a manufacturer of technology tools, accessories, and systems for industry and research. The company's products include Ion beam equipment, ICP etching equipment, DRIE (Deep Reactive Ion Etching) machines, and Ionfab processing equipment used in the microelectromechanical systems (MEMS), advanced packaging, and nanotechnology markets. Oxford Instruments are found in biomedical devices, 2D materials, infrared sensors, and RF devices. Oxford Instruments provides global customer support, which includes consultation, installation, maintenance, and repair services.
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Samco Inc
Atomic Layer Deposition Systems
Manufacturer Overview
Samco Inc, founded in 1979 and headquartered in Kyoto, Japan, is a manufacturer and supplier specializing in semiconductor and electronic component manufacturing systems. The company's product portfolio includes low-stress chemical vapor deposition systems, atomic layer deposition systems, reactive ion etching systems, plasma cleaners, and Aqua Plasma Cleaners. These products are applied in various industries, including semiconductor manufacturing, the electronics industry, optoelectronics, photonics, and biotechnology. The company has office locations overseas, including China, the USA, Singapore, Malaysia, and Liechtenstein.
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Kurt J. Lesker Company
Atomic Layer Deposition Systems
Company Overview
Kurt J. Lesker Company was founded in 1954 and is a manufacturer and distributor of vacuum equipments based in Jefferson Hills, Pennsylvania, United States. The company manufactures various vacuum products such as vacuum chambers, vacuum pumps, pressure measuring devices, polymer coatings, and thin film deposition systems. The products are used in various fields such as decorative coatings, aerospace, electronics, optics, and LED. The company has obtained the ISO 9001 standard certificate.
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Watty Corporation
ALD System
Distributor Overview
The Group's Business Automation business is centered on offices and large buildings, and its Advanced Automation business, which provides solutions for factories and plants, serves customers around the globe. Additionally, in Japan, the Group's Life Automation business focuses on markets closely connected with people’s lives, such as lifelines and health.
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Nano Vacuum Pty Ltd
Atomic Layer Deposition Systems
Distributor Overview
Nano Vacuum Pty., Ltd., founded in 2018, is a supplier of nanofabrication and lithography tools located in Castle Hill, New South Wales, Australia. The company supplyies nanofabrication and lithography tools throughout Australia and New Zealand. Its product range includes thin film deposition (PVD/CVD), reactive ion etching (RIE), atomic layer deposition (ALD), glovebox integrated deposition tools, direct write lithography, and more. Its team members of PhD qualified mechanical and electrical engineers with expertise in bio-nano and surface science engineering, ensures to provide a sought-after service and advice to its Australian and New Zealand customers, equipping them with cutting-edge tools for their research.
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ALD System Manufacturer Ranking
*Including some distributors, etc.Ranking as of November 2024
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | Nano-Master, Inc. |
16.9%
|
| 2 | ASM |
8.9%
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| 3 | MSE Supplies |
8.2%
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| 4 | Veeco Instruments, Inc. |
7.2%
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| 5 | CVD Equipment Corporation |
6.7%
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| 6 | SHOWA SHINKU CO., LTD. |
6.7%
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| 7 | Svt Associates |
6.0%
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| 8 | Watty Corporation |
5.7%
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| 9 | Nano Vacuum Pty Ltd |
5.2%
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| 10 | Kurt J. Lesker Company |
4.7%
|
Derivation Method
The ranking is calculated based on the click share within the ald system page as of November 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
- SHOWA SHINKU CO., LTD.: 195
- Samco Inc: 173
- Watty Corporation: 162
Newly Established Company
- Nano-Master, Inc.: 1992 (32 years ago)
- Beneq Oy: 1984 (40 years ago)
- CVD Equipment Corporation: 1982 (42 years ago)
Company with a History
- SHOWA SHINKU CO., LTD.: 1953 (71 years ago)
- Watty Corporation: 1967 (57 years ago)
- Samco Inc: 1979 (45 years ago)
ALD System Manufacturers in United States
*Including some distributors, etc.
Global Distribution of ALD System Manufacturers by Country
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
United States of America
|
5 | 31.3% |
Japan
|
3 | 18.8% |
Germany
|
2 | 12.5% |
France
|
2 | 12.5% |
United Kingdom
|
1 | 6.3% |
Netherlands
|
1 | 6.3% |
Finland
|
1 | 6.3% |
Australia
|
1 | 6.3% |
