36 Plasma-Enhanced CVD Manufacturers in 2024
This section provides an overview for plasma-enhanced cvd as well as their applications and principles. Also, please take a look at the list of 36 plasma-enhanced cvd manufacturers and their company rankings. Here are the top-ranked plasma-enhanced cvd companies as of April, 2024: 1.Akrion Technologies Inc., 2.Plasma-Therm, LLC, 3.iTOOLS.
Table of Contents
Categories Related to Plasma-Enhanced CVD
1975~1995: Worked at Hitachi, Ltd.
Engaged in research on the irradiation effects of nuclear reactor materials at the Energy Research Institute.
Received the Japan-American Atomic Energy Society Award for his research achievements.
1996~2015,
Engaged in soft error research caused by environmental neutron beams in semiconductor devices at the Institute of Industrial Science.
Research achievements: Awarded the IEEE Fellow and the Teiichi Yamazaki Award.
Currently active as a writer.
What Is Plasma CVD System?
Plasma CVD equipment is a type of equipment that performs a type of chemical vapor deposition method.
Plasma CVD stands for plasma-enhanced chemical vapor deposition. The raw material gas is turned into a low-temperature plasma state (glow discharge ionized into cations and electrons) to generate active ions and radicals that cause chemical reactions on the substrate to deposit and form a thin film.
Uses of Plasma CVD Systems
Plasma CVD technology is used for reinforcing films for cutting tools (titanium nitride, carbon nitride, DLC (diamond-like carbon)), semiconductor insulating and protective films, wiring and electrode materials (silicon nitride, silicon oxide, copper, aluminum, tungsten, polycrystalline silicon, compound semiconductors, etc.). These materials are used as insulators, protective films, wiring and electrode materials (silicon nitride, copper, aluminum, tungsten, polycrystalline silicon, compound semiconductors, etc.). Its use in high-performance power devices to control and supply energy, which is key to economic and industrial development, is also expanding rapidly.
The supply gas for plasma CVD systems is usually a carrier gas such as hydrogen, nitrogen, argon, or ammonia mixed with a raw material gas such as SiH4 (silane) or WF6 (tungsten hexafluoride).
1. Oxides
Silicon dioxide (SiO2) is an oxide of silicon. It has excellent electrical insulation and thermal stability and is used in semiconductor device interlayer insulating films.
As semiconductors become thinner, they are more prone to leakage currents, where current leaks out from unplanned locations; the presence of SiO2 helps prevent leakage currents.
2. Nitride
Silicon nitride (Si3N4) is a nitride of silicon. It has excellent strength and thermal conductivity and is used as a substrate material for power devices that generate a lot of heat.
Nitrogen and ammonia are used together with SiH4 to form nitrides, so they also play the role in raw material gases. Semiconductors in general perform functions related to arithmetic and memory, such as memory. Power devices, on the other hand, are for things like diodes.
3. Carbide
Silicon carbide (SiC) is a carbide of silicon, a member of the compound semiconductor family along with GaN (gallium nitride, or GaN), AlGaN, etc. Like Si3N4, it is used in power devices in place of Si IGBTs because of its superior strength and thermal conductivity.
Compared to silicon compounds, power loss is lower, leading to smaller devices.
4. Metals and Metal Compounds
The gate of a transistor is formed from a gate oxide film (formed by thermal oxidation) and a gate electrode (mostly polycrystalline silicon). Tungsten plugs used for the gate electrode and source-drain contacts are formed by plasma CVD. (See Figure 3)
Principle of a Plasma CVD System
Figure 1. Basic configuration of a plasma CVD system
The raw material gas is selected from a pressure reduction range of 10-4 to 100 Pa, depending on the desired conditions. The power supply frequency most commonly used for plasma excitation is 13.56 MHz (RF: Radio Frequency), and the discharge type is a capacitively coupled type using parallel plate electrodes.
One of the parallel plates may be used as a shower head to supply process gas, or a heater may be inserted in one of the plates to control the temperature. There are many controllable parameters, such as power supply frequency, electrode structure other than the parallel plate type, raw gas composition, discharge volume, and temperature. Therefore, it is possible to deposit various types of thin films with various functionalities, ranging from inorganic to organic materials.
Other Information on Plasma CVD Systems
1. Semiconductor Device Structure and Manufacturing Process
Figure 2. Basic structure of semiconductor devices (memory)
Plasma CDV systems are widely used in the manufacture of semiconductor devices. For example, in the case of memory devices, complex multilayer wiring is formed on top of the MOSFET (metal oxide semiconductor field-effect transistor) formed on the substrate (wafer). layers are formed on top of the MOSFET (metal oxide semiconductor field-effect transistor) formed on the substrate (wafer) and separated by an interlayer insulating film.
Plasma CVD systems are mainly used to form MOSFET gate electrodes, wiring layers, and interlayer insulators, which require fine patterning after deposition. Basically, printing technology is used for patterning, and the following steps are repeated.
Figure 3. Basic deposition process for semiconductor devices
- On top of the base pattern, a new pattern material (polycrystalline silicon, Al, C, W, SiO2, Si3N4, etc.) is uniformly deposited by CVD.
- A photoresist film (positive or negative) is formed on top of the first film.Positive films are less soluble in solvents due to excitation light, while negative films are more soluble.
- The resist is dissolved, forming a pattern of the remaining resist on top of the deposited film.
- Etching (stripping process) is applied from the top of the pattern to remove the film.
- Remove the resist.
- A pattern is formed on the film.
By repeating the above process, semiconductor devices can be formed.
2. Thermal CVD and Optical CVD
Depending on the energy given, it can be classified into plasma CVD, thermal CVD, and optical CVD.
- Thermal CVD
This is a method of film deposition in which the components are thermally decomposed and chemically reacted by treating the feed gas at high temperatures. (This method cannot be used for substrates that are sensitive to heat, such as plastics. - Optical CVD
Methods that use laser light or ultraviolet light energy to activate family decomposition and chemical reactions.
List of 36 Plasma-Enhanced CVD Manufacturers
*Including some distributors, etc.
Sort by Features
- Default
- Company Size: largest first
- Year Founded: oldest first
- Year Founded: earliest first
Sort by Area
- United States of America
- Austria
- China
- Denmark
- Finland
- France
- Germany
- India
- Italy
- Japan
- Malaysia
- Singapore
- Sweden
-
-
-
Sunstone Engineering LLC
Diamond Disk for Rotary Tool
Manufacturer Overview
Sunstone Engineering LLC is a designer and manufacturer of high-tech micro welding and engraving solutions based out of Payson, Utah. Under the Orion, Avis, PW, and Seit brands, the company serves industries as diverse as jewelry, power sell manufacturing, aerospace, and orthodontics. The company’s customers include Boeing, Ford, Tesla, and Microsoft. The company’s product lines include lasers, pulse arcs, HF inverters, and hot bar reflow welding systems. The company produces almost all its products at its factories in Utah and distributes them to customers around the world.
-
-
-
-
-
Plasma-Therm, LLC
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
Manufacturer Overview
Plasma-Therm, LLC, established in 1974 and headquartered in St. Petersburg, Florida, United States, is a manufacturer of plasma processing equipment for the semiconductor industry. Some of the products offered include plasma etch systems, plasma deposition systems, as well as plasma dicing systems, and plasma cleaning systems. These products are used for the fabrication of semiconductor devices like microprocessors, memory chips, and diodes. The company's quality management system has been assessed and complies with ISO 9001:2015.
-
-
-
-
-
Vapor Technologies, Inc.
small VT-1000i™ coating machine
Manufacturer Overview
VaporTech designs, builds, and services thin-film coating equipment which deposit PVD and PE-CVD coatings to enhance the quality of numerous products. We exhibit a steadfast commitment to our craft, recognizing that a product's finish is a direct reflection of its quality, underlining a brand's dedication to quality and value. For over three decades, VaporTech's PVD coating equipment has been assisting customers in applying stunning and durable hard coatings that not only enhance but differentiate the aesthetics, texture, and functionality of a plethora of items including home hardware, medical devices, automobiles, industrial tooling, consumer electronics, sporting goods, among others. We are located in Longmont, Colorado, extending our sales, service, and support on a global scale.
-
-
-
-
-
FindLight
EPEE 550 PECVD Plasma Enhanced CVD
Company Overview
FindLight, located in Berkeley, California, United States, is an online marketplace for the photonics industry, connecting buyers and sellers of photonics products on a single platform, was founded in 2013. The company's platform is organized into a hierarchy of product categories, including lasers, optics, optomechanics, light detection systems, and other photonics products. They aim to simplify the shopping process in the photonics industry by seamlessly connecting sellers and buyers on one easy-to-use platform. They were founded after an extensive customer discovery process conducted in the frameworks of NSF I-Corp Entrepreneurship Program at UC Berkeley.
-
-
-
-
-
-
-
Denton Vacuum, Inc.
Voyager PE-CVD
Distributor Overview
Denton Vacuum, Inc. is a supplier of Ion energy and plasma control process equipment. The company was founded in 1964 by Richard A. Denton with headquarters in Moorestown, New Jersey USA. The company provides process equipment for manufacturing semiconductor and optoelectronic devices. Denton Vacuum supplies thin film technology to global innovators and research facilities including ASML, Intel, Micron, Samsung, IBM, Apple, and many more. The products and services of the company are applied in the semiconductor, medical, aerospace, and tech industries.
-
-
-
-
-
Tystar Corporation
PLASMA-ENHANCED CVD REACTOR
Distributor Overview
Tystar Corporation, established in 1988 and based in Garden Grove, California, is a supplier of thermal processing equipment for semiconductor and micro-electro-mechanical systems applications. The company specializes in designing and manufacturing systems for rapid thermal processing, annealing, and oxidation of wafers. Its main products include digital gas flow controllers, diffusion, oxidation, and LPCVD furnace systems. These tools find applications in semiconductor fabrication, research, and development. The company’s featured customers include Alibaba Group, Samsung, Harvard University, The University Of Chicago, and Oak Ridge National Laboratory.
-
-
-
-
-
CVD Equipment Corporation
Plasma Enhanced CVD (PECVD) Systems
Distributor Overview
CVD Equipment Corporation, founded in 1982 and based in Central Islip, New York, is a supplier of chemical vapor deposition and thermal process equipment. The company designs, develops, and manufactures a broad range of equipment and process solutions used to develop and manufacture materials and coatings for industrial applications and research. Its products are used in production environments as well as within academic, federal, and corporate research and development centers. With its expertise in CVD and thermal process equipment design and manufacturing, it is uniquely positioned to address the high-growth silicon carbide (SiC) market driven by global EV adoption.
-
-
-
-
-
SHINKO SEIKI CO., LTD.
Plasma CVD system
Manufacturer Overview
SHINKO SEIKI CO., LTD., established in 1949, and located in Kobe, Japan, is a manufacturer of vacuum devices, electric furnaces and semiconductor manufacturing equipment. Its product line includes a vast array of vacuum pumps such as mechanical booster pumps, vacuum exhaust unit, oil sealed rotary vacuum pumps and water ring vacuum pumps. Its product range also inlcudes soldering equipments, optical inspection equipments, thin film forming equipments, and plasma processing equipments. The company holds several certification for its operation such as the ISO 14004, and the ISO 9001.
-
-
-
-
Manufacturer Overview
SPI Lasers, founded in 1923, is a top manufacturer and supplier of advanced technology such as machines and systems, lasers, power electronics, power tools, smart factories, and software. Their primary goal is to develop and connect production technology, making it more efficient, precise, and future-proof for the benefit of manufacturing and its upstream and downstream processes. They offer cutting-edge software solutions to make the Smart Factory possible, enabling us to implement high-tech processes in industrial electronics.
-
-
-
-
-
Collomix GmbH
Grinding Wheel
Manufacturer Overview
Collomix GmbH, founded in 1974 and headquartered in Bayern, Germany, is a manufacturer of mixing technology and tools for the construction and color industry. This company’s product range includes Collomixer, paddle mixers, and the Collomatic system, enhanced by the HEXAFIX quick coupling system suitable for different materials. It designs solutions for construction professionals to provide improved end results, ease of use, and long-term health protection. The company also offers after-sales support, including factory repair service and a supply of spare parts for discontinued models.
-
-
-
-
-
iTOOLS
DIAMOND SANDING DISCS
Manufacturer Overview
iTOOLS I/S, founded in Denmark in 2004, is a manufacturer of flooring tools and equipment. The company offers a comprehensive range of tools for all types of flooring installations, including hardwood, laminate, tile, carpet, and vinyl. Its product line includes precision cutting solutions for tiles and ceramics., flooring rollers, essential tools for carpet installation and quality materials to prepare the subfloor. t also provides custom tool design and fabrication services.
-
-
-
-
-
Exact Tools Oy
Diamond disc
Manufacturer Overview
Exact Tools Oy, founded in 1993 and based in Helsinki, Finland, is a manufacturer of pipe-cutting and beveling tools with over 20 years in the industry and 20,000 customers. Its products are called Exact tools and include pipe saws, pipe beveling, blades, and special pipe saws. The pipe cutters are suitable for several pipe materials, including Stainless steel, Steel, Cast Iron, Copper pipes, and all kinds of plastics. Exact tools PipeCut 360E, 280E, and 220E were granted the red dot design, while the PipeCut 220E was also awarded the Good Design Award.
-
-
-
-
-
Zhengzhou CY Scientific Instrument Co., Ltd.
CVD System
Manufacturer Overview
Zhengzhou CY Scientific Instrument Co., Ltd., established in 2013 and based in Zhengzhou, Henan, China, is a manufacturer of scientific research equipment. The company primarily offers standard laboratory furnaces along with customized furnaces and related accessories. Some of its products include diamond color change furnace, plasma cleaner, spin coater, and more. The company maintains its manufacturing base and collaborate with several subcontracting factories, enabling them to supply equipment and technologies tailored to diverse customer needs and specifications.
-
-
-
-
-
Zhengzhou Kejia Furnace Co., Ltd.
PECVD Furnace System
Manufacturer Overview
Zhengzhou Kejia Furnace Co., Ltd., established in 2005 and based in Zhengzhou, China, is a manufacturer of a comprehensive range of furnaces and heat treatment equipment. The company’s product offerings include tube furnaces, rotary tube furnaces, box furnaces, CVD (Chemical Vapor Deposition) systems, PECVD (Plasma Enhanced Chemical Vapor Deposition) systems, and customized furnaces to meet specific industrial needs. It holds ISO 9001 and CE certifications, and the equipment finds applications in various industries, including materials research, nanotechnology, electronics, and dental labs, resulting in advancements in research and manufacturing processes across multiple sectors.
-
-
-
-
-
SUMITOMO PRECISION PRODUCTS Co., Ltd.
MEMS/Semiconductor Manufacturing Equipment
Manufacturer Overview
Sumitomo Precision Products Co. Ltd., established in 1961 and headquartered in Amagasaki, Japan, is a manufacturer of several products, including hydraulic controls, semiconductor manufacturing equipment, aerospace equipment, and environmental systems. It began manufacturing large heat exchangers in 1963, large propellers in 1967, and LNG vaporizers in 1969. In 1974, it began making ozone generators, and in 1988, it started manufacturing equipment for space applications. The company is ISO 14001 certified, and its product portfolio includes landing gear systems for commercial flights, high-temperature heat exchangers, coolant components for machine tools, LNG vaporizers, and silicon oxide sacrificial layer etching systems.
-
-
-
-
-
ULVAC, Inc
CVD System
Manufacturer Overview
Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, components, peripheral devices, and materials for the solar cell and semiconductor industries, among others. The company operates businesses in six areas, including materials, components, electronic devices, semiconductors, and flat panel display production equipment. Some of its products include roll coaters, semiconductor production equipment, LED production equipment, leak detectors, and vacuum brazing furnaces. It is ISO9001 certified, and its net sales in the 2022 fiscal year were 227.5 billion Japanese Yen, with 34% of this amount coming from semiconductor and electronic device production equipment.
-
-
-
-
-
Samco Inc
Plasma Enhanced CVD Systems
Manufacturer Overview
Samco Inc, founded in 1979 and headquartered in Kyoto, Japan, is a manufacturer and supplier specializing in semiconductor and electronic component manufacturing systems. The company's product portfolio includes low-stress chemical vapor deposition systems, atomic layer deposition systems, reactive ion etching systems, plasma cleaners, and Aqua Plasma Cleaners. These products are applied in various industries, including semiconductor manufacturing, the electronics industry, optoelectronics, photonics, and biotechnology. The company has office locations overseas, including China, the USA, Singapore, Malaysia, and Liechtenstein.
-
-
-
-
-
SIDAMO
Diamond sanding plate
Manufacturer Overview
Sidamo, established in 1967 and headquartered in La Chaussée St Victor, France, is a manufacturer that develops technical tools for professional users in the building and industry sectors. The company offers a wide range of products, including a tip groove mill, straight slotting mill, floor drill press, metal band saw, and more. It also offers the Pro Move 3600, which is a large format cutting system for handling operations. Its product has an automatic setting of the tip and a constant mill diameter. The company has achieved ISO 14001 certification. It serves industries such as manufacturing, construction, metalworking, and precision.
-
-
-
-
-
CS Unitec, Inc.
Eco BrazingEB diamond cluster wheels
Manufacturer Overview
Unitec Power Tools (Unitec) was founded in 1990 and operates out of Norwalk Connecticut and Deer Park, Texas. The company is a developer and producer of tools for metalworking, concrete, masonry, petrochemical, hazardous environments and Ex Zones, underwater, and mining. The company developed the first air-powered band saw in 1991. The company's tool types include cutting tools, surface preparation tools, dust collection systems, safety tools, and various specialty tools. The company offers support in both English and Spanish.
-
-
-
-
-
SPTS Technologies Ltd.
Delta® Deposition Systems
Manufacturer Overview
SPTS Technologies Ltd, a subsidiary of KLA Corporation, is a British manufacturer established in 2009 and based in Ringland Way, Newport, specializing in technology and solutions for semiconductor and microelectronic device manufacturers and research institutions. SPTS Technologies offers process technologies tailored for advanced packaging schemes, including high density fan-out wafer level packaging (FOWLP) and three-dimensional integrated circuit (3DIC) packaging. The company also provides support for wafer processing systems used in the manufacturing of Micro Electro Mechanical Systems (MEMS) devices. Additionally, SPTS Technologies offers plasma processing technology to assist the compound semiconductor applications in manufacturing radio frequency (RF) and photonic devices.
-
-
-
-
-
Business Communications LLC
Plasma-Enhanced Chemical Vapor Deposition
Manufacturer Overview
Business Communications LLC., established in 1976 and headquartered in Dubai, UAE, is a manufacturer of business supplies and equipment area. The company offers the following products and services, including thermal fingerprint development, IR fluorescent fingerprint powders, handheld/portable XRF spectrometry, and S1 titan. It also offers Tracer 5 series, autoclaves, pressure vessels and reactors, and vacuum Furnace. Its product can be used for several chemical reactions and other applications like hydrogenation, catalyst screening, polymerization, and corrosion testing. The company has achieved ISO 9001:2015. It serves industries such as government, food and pharma industries, healthcare, renewable, and more.
-
-
-
-
-
Omicron Scientific Equipment Co.
Microwave Plasma Enhanced Chemical Vapor Deposition
Company Overview
Omicron Scientific Equipment was established in the year 2000 based in New Delhi, India and it is a manufacturer, supplier, and exporter of scientific equipment. The company manufactures products like microwaves, radio frequency equipment, DC power supplies, thermal evaporation systems, electron beam gun-based evaporation systems, spin coating systems, scrubbers, semiconductor processing equipment, chemical benches, equipments for research and development and vacuum furnaces. The company is a member of Trade India and is also ISO certified.
-
-
-
-
-
-
-
Scienta Omicron
Plasma Enhanced Chemical Vapour Deposition
Company Overview
Scienta Omicron, established as a supplier and distributor of cutting-edge scientific instruments, was founded in 1983 in Germany. The company specializes in providing scientific tools for researchers and institutions worldwide, and its product range covers a wide spectrum, including advanced surface analysis systems, electron spectrometers, scanning probe microscopes, and sophisticated deposition systems. Notable offerings encompass X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) systems, used for examining material surfaces at the atomic and molecular levels. Its products are used across fields like materials science, nanotechnology, surface physics, and more, catering to academic, industrial, and laboratory research.
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
Dorico Technologies S.r.l.
diamond resin discs
-
-
-
-
-
Leman S.A.
DIAMOND CUP CONCRETE
-
-
-
-
-
TYROLIT
DGAB Diamond cup wheels
-
-
-
-
-
ELMAG ENTWICKLUNGS UND HANDELS GMBH
Diamond cup wheel
Distributor Overview
ELMAG Entwicklungs und Handels GmbH, founded in 1984 and located in Tumeltsham, Austria is a wholesaler and supplier of industrial machinery and equipment. The company’s product category includes compressed air technology, welding technology, stone cutting, workshop equipment, and power generators. It also offers welding equipment, plasma cutters, extraction systems, Metal cleaning equipment, and induction heaters. It is ISO 9001 certified, indicating that its production processes and products are of standard quality. It has service points in Austria, Germany, Switzerland, Slovenia, and Hungary, serving customers worldwide.
-
-
-
-
-
LAM RESEARCH CORPORATION
Plasma-Enhanced Chemical Vapor Deposition
Distributor Overview
Lam Research Corporation, founded in 1980 and based in Fremont, California, is a global supplier of semiconductor fabrication equipment. Specializing in thin film deposition, plasma etch, and photoresist strip processes, the company utilizes a line of high-precision mass metrology systems, enabling an Å-level quantification to process changes, and accommodating parts up to 8 meters in size. Its products and services enable its customers to build smaller, faster, and power-efficient electronic devices.
-
-
Plasma-Enhanced CVD Manufacturer Ranking
*Including some distributors, etc.Ranking as of April 2024
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | Akrion Technologies Inc. |
14.1%
|
| 2 | Plasma-Therm, LLC |
10.6%
|
| 3 | iTOOLS |
5.9%
|
| 4 | Denton Vacuum, Inc. |
5.9%
|
| 5 | Kenosistec Sr |
4.7%
|
| 6 | Scienta Omicron |
4.7%
|
| 7 | CVD Equipment Corporation |
4.7%
|
| 8 | NANOFABRICATION LABORATORY |
3.5%
|
| 9 | Business Communications LLC |
3.5%
|
| 10 | FindLight |
3.5%
|
Derivation Method
The ranking is calculated based on the click share within the plasma-enhanced cvd page as of April 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
- SPI Lasers: 16,554
- ULVAC, Inc: 6,235
- SUMITOMO PRECISION PRODUCTS Co., Ltd.: 1,779
Newly Established Company
- Scienta Omicron: 2015 (9 years ago)
- Zhengzhou CY Scientific Instrument Co., Ltd.: 2013 (11 years ago)
- SPTS Technologies Ltd.: 2009 (15 years ago)
Company with a History
- SPI Lasers: 1923 (101 years ago)
- SHINKO SEIKI CO., LTD.: 1949 (75 years ago)
- ULVAC, Inc: 1952 (72 years ago)
Plasma-Enhanced CVD Manufacturers in United States
*Including some distributors, etc.
- Sunstone Engineering LLC
- Plasma-Therm, LLC
- Vapor Technologies, Inc.
- FindLight
- Akrion Technologies Inc.
- Denton Vacuum, Inc.
- Tystar Corporation
- CVD Equipment Corporation
Global Distribution of Plasma-Enhanced CVD Manufacturers by Country
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
United States of America
|
8 | 28.6% |
Japan
|
5 | 17.9% |
Germany
|
3 | 10.7% |
China
|
2 | 7.1% |
India
|
2 | 7.1% |
Denmark
|
1 | 3.6% |
Finland
|
1 | 3.6% |
Sweden
|
1 | 3.6% |
France
|
1 | 3.6% |
Singapore
|
1 | 3.6% |
Italy
|
1 | 3.6% |
Malaysia
|
1 | 3.6% |
Austria
|
1 | 3.6% |
List of Plasma-Enhanced CVD Products
3 products are listed.
Japan Create Co., Ltd.
Unique plasma control method plasma CVD device
10+ people viewing
■ Characteristics ・ Chamber volume 1m3 ・ Unique plasma control method ・ Multi -stage multi -dose batch processing is possible ・ Simple structur...
SAKIGAKE-Semiconductor
Vacuum direct vaporization type-thin film formation device DH-CVD
10+ people viewing
Last viewed: 18 hours ago
The industry's first safe plasma CVD that directly forms a film from a liquid raw material. ■ Product overview ･ Thin film formation device that a...
SHINKO SEIKI CO., LTD.
Thin film forming device plasma CVD device
10+ people viewing
It is a large plasma CVD device that supports 600mm board. It is possible to form a dense silicon oxide film and is suitable for producing thin fil...
