Product
PSII Multi -PVD Simage Machine <NPS Series>Handling Company
NanotechItems marked with have different values depending on the model number.
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Product Image | Part Number | Price (excluding tax) | Achievement pressure | Board bias | Board heating mechanism | Board holder | Compressed air | Cooling water | Device control | Effective area (mm) | Exhaust speed | Exhaust system | Installation area (M) | Installed discharge system | Need for power | Vacant tank (mm) |
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NPS-500 |
Available upon quote | 6.7E-4PA or less | MAX20KV500MA0.2 ~ 2kHzduty5 ~ 50 % | Options (sheath heaters, lamp heaters, etc.) | Self -open type (custom -made production according to product shape) | 6kgf/cm2 or higher | 3kgf/cm220 ~ 40L/min | Completely automatic driving with recipe screen setting * Excludes some complex types | φ200 × 200L | Within 30 minutes to 6.7E-3PA | Turbo molecular pump + rotary pump | 2.5W x 3.0D x 2.5H | ・ PSII power supply (standard), DLC ion source (ionized steamed source) ・ Sputtering, ion injection source | 3φ200V15KVA ~ | 500W x 500W x 600H | |
NPS-800 |
Available upon quote | 6.7E-4PA or less | MAX20KV500MA0.2 ~ 2kHzduty5 ~ 50 % | Options (sheath heaters, lamp heaters, etc.) | Self -open type (custom -made production according to product shape) | 6kgf/cm2 or higher | 3kgf/cm220 ~ 40L/min | Completely automatic driving with recipe screen setting * Excludes some complex types | φ500 × 200L | Within 30 minutes to 6.7E-3PA | Turbo molecular pump + rotary pump | 3.0W x 4.0D x 2.5H | ・ PSII power supply (standard), DLC ion source (ionized steamed source) ・ Sputtering, ion injection source | 3φ200V25KVA ~ | φ800 × 650H | |
NPS-1000 |
Available upon quote | 6.7E-4PA or less | MAX20KV500MA0.2 ~ 2kHzduty5 ~ 50 % | Options (sheath heaters, lamp heaters, etc.) | Self -open type (custom -made production according to product shape) | 6kgf/cm2 or higher | 3kgf/cm220 ~ 40L/min | Completely automatic driving with recipe screen setting * Excludes some complex types | φ600 × 500L | Within 30 minutes to 6.7E-3PA | Turbo molecular pump + rotary pump | 4.0W x 4.0D x 2.5H | ・ PSII power supply (standard), DLC ion source (ionized steamed source) ・ Sputtering, ion injection source | 3φ200V30KVA ~ | φ1000 × 900H |
Click on the part number for more information about each product