ICF membrane device
Nanotech
About This Product
A coating device with a high -functional carbon film, which is high -functional, supercutability, heat resistance, water repellency, aluminum alloy, optical, insulation, and environmental harmonious type.
Principles and structures
With the expansion of the application applications of the DLC thin film, the name "diamond -like carbon", which is simply hard and has low friction coefficient, has become unable to capture the function. It is necessary to use the characteristics of the DLC thin film separately by using it. In order to clarify this classification, there is an ICF (Intrinsic Carbon Film) as a concept that promotes DLC with a large framework.
High -performance addition
ICF is the name of the carbon film with high functionality, including DLC. We succeeded in granting various high -functionality by developing our own DLC coating technology and performing various doping and structural control to DLC. The optimal ICF is designed by our technical data and film formation control technology, and it is possible to perform coating according to various applications.
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Product
ICF membrane device
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Handling Company
Nanotech
3 Models of ICF membrane device
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Achievement pressure | Board bias | Board heating mechanism | Board holder | Compressed air | Cooling water | Device control | Effective area (mm) | Exhaust speed | Exhaust system | Installation area (M) | Installed discharge system | Need for power | Vacant tank (mm) |
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ICF-500 |
Available upon quote | 6.7E-4PA or less | MAX3,000V500MA | Options (sheath heaters, lamp heaters, etc.) | Self -open type (custom -made production according to product shape) | 6kgf/cm2 or higher | 3kgf/cm220 ~ 40L/min | Completely automatic driving by recipe screen settings | φ200 × 200L | Within 30 minutes to 6.7E-3PA | Turbo molecular pump + rotary pump | 2.5W x 3.0D x 2.5H | DLC ion source (ionized vapor resource) | 3φ200V10KVA | 500W x 500W x 600H |
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ICF-800 |
Available upon quote | 6.7E-4PA or less | MAX3,000V500MA | Options (sheath heaters, lamp heaters, etc.) | Self -open type (custom -made production according to product shape) | 6kgf/cm2 or higher | 3kgf/cm220 ~ 40L/min | Completely automatic driving by recipe screen settings | φ500 × 200L | Within 30 minutes to 6.7E-3PA | Turbo molecular pump + rotary pump | 3.0W x 4.0D x 2.5H | DLC ion source (ionized vapor resource) | 3φ200v20kva | φ800 × 650H |
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ICF-1000 |
Available upon quote | 6.7E-4PA or less | MAX3,000V500MA | Options (sheath heaters, lamp heaters, etc.) | Self -open type (custom -made production according to product shape) | 6kgf/cm2 or higher | 3kgf/cm220 ~ 40L/min | Completely automatic driving by recipe screen settings | φ600 × 500L | Within 30 minutes to 6.7E-3PA | Turbo molecular pump + rotary pump | 4.0W x 4.0D x 2.5H | DLC ion source (ionized vapor resource) | 3φ200V30KVA | φ1000 × 900H |
Click on the part number for more information about each product
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