Thin film forming device batch sputtering device
SHINKO SEIKI CO., LTD.
About This Product
This is a lineup of batch -type sputtering devices that are ideal for mass production from various electronic devices and high -performance materials R & D.
The small -diameter cathode features a uniform film to a large area, and provides the best hardware for various software and enhanced software supported by abundant achievements.
SRV4310 / parallel flat plate type
SRV6310 / parallel flat plate type
SRV7310 / parallel flat plate type
We have a lineup of selectable achievements with the optimal hard soft processes that match the process from R & D to full -scale mass production.
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Product
Thin film forming device batch sputtering device
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Handling Company
SHINKO SEIKI CO., LTD.
3 Models of Thin film forming device batch sputtering device
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Base board / substrate heating | Base platform / membrane thick distribution | Base platform / rotation mechanism | Exhaust system / Achievement power | Exhaust system / exhaust time | Exhaust system / main pump | Gas introduction system | Operation method / exhaust operation | Operation method / film formation operation | Processing board | Spatta power supply / DC | Sputta direction | Sputta power supply / RF | Target / Cathode type | Target / Size x number |
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SRV4310 |
Available upon quote | 300 ° C on the board stand | Within ± 10%(¢ 210) | ◯ | 6.0 x 10-⁵ PA or less | 9.9 X 10-⁴ PA within 10 minutes | Cry -pump | Two systems | Automatic | Half -automatic (timer type) | ¢ 320mm | option | up | 500W | Plena magnetron | ¢ 100mm x 3 |
SRV6310 |
Available upon quote | 300 ° C on the board stand | Within ± 10%(¢ 300) | ◯ | 6.0 x 10-⁵ PA or less | 9.9 X 10-⁴ PA within 10 minutes | Cry -pump | Two systems | Automatic | Half -automatic (timer type) | ¢ 320mm | option | up | 1kw | Plena magnetron | ¢ 150mm x 3 | |
SRV7310 |
Available upon quote | 300 ° C on the board stand | Within ± 10%(¢ 420) | ◯ | 6.0 x 10-⁵ PA or less | 9.9 X 10-⁴ PA within 10 minutes | Cry -pump | Two systems | Automatic | Half -automatic (timer type) | ¢ 520mm | option | up | 3kw | RMC | ¢ 200mm x 3 |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan
- Since 1949