All Categories
History
This section provides an overview for compact vacuum pumps as well as their applications and principles. Also, please take a look at the list of 7 compact vacuum pump manufacturers and their company rankings. Here are the top-ranked compact vacuum pump companies as of January, 2025: 1.Jiangsu Tengtong Packing Machinery Co., Ltd., 2.Osaka Vacuum, Ltd., 3.ULVAC KIKO, Inc..
Table of Contents
Categories Related to Compact Vacuum Pumps
A compact vacuum pump is a small pump that evacuates air from a sealed container to create a vacuum inside.
Compact vacuum pumps are usually capable of pumping air at a rate of about 200 l/min and achieving a pressure of 0.1 Pa to 10 Pa. They are also used as roughing pumps to obtain a high vacuum environment and are often used in various analytical and scientific instruments that can be operated under low vacuum conditions.
There are various types, such as oil rotary pumps, dry pumps, and diaphragm pumps, which can be selected according to the principle and conditions of use.
Compact vacuum pumps are used in analytical and experimental equipment that require a vacuum of about 0.1 Pa or an even higher vacuum environment. For example, compact vacuum pumps are ideal for electron microscopes, X-ray analysis, mass spectrometers, and gas chromatography, which require a vacuum environment.
In semiconductor manufacturing, a vacuum environment is required to form thin films by sputtering, vacuum evaporation, or chemical vapor deposition (CVD). Compact vacuum pumps are also used in food processing for vacuum packaging and vacuum packing.
Compact vacuum pumps are classified according to the pumping method, pressure range, and whether oil is used.
Vacuum pumps can be classified by the pumping method into two types: gas transport vacuum pumps and gas sump vacuum pumps. Gas-transporting vacuum pumps transport air from the intake side to the exhaust side.
A gas-accumulating vacuum pump accumulates the air to be exhausted inside the pump and then exhausts the accumulated air with another vacuum pump.
It is impossible for a single vacuum pump to cover the range from atmospheric pressure to high vacuum. Normally, an auxiliary pump or a roughing pump is used in addition to the main pump for high vacuum.
There are two types of vacuum pumps: dry vacuum pumps, which do not use oil, and wet vacuum pumps, which do. The vacuum area created by oil-using pumps contains oil vapor and water vapor generated by the pump itself.
Dry vacuum pumps are especially necessary in the semiconductor manufacturing process, which requires fine control. Dry types are also used in the manufacture of food products and pharmaceuticals, where oil is not desired.
Among various types of vacuum pumps, oil-sealed rotary vacuum pumps are the most commonly used in terms of displacement volume, achievable pressure, and price. There are many types of this type, depending on the pump type, and they are called rotary types.
Oil functions to lubricate the bearings and to improve sealing in the cylinder. Rotary-type oil rotary vacuum pumps are available in rotary-blade, cam, and oscillating piston types. 0.1 Pa medium vacuum can be easily obtained with these pumps.
Rotary Blade Oil-sealed Rotary Vacuum Pumps
The rotor-blade type has vanes attached to a rotor built into the inner cylinder. Gas in the small chambers divided by the vanes is discharged as the rotor rotates, thereby reducing pressure.
Cam Type Oil-sealed Rotary Vacuum Pump
In the cam type, a portion of the eccentric rotor installed in the center of the cylindrical stator rotates in contact with the stator. Gas in the space between the stator and rotor is discharged to reduce pressure.
Oscillating Piston Type Oil-sealed Rotary Vacuum Pump
In the oscillating piston type, the rotation of the eccentric rotor causes the piston to move up and down. Air inside the cylinder is compressed and discharged by the piston to reduce pressure.
Dry pumps are non-contact, clean vacuum pumps that do not use oil or liquids. There are many types depending on the pump type.
Roots Type Dry Vacuum Pump
This pump uses a Roots type rotor. They do not require cooling water and are highly convenient.
Scroll Type Dry Vacuum Pump
The scroll rotates to create a vacuum by compressing and discharging air from the outside to the inside. It is compact and has the advantages of high vacuum, low vibration, low noise, and energy saving.
Claw Type Dry Vacuum Pump
Vacuum is created by two claw-shaped rotors rotating in opposite directions.
Diaphragm Type Dry Vacuum Pump
A piston called a pump shaft moves back and forth to raise and lower a diaphragm, which sucks in and discharges air.
Others
Rotating blade type and oscillating piston type are also available. These vacuum pumps are similar in structure to oil rotary pumps.
*Including some distributors, etc.
Sort by Features
Sort by Area
SATO VAC INC., established in 1932 and based in Tokyo, Japan, is a manufacturer of vacuum equipment including vacuum pumps, measuring instruments, and parts & components. Its production line is segmented into vacuum pumps, gauges, and equipment used in space development, semiconductors, energy, medical, optics, and automobile industries. The company's vacuum equipment includes compact CVD systems, vacuum defoamers, heat treatment furnaces, dryers, and evaporation systems. The company's production process involves structural designing, prototype creation, design review, and performance testing.
Founded in Osaka, Japan in 1950, Osaka Vacuum, Ltd. is a manufacturer of vacuum pumps and systems that holds the ISO14001 certification. Their extensive product line includes a wide range of vacuum pumps, such as dry, turbo molecular, liquid ring, and root pumps. oil-sealed rotary pumps, ejectors, and other vacuum equipment are also offered. They also provide vacuum systems for various applications such as general vacuum exhaust, freezing, drying, etching, distillation, polymerization, and more, serving markets including semiconductor, solar, iron and steel, textile, food, oil, atomic energy, and many others.
ULVAC KIKO, Inc., established in 1971 and headquartered in Miyazaki, Japan, is a manufacturer specializing in vacuum pumps and deposition systems. Its product portfolio encompasses oil-sealed rotary vacuum pumps, diaphragm type dry vacuum pumps, rocking piston type dry vacuum pumps, sliding vane type dry vacuum pumps, and high vacuum pumping systems. These products are vital for creating vacuum environments in industries like semiconductor manufacturing and flat panel display production. The company is known for its adherence to quality, holding ISO 9001 certification since 1997 and ISO 14001 certification since 2001.
Nihon Pisco Co. Ltd., founded in 1976 and based in Nagano, Japan, is a manufacturer and distributor of pneumatic equipment and is ISO 9001 and ISO 14001 certified. The company stocks various products like valves, actuators, and vacuum accessories used in several industries, including semiconductor, medicine, and rechargeable battery. The company started selling push-in fitting for pneumatic piping in 1977 and launched the industry’s first push-in fitting built-in type speed controller in 1981. In 1993, it launched a few products, including a quick exhaust valve, a digital pressure sensor, and a vacuum generator with a digital pressure sensor.
Gardner Governor, founded in 1869 and headquartered in Sterling, Illinois, is a manufacturer and provider of precise mechanical governors. The company’s governors are essential control systems used to regulate engine and turbine speeds across industries. Their diverse product portfolio includes mechanical governors tailored for engines, power plants, and industrial machinery, ensuring precise and stable speed control for optimal performance and safety. Gardner Governor's status stems from advanced solutions and excellent customer support. Utilized in power generation, locomotives, and industrial applications, Gardner Governor's products are a major feature in control systems worldwide.
Jiangsu Tengtong Packing Machinery Co., Ltd., established in 1994 and headquartered in Jiangsu, China, is a manufacturer and supplier specializing in vacuum packaging machines. The company's product portfolio includes an external vacuum packing machine with gas flow, an automatic large single chamber vacuum packing machine, a PCB board packing machine, a BUSCH R5 vacuum pump, and economical vacuum packing machines. It serves a wide spectrum of sectors, such as agriculture, chemicals, electrical & electronics, health & medicine, industrial equipment & components, and more. It collaborates with partners, including Kenneth, Vossen Wheels, TSW, American Racing, Coverking, and others.
Ranking as of January 2025
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | Jiangsu Tengtong Packing Machinery Co., Ltd. |
53.8%
|
| 2 | Osaka Vacuum, Ltd. |
15.4%
|
| 3 | ULVAC KIKO, Inc. |
7.7%
|
| 4 | Gardner Governor Company |
7.7%
|
| 5 | SATO VAC INC. |
7.7%
|
| 6 | Nihon Pisco Co., Ltd. |
7.7%
|
Derivation Method
The ranking is calculated based on the click share within the compact vacuum pump page as of January 2025. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
Newly Established Company
Company with a History
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
|
Japan
|
5 | 83.3% |
|
China
|
1 | 16.7% |
95 products found - Page 1
95 products - Page 1
Sanko Ematech Co., Ltd.
410+ people viewing
Last viewed: 45 minutes ago
Standard Response
5.0 Company Review
■Product description A turbo molecular pump with integrated controller that uses magnetic bearings. By integrating the pump body and controller, wi...
4 models listed
Scott Planning Co., Ltd.
40+ people viewing
Last viewed: 1 hour ago
Very Fast Response
16 models listed
Sanko Ematech Co., Ltd.
710+ people viewing
Last viewed: 4 hours ago
Standard Response
5.0 Company Review
■Product description The EH series has a unique hydrodynamic drive that provides cost, performance, and compactness benefits through efficient powe...
10 models listed
Yagyu Shokai Co., Ltd.
30+ people viewing
Very Fast Response
■Features - The TSW type has a vertical angle frame with casters and is movable. ・The BSW type covers the TSW type with a box. ・Excellent durabil...
Yagyu Shokai Co., Ltd.
30+ people viewing
Last viewed: 1 day ago
Very Fast Response
■Features - All-in-one design that comes standard with gauges and fittings, making it easy to connect to a vacuum desiccator. ・The vacuum pump is ...
Yagyu Shokai Co., Ltd.
20+ people viewing
Very Fast Response
- All-in-one type equipped with an analog vacuum gauge (mbar display) and flow rate adjustment valve. - Comes with a 3 year manufacturer's warranty.
Yagyu Shokai Co., Ltd.
30+ people viewing
Last viewed: 17 hours ago
Very Fast Response
■Features - Suitable for many uses such as evaporators, filtration, degassing/defoaming, vacuum drying, etc. - Has excellent chemical resistance. -...
Yagyu Shokai Co., Ltd.
20+ people viewing
Very Fast Response
■Features ・Oil-free and contamination-free, does not contaminate the gases handled. ・Owns CE mark.
Yagyu Shokai Co., Ltd.
20+ people viewing
Last viewed: 11 hours ago
Very Fast Response
-Economical 1-stage oil rotary vacuum pump. - Compact and easy to handle, with a handle for easy carrying. -The intake port is a φ6mm hose nipple, ...
Yagyu Shokai Co., Ltd.
30+ people viewing
Last viewed: 1 day ago
Very Fast Response
■Features ・VP-225/235/245 uses a unique H structure base to prevent axis misalignment. ・VP-235 and 245 are designed with low noise and low mist o...
Yagyu Shokai Co., Ltd.
30+ people viewing
Last viewed: 1 day ago
Very Fast Response
・A high-vacuum type two-stage oil rotary pump with an emphasis on reliability and durability. ・An oil mist trap can be connected as an option. ■...
Yagyu Shokai Co., Ltd.
30+ people viewing
Very Fast Response
・An oil mist strap can be connected as an option. ■Forced oil circulation system allows stable operation. 1. Comes with a gas ballast valve, whic...
Yagyu Shokai Co., Ltd.
20+ people viewing
Very Fast Response
- A silent two-stage oil rotary vacuum pump that uses a DC motor. - Forced oil circulation system ensures stable operation. - Equipped with two adj...
Yagyu Shokai Co., Ltd.
30+ people viewing
Very Fast Response
Low vibration and low noise. ■KF25 intake adapter ・An adapter for converting the KF-25 intake pipe to an M20 female thread. - The KF-25 intake ad...
Yagyu Shokai Co., Ltd.
30+ people viewing
Last viewed: 1 day ago
Very Fast Response
■Features ・Low sound and low vibration. ・Beltless and directly connected to the motor, making it easy to integrate into equipment. *If you use a...
Yagyu Shokai Co., Ltd.
40+ people viewing
Last viewed: 1 day ago
Very Fast Response
■Features - Low exhaust noise type. - Adopts a magnetic coupling to prevent oil leakage.
Yagyu Shokai Co., Ltd.
40+ people viewing
Last viewed: 2 hours ago
Very Fast Response
■Features ・The GCD series is a strong, corrosion-resistant vacuum pump that has undergone special surface treatment on the GLD series. ・Fluororub...
