ULVAC Sales Co., Ltd.

■Summary This is a device that can be used in a wide range of applications, based on ULVAC's extensive film-forming technology ...

• Machining / Machine Tools

• Sputtering Equipment

■Summary This equipment is intended for vacuum distillation processing. It is possible to distill highly heat-sensitive substan...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary The quadrupole mass spectrometer with differential pumping system kit (Qulee with YTP-H) is equipped with enhanced fun...

• Measuring Equipment

• Mass Spectrometers

■Summary The NLD-5700 dry etching system for opto-devices and MEMS is a dry etching system for mass production equipped with a ...

• Semiconductor Manufacturing

• Etching Equipment

■Summary The high-density plasma etching system NE-550EX for research and development is a magnetic field ICP (ISM=Inductively ...

• Semiconductor Manufacturing

• Etching Equipment

■Summary The YTP series is a simple high vacuum pumping unit consisting of a ULVAC turbo molecular pump (UTM series), a rotary ...

• Purification Equipment

• Exhaust Systems

■Summary The ULVAC turbo molecular pump UTM series uses a high-performance bearing that is different from general bearings and ...

• Pumps

• Vacuum Pumps

■Summary The SRH series backside/mounting sputtering equipment is a mass production equipment intended for metal film formation...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The large PMB series is a belt-driven, low-speed mechanical booster pump. In combination with a robust rocking piston ...

• Pumps

• Booster Pumps

■Summary PHIX-tool is an automatic micro-XPS device that achieves high-performance XPS with easy operation. Features ■Excellen...

• Analyzers

• Spectroscopic Analyzer

■Summary This is a multi-chamber sputtering system that can have multiple process chambers (up to 3 200E, up to 5 200J, and up ...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The NE-5700/NE-7800 dry etching equipment for mass production is a scalable etching equipment that supports from one c...

• Semiconductor Manufacturing

• Etching Equipment

■Summary Freeze-vacuum drying equipment for small-scale production and testing in the pharmaceutical field requires space-savin...

• Machining / Machine Tools

• Freeze Dryers

■Summary The SMD series is a single-wafer sputtering system that forms metal films, ITO, IGZO, dielectric films, etc. We have a...

• Machining / Machine Tools

• Sputtering Equipment

■Automatic stage type that allows mapping measurement The UNECS series is a spectroscopic ellipsometer that measures the thickn...

• Measuring Equipment

• Ellipsometers

■Summary The PRC series is a mechanical booster pump designed primarily for use in semiconductor and liquid crystal manufacturi...

• Pumps

• Booster Pumps

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, sintering, brazing, annealing, etc. of v...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary Adopts air-cooled diffusion pump (200L/sec) + oil rotary pump. Low-cost, compact vacuum evaporation equipment (resista...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary The CCMT-D series is a capacitance manometer whose ceramic diaphragm deforms due to changes in gas pressure and detect...

• Meters & Instruments

• Vacuum Gauges

■Summary The SCH series is a horizontal in-line sputtering system that forms transparent conductive films, metal films, etc. It...

• Machining / Machine Tools

• Sputtering Equipment

■Summary This is a technology that directly injects a liquid into a vacuum, generates frozen particles through self-freezing th...

• Machining / Machine Tools

• Freeze Dryers

■Summary NLD dry etching for research and development NLD-570 is a dry etching system equipped with low pressure, low electron ...

• Semiconductor Manufacturing

• Etching Equipment

■Summary This is a new series of transducer-type vacuum gauges "G-TRAN series multi-ion gauge" that can connect probes with dif...

• Meters & Instruments

• Vacuum Gauges

■Summary This is a film deposition device that evaporates metals, oxides, etc. while continuously winding plastic film, paper, ...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary When starting an oil rotary vacuum pump or working in a low vacuum, the oil from the pump is discharged along with the...

• Purification Equipment

• Oil Traps

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, annealing, etc. of various metal parts. ...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary The HELIOT900 series is a leak detector with a high pumping speed and excellent convenience. We guarantee the best per...

• Sensors

• Leak Detectors

■Summary The Luminous NA series is a wafer size-free ashing system that can handle a wide range of processes from critical next...

• Semiconductor Manufacturing

• PVDF

■Summary The CMD series is a single-wafer CVD system for forming a-Si films, silicon oxide films, and nitride films using SiH4 ...

• Semiconductor Manufacturing

• Plasma-Enhanced CVD

■Summary The ULDiS series of sputtering systems for optical films is a digital sputtering system that is an advanced version of...

• Machining / Machine Tools

• Sputtering Equipment