ULVAC Sales Co., Ltd.

■Summary PMB series Ver.D is a general-purpose mechanical booster pump. Surface treatment and atmospheric pressure drive type c...

• Pumps

• Booster Pumps

■Summary The SMD series is a single-wafer sputtering system that forms metal films, ITO, IGZO, dielectric films, etc. We have a...

• Machining / Machine Tools

• Sputtering Equipment

■Vacuum grease BARRIERTA JFE 552HV, SUPER IS/V (fluorinated synthetic oil) Clean room/Sputtering equipment/Vacuum jig equipment...

• Protective Materials & Equipment

• Grease

■Summary The batch type high vacuum evaporation equipment ei series is an equipment for forming metal and oxide films on substr...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary Thermal diffusivity measurement in ultra-high temperature ranges up to 3,000℃. Measurement of thermal diffusivity of m...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary The VAH series is a manual high vacuum gate valve developed based on extensive technology and experience in the vacuum...

• Valves

• Vacuum Gate Valves

■Summary Turbo molecular pump (60L/sec) + dry vacuum pump. Ultimate pressure 10^-5Pa class. This is a small, dry type high vacu...

• Purification Equipment

• Exhaust Systems

■Summary Adopts water-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation de...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary G-TRAN series inverted magnetron type cold cathode gauge. Since no filament is used, there is no need to worry about w...

• Meters & Instruments

• Vacuum Gauges

■Summary Significantly reduces measurement time. This device measures the three thermal constants (thermal diffusivity, specifi...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, sintering, brazing, annealing, etc. of v...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary Ideal for small sample research and development. Capable of high-speed heating, high-speed cooling, and clean heating....

• Heat Sources

• Industrial Furnaces

■Manual stage type compatible with Φ150mm The UNECS series is a spectroscopic ellipsometer that measures the thickness and refr...

• Meters & Instruments

• Ellipsometers

■Summary SUS valve from 5/8 to 2 inch. Single-acting cylinder type, shaft seal can be selected from O-ring or bellows. The conn...

• Valves

• Vacuum Valves

■Summary This display is a 1-channel display compatible with all G-TRAN series vacuum gauges and CCM series. By connecting it t...

• Meters & Instruments

• Vacuum Gauges

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, annealing, etc. of various metal parts. ...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary High speed heat treatment from 2in to 300mm. Hold for 10 seconds. By combining high-speed heating technology, we manuf...

• Heat Sources

• Industrial Furnaces

■Summary The 4-channel display unit can connect up to 4 measuring units for simultaneous measurement and display. Equipped with...

• Meters & Instruments

• Vacuum Gauges

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats

■Summary The VAP series is a compressed air operated high vacuum gate valve developed based on our extensive technology and exp...

• Valves

• Vacuum Gate Valves

■Summary The medium current ion implanter IMX-3500 is an ion implanter with a maximum energy of 200kV and a wafer size of up to...

• Semiconductor Manufacturing

• Ion Implanters

■Summary The high-density plasma dry etching system ULHITETM NE-7800H is a multi-chamber type low-pressure, high-density plasma...

• Machining / Machine Tools

• Etching Equipment

■Summary This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrati...

• Pumps

• Vacuum Pumps

■Water-cooled oil diffusion pump (1,100L/sec) + oil rotary vacuum pump Necessary equipment such as oil diffusion pumps, oil rot...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary A turbo molecular pump with integrated controller that uses magnetic bearings. By integrating the pump body and contro...

• Pumps

• Vacuum Pumps

■Summary DC pulse power supplies are useful for arcing generated in reactive processes. This power supply improves yield and th...

• Power Supplies

• Pulse Power Supplies

■Summary The EGN series is an electron beam evaporation source for metal deposition that was newly developed with a focus on im...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary YTP series Ver.B is a high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. Evacuati...

• Purification Equipment

• Exhaust Systems

■Summary Lamp annealing equipment up to 6 inches. Silicide formation for individual semiconductor processes and process anneali...

• Heat Sources

• Industrial Furnaces

■Summary The medium current ion implanter SOPHI-200/260 is an 8, 6, and 5 inch ion implanter equipped with the latest technolog...

• Semiconductor Manufacturing

• Ion Implanters