ULVAC Sales Co., Ltd.

■Summary This device is a tabletop lamp heating device that allows heat treatment of samples up to 50 mm square. Since the rel...

• Heat Sources

• Industrial Furnaces

■Summary This is a desktop high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. In considera...

• Purification Equipment

• Exhaust Systems

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, annealing, etc. of various metal parts. ...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary All of ULVAC's EB guns for electron beam evaporation use magnetic field deflection. In addition, the structure is desi...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary The batch type high vacuum evaporation equipment ei series is an equipment for forming metal and oxide films on substr...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Neces...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary PMB series Ver.D is a general-purpose mechanical booster pump. Surface treatment and atmospheric pressure drive type c...

• Pumps

• Booster Pumps

■Summary The high-density plasma dry etching system ULHITETM NE-7800H is a multi-chamber type low-pressure, high-density plasma...

• Machining / Machine Tools

• Etching Equipment

The GP-G series is a constant temperature Pirani vacuum gauge that utilizes gas heat conduction. Platinum (Pt) is used for the ...

• Meters & Instruments

• Pirani Vacuum Gauge

■Summary For process development from solar cells to compound semiconductors, etc. The QHC series is a high-speed heating/cooli...

• Heat Sources

• Industrial Furnaces

■Summary This is a high energy ion implanter that can handle up to 2,400KeV. ■Applications Thin substrate process for power de...

• Semiconductor Manufacturing

• Ion Implanters

■Summary This is a leak test device that uses helium as the detection gas. This is an automatic helium leak test device that in...

• Test Equipment

• Leak Testers

■Summary Turbo molecular pump (60L/sec) + dry vacuum pump. Ultimate pressure 10^-5Pa class. This is a small, dry type high vacu...

• Purification Equipment

• Exhaust Systems

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary Two-stage exhaust system/With backflow prevention mechanism/Built-in thermal protector/With switch ■Features - Large ...

• Pumps

• Vacuum Pumps

■Summary The Luminous NA series is a wafer size-free ashing system that can handle a wide range of processes from critical next...

• Semiconductor Manufacturing

• PVDF

■Summary This ion gun is a revolutionary ion gun that has a maximum beam current of 10 μA, a beam diameter of less than 150 μm,...

• Measuring Equipment

• Spectroscopes

■Summary The batch type natural oxide film removal device RISETM-300 is a batch type pre-clean device that can remove difficult...

• Machining / Machine Tools

• Etching Equipment

■Water-cooled oil diffusion pump (1,100L/sec) + oil rotary vacuum pump Necessary equipment such as oil diffusion pumps, oil rot...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

We offer short couplings with ISO standard quick (release) coupling flanges.

• Fittings

• Flanges

■Summary This is a new series of transducer type "G-TRAN series multi-ion gauge" that can connect probes with different measure...

• Meters & Instruments

• Vacuum Gauges

■Summary G-TRAN series inverted magnetron type cold cathode gauge. Since no filament is used, there is no need to worry about w...

• Meters & Instruments

• Vacuum Gauges

■Summary Easily evaluate thin film samples that are difficult to measure using the flash method. This is a device that measures...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary Evaluation of in-plane thermal conductivity of various film-like membranes. This device measures the in-plane thermal ...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Features ULVAC standard O-rings have a thick wire diameter, so they have a large crushing margin and are designed to prevent l...

• Fastening Components

• O-Rings

■Summary High speed heat treatment from 2in to 300mm. Hold for 10 seconds. By combining high-speed heating technology, we manuf...

• Heat Sources

• Industrial Furnaces

■Summary This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrati...

• Pumps

• Vacuum Pumps

■Summary The VAH series is a manual high vacuum gate valve developed based on extensive technology and experience in the vacuum...

• Valves

• Vacuum Gate Valves

■Manual stage type compatible with Φ150mm The UNECS series is a spectroscopic ellipsometer that measures the thickness and refr...

• Meters & Instruments

• Ellipsometers

■Summary Ideal for small sample research and development. Capable of high-speed heating, high-speed cooling, and clean heating....

• Heat Sources

• Industrial Furnaces