ULVAC Sales Co., Ltd.

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, annealing, etc. of various metal parts. ...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary ULVAC Sales has begun cooperating with the sales of T&A (Transmittance Analyzer), a gas barrier film gas permeability ...

• Measuring Equipment

• Haze Meters

■Summary This is a light gray, translucent, hard, grease-like product that is based on highly refined, highly viscous dimethyl ...

• Lubricator-related Equipment

• Grease

■Summary Significantly reduces measurement time. This device measures the three thermal constants (thermal diffusivity, specifi...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary The high-density plasma dry etching system ULHITETM NE-7800H is a multi-chamber type low-pressure, high-density plasma...

• Semiconductor Manufacturing

• Etching Equipment

■Summary For process development from solar cells to compound semiconductors, etc. The QHC series is a high-speed heating/cooli...

• Heat Sources

• Industrial Furnaces

■Summary PMB series Ver.D is a general-purpose mechanical booster pump. Surface treatment and atmospheric pressure drive type c...

• Pumps

• Booster Pumps

■Summary Turbo molecular pump (60L/sec) + dry vacuum pump. Ultimate pressure 10^-5Pa class. This is a small, dry type high vacu...

• Purification Equipment

• Exhaust Systems

■Summary This is an ion implanter that supports low acceleration and high concentration. ■Applications Thin substrate process ...

• Semiconductor Manufacturing

• Ion Implanters

■Summary The VAH series is a manual high vacuum gate valve developed based on extensive technology and experience in the vacuum...

• Valves

• Vacuum Gate Valves

■Features ULVAC standard O-rings have a thick wire diameter, so they have a large crushing margin and are designed to prevent l...

• Sealing Devices

• O-Rings

■Summary This ion gun is a revolutionary ion gun that has a maximum beam current of 10 μA, a beam diameter of less than 150 μm,...

• Analyzers

• Spectroscopes

■Summary The batch type natural oxide film removal device RISETM-300 is a batch type pre-clean device that can remove difficult...

• Semiconductor Manufacturing

• Etching Equipment

■Features ULVAC standard square gaskets have a large wire diameter, so they have a large crushing margin and are designed to pr...

• Sealing Devices

• Gaskets

■Summary This is a high energy ion implanter that can handle up to 2,400KeV. ■Applications Thin substrate process for power de...

• Semiconductor Manufacturing

• Ion Implanters

■Summary This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrati...

• Pumps

• Vacuum Pumps

■Summary The VAP series is a compressed air operated high vacuum gate valve developed based on our extensive technology and exp...

• Valves

• Vacuum Gate Valves

■Features ULVAC standard O-rings have a thick wire diameter, so they have a large crushing margin and are designed to prevent l...

• Sealing Devices

• O-Rings

■Summary ULVAC's vacuum drying oven is a device that is suitable for degassing and pretreatment applications in a clean environ...

• Dryers

• Vacuum Dryers

■Summary All of ULVAC's EB guns for electron beam evaporation use magnetic field deflection. In addition, the structure is desi...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary A leak detector specially designed for automatic helium leak test systems. ■Applications ・Automatic leak test system...

• Sensors

• Leak Detectors

■Summary The CAS series uses an infrared gold image furnace to achieve rapid heating and cooling, direct temperature control of...

• Machining / Machine Tools

• Heating Apparatus

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary The CC-200/400 load-lock plasma CVD equipment is small and easy to use, and is suitable for everything from research a...

• Semiconductor Manufacturing

• Plasma-Enhanced CVD

■Summary The medium current ion implanter SOPHI-200/260 is an 8, 6, and 5 inch ion implanter equipped with the latest technolog...

• Semiconductor Manufacturing

• Ion Implanters

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Neces...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary This is a new series of transducer type "G-TRAN series multi-ion gauge" that can connect probes with different measure...

• Meters & Instruments

• Vacuum Gauges

■Summary Ideal for small sample research and development. Capable of high-speed heating, high-speed cooling, and clean heating....

• Heat Sources

• Industrial Furnaces

■Water-cooled oil diffusion pump (1,100L/sec) + oil rotary vacuum pump Necessary equipment such as oil diffusion pumps, oil rot...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices