ULVAC Sales Co., Ltd.

The GP-G series is a constant temperature Pirani vacuum gauge that utilizes gas heat conduction. Platinum (Pt) is used for the ...

• Meters & Instruments

• Pirani Vacuum Gauge

■Summary ULVAC Sales has begun cooperating with the sales of T&A (Transmittance Analyzer), a gas barrier film gas permeability ...

• Measuring Equipment

• Haze Meters

■Summary Measures thermal conductivity of a wide range of materials from polymers to metals. This is a device that measures spe...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary The VAH series is a manual high vacuum gate valve developed based on extensive technology and experience in the vacuum...

• Valves

• Vacuum Gate Valves

■Summary Significantly reduces measurement time. This device measures the three thermal constants (thermal diffusivity, specifi...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary In-plane distribution evaluation and analysis of materials. This device simultaneously measures the in-plane two-dimen...

• Observation Equipment

• Scanning Probe Microscopes

■Summary The high-density plasma dry etching system ULHITETM NE-7800H is a multi-chamber type low-pressure, high-density plasma...

• Semiconductor Manufacturing

• Etching Equipment

■Summary PMB series Ver.D is a general-purpose mechanical booster pump. Surface treatment and atmospheric pressure drive type c...

• Pumps

• Booster Pumps

■Summary For process development from solar cells to compound semiconductors, etc. The QHC series is a high-speed heating/cooli...

• Heat Sources

• Industrial Furnaces

■Summary Turbo molecular pump (60L/sec) + dry vacuum pump. Ultimate pressure 10^-5Pa class. This is a small, dry type high vacu...

• Purification Equipment

• Exhaust Systems

■Summary This ion gun is a revolutionary ion gun that has a maximum beam current of 10 μA, a beam diameter of less than 150 μm,...

• Analyzers

• Spectroscopes

■Summary This is an ion implanter that supports low acceleration and high concentration. ■Applications Thin substrate process ...

• Semiconductor Manufacturing

• Ion Implanters

■Summary The VAP series is a compressed air operated high vacuum gate valve developed based on our extensive technology and exp...

• Valves

• Vacuum Gate Valves

■Summary A leak detector specially designed for automatic helium leak test systems. ■Applications ・Automatic leak test system...

• Sensors

• Leak Detectors

■Summary This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrati...

• Pumps

• Vacuum Pumps

■Summary The CAS series uses an infrared gold image furnace to achieve rapid heating and cooling, direct temperature control of...

• Machining / Machine Tools

• Heating Apparatus

■Summary The CC-200/400 load-lock plasma CVD equipment is small and easy to use, and is suitable for everything from research a...

• Semiconductor Manufacturing

• Plasma-Enhanced CVD

■Summary The batch type natural oxide film removal device RISETM-300 is a batch type pre-clean device that can remove difficult...

• Semiconductor Manufacturing

• Etching Equipment

■Summary This is a high energy ion implanter that can handle up to 2,400KeV. ■Applications Thin substrate process for power de...

• Semiconductor Manufacturing

• Ion Implanters

■Summary ULVAC's vacuum drying oven is a device that is suitable for degassing and pretreatment applications in a clean environ...

• Dryers

• Vacuum Dryers

■Features ULVAC standard O-rings have a thick wire diameter, so they have a large crushing margin and are designed to prevent l...

• Sealing Devices

• O-Rings

■Features ULVAC standard square gaskets have a large wire diameter, so they have a large crushing margin and are designed to pr...

• Sealing Devices

• Gaskets

■Summary Since manufacturing the first machine in 1957, we have delivered more than 200 units both domestically and internation...

• Machining / Machine Tools

• Metal Melting Furnaces

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Neces...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary This is a new series of transducer type "G-TRAN series multi-ion gauge" that can connect probes with different measure...

• Meters & Instruments

• Vacuum Gauges

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary Ideal for small sample research and development. Capable of high-speed heating, high-speed cooling, and clean heating....

• Heat Sources

• Industrial Furnaces

■Water-cooled oil diffusion pump (1,100L/sec) + oil rotary vacuum pump Necessary equipment such as oil diffusion pumps, oil rot...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary Evaluation of in-plane thermal conductivity of various film-like membranes. This device measures the in-plane thermal ...

• Meters & Instruments

• Thermal Conductivity Analyzers