ULVAC Sales Co., Ltd.

■Summary Auger Electron Spectroscopy (AES) is a method to obtain information about elemental composition by measuring the spect...

• Analyzers

• Spectroscopic Analyzer

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats

■Summary For process development from solar cells to compound semiconductors, etc. In addition to the functions of the QHC seri...

• Heat Sources

• Industrial Furnaces

We offer blank flanges for ISO standard quick (release) coupling flanges.

• Fittings

• Blank Flanges

■Summary COVOT is a high-vacuum compatible transfer robot with high rigidity and excellent positioning accuracy, designed based...

• Robots

• Transport Robots

■Summary The PKS series is a large oscillating piston type oil rotary vacuum pump that is extremely robust and has stable exhau...

• Pumps

• Vacuum Pumps

■Summary A tabletop lamp heating device that does not use cooling water. Cooling is done using an air-cooling fan, so you can h...

• Heat Sources

• Industrial Furnaces

■Summary VS650A/VS750A is a single stage rotary vane oil rotary vacuum pump. The large displacement provides stable pumping per...

• Pumps

• Vacuum Pumps

■Summary The dry vacuum pump GR series is a simple pump designed for general industry, based on the proven and reliable LR/HR s...

• Pumps

• Vacuum Pumps

■Summary ULVAC's new residual gas analyzer/process gas monitor (RGA) provides high precision and high resolution under high pre...

• Meters & Instruments

• Gas Analyzers

■Summary Single wafer PE-CVD equipment CME-200E/400 is a PE-CVD equipment for mass production that is ideal for forming silicon...

• Semiconductor Manufacturing

• Plasma-Enhanced CVD

■Features The ULVAC standard Kozan string gasket has a thick wire diameter, so it has a large crushing allowance and is designe...

• Sealing Devices

• Gaskets

■Summary The DCS series of DC power supplies for sputtering has excellent cost performance as well as basic performance, and ca...

• Power Supplies

• DC Power Supplies

■Summary This is a device for brazing heat exchangers such as EGR coolers, radiators, and evaporators. We have a rich lineup ra...

• Machining / Machine Tools

• Brazing Machine

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats

■Summary Forming a heating system according to the purpose of heat treatment. This equipment has a heating furnace and heating ...

• Machining / Machine Tools

• Annealing Furnaces

■Summary ULVAC's new residual gas analyzer (compatible with Ethernet communication) is revolutionary in its simplicity and ease...

• Meters & Instruments

• Gas Analyzers

Vacuum flange Flanges with intake pipes are available. ■Note -Products and data are subject to change without notice. - Some p...

• Sealing Devices

• Vacuum Flanges

■Summary The SV series is a vertical batch type sputtering device. There is the SV-200, which is dedicated to disk stampers, an...

• Machining / Machine Tools

• Sputtering Equipment

Flexible hoses for KF-ISO piping are available for ISO-KF. *In addition, we also accept custom-made products such as shapes an...

• Hoses / Tubes

• Flexible Hoses

■Summary This is a pressure sensor unit that uses a semiconductor thin film element that can accurately measure near atmospheri...

• Meters & Instruments

• Vacuum Gauges

■Summary Standard type / 2-stage exhaust system / Built-in thermal protector / Motor lead wire crimp terminal included ■Featur...

• Pumps

• Vacuum Pumps

■Features We offer JIS standard O-ring P series (for motion, for fixing on cylindrical surfaces, and for fixing on flat surface...

• Sealing Devices

• O-Rings

■Features JIS standard O-ring G series (for fixing on cylindrical surfaces and on flat surfaces) is available. ■Note Products ...

• Sealing Devices

• O-Rings

■Summary This is a vacuum pump that performs evacuation through the reciprocating motion of a thin rubber membrane (diaphragm)....

• Pumps

• Vacuum Pumps

Vacuum flange I-type pipes are available. *SS product also available (with Ni plating) *In addition, we also accept custom-mad...

• Sealing Devices

• Vacuum Flanges

■Features ULVAC standard square gaskets have a large wire diameter, so they have a large crushing margin and are designed to pr...

• Sealing Devices

• Gaskets

We offer aluminum clamps with ISO standard quick (release) coupling flanges.

• Machining / Machine Tools

• One-Touch Clamps

■Features JIS standard O-ring V series (for vacuum flanges) is available. ■Note Products and data are subject to change withou...

• Sealing Devices

• O-Rings