ULVAC Sales Co., Ltd.

■Summary Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features...

• Pumps

• Vacuum Pumps

Flexible hoses for KF-ISO piping are available for ISO-KF. *In addition, we also accept custom-made products such as shapes an...

• Hoses / Tubes

• Flexible Hoses

■Summary Turbo molecular pump (345L/sec) + scroll pump. Ultimate pressure 10^-5Pa class. Necessary equipment such as the main p...

• Purification Equipment

• Exhaust Systems

■Features ULVAC standard square gaskets have a large wire diameter, so they have a large crushing margin and are designed to pr...

• Fastening Components

• Gaskets

■Summary The EGN series is an electron beam evaporation source for metal deposition that was newly developed with a focus on im...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary A leak detector specially designed for automatic helium leak test systems. ■Applications ・Automatic leak test system...

• Sensors

• Leak Detectors

■Summary The SPW series is a roll-up type sputtering device that can form multilayer films such as optical films and metals on ...

• Machining / Machine Tools

• Sputtering Equipment

■Features JIS standard O-ring G series (for fixing on cylindrical surfaces and on flat surfaces) is available. ■Note Products ...

• Fastening Components

• O-Rings

■Summary COVOT is a high-vacuum compatible transfer robot with high rigidity and excellent positioning accuracy, designed based...

• Robots

• Transport Robots

■Summary PHIX-tool is an automatic micro-XPS device that achieves high-performance XPS with easy operation. Features ■Excellen...

• Analyzers

• Spectroscopic Analyzer

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary The CAS series uses an infrared gold image furnace to achieve rapid heating and cooling, direct temperature control of...

• Machining / Machine Tools

• Heating Apparatus

■Summary This is a composite vane-type turbomolecular pump that uses digital 5-axis control magnetic bearings. UTM-FH and UTM-F...

• Pumps

• Vacuum Pumps

■Summary VS650A/VS750A is a single stage rotary vane oil rotary vacuum pump. The large displacement provides stable pumping per...

• Pumps

• Vacuum Pumps

■Summary ULVAC Cryo has been used in many fields such as electronics, optics, solar energy, nuclear fusion, space development, ...

• Pumps

• Vacuum Pumps

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, annealing, brazing, and sintering of var...

• Machining / Machine Tools

• Heat Treating Furnaces

■Summary A dry vacuum pump that achieves both high-speed pumping and low power consumption. With a lineup of 4 models, you can ...

• Pumps

• Vacuum Pumps

■Summary Auger electron spectroscopy (AES) is an analytical method that measures the energy of Auger electrons emitted when a s...

• Analyzers

• Spectroscopic Analyzer

■Summary For process development from solar cells to compound semiconductors, etc. In addition to the functions of the QHC seri...

• Heat Sources

• Industrial Furnaces

■Summary This is a device for brazing heat exchangers such as EGR coolers, radiators, and evaporators. We have a rich lineup ra...

• Machining / Machine Tools

• Brazing Machine

■Summary Standard type / 2-stage exhaust system / Built-in thermal protector / Motor lead wire crimp terminal included ■Featur...

• Pumps

• Vacuum Pumps

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

■Features JIS standard O-ring V series (for vacuum flanges) is available. ■Note Products and data are subject to change withou...

• Fastening Components

• O-Rings

■Summary ULVAC's new residual gas analyzer/process gas monitor (RGA) provides high precision and high resolution under high pre...

• Meters & Instruments

• Gas Analyzers

■Summary The G-TRAN series is a vacuum gauge developed with the concepts of (1) cost reduction, (2) space saving, and (3) wirin...

• Meters & Instruments

• Vacuum Gauges

■Summary Single wafer PE-CVD equipment CME-200E/400 is a PE-CVD equipment for mass production that is ideal for forming silicon...

• Machining / Machine Tools

• Plasma-Enhanced CVD

■Summary COVOT-LC is a simple and affordable vacuum transfer robot that does not have a Z-axis. ■Applications ・Automatic wafe...

• Robots

• Transport Robots

■Summary To save space, we use L-type pumps that are lower in height, and multi-systems that operate multiple pumps with one co...

• Pumps

• Vacuum Pumps

We offer long couplings with ISO standard quick (release) coupling flanges.

• Fittings

• Flanges

■Summary The DCS series of DC power supplies for sputtering has excellent cost performance as well as basic performance, and ca...

• Power Supplies

• DC Power Supplies