ULVAC Sales Co., Ltd.

■Summary Since manufacturing the first machine in 1957, we have delivered more than 200 units both domestically and internation...

• Machining / Machine Tools

• Metal Melting Furnaces

■Summary A tabletop lamp heating device that does not use cooling water. Cooling is done using an air-cooling fan, so you can h...

• Heat Sources

• Industrial Furnaces

■Summary Adopts water-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation de...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary ULVAC's new residual gas analyzer/process gas monitor (RGA) provides high precision and high resolution under high pre...

• Meters & Instruments

• Gas Analyzers

■Summary Auger Electron Spectroscopy (AES) is a method to obtain information about elemental composition by measuring the spect...

• Analyzers

• Spectroscopic Analyzer

■Summary Forming a heating system according to the purpose of heat treatment. This equipment has a heating furnace and heating ...

• Machining / Machine Tools

• Annealing Furnaces

■Summary Thermal diffusivity measurement in ultra-high temperature ranges up to 3,000℃. Measurement of thermal diffusivity of m...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary For process development from solar cells to compound semiconductors, etc. In addition to the functions of the QHC seri...

• Heat Sources

• Industrial Furnaces

■Features We offer JIS standard O-ring P series (for motion, for fixing on cylindrical surfaces, and for fixing on flat surface...

• Fastening Components

• O-Rings

■Features We offer JIS standard O-ring P series (for motion, for fixing on cylindrical surfaces, and for fixing on flat surface...

• Fastening Components

• O-Rings

■Summary ULVAC's new residual gas analyzer (compatible with Ethernet communication) is revolutionary in its simplicity and ease...

• Meters & Instruments

• Gas Analyzers

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats

■Summary The PKS series is a large oscillating piston type oil rotary vacuum pump that is extremely robust and has stable exhau...

• Pumps

• Vacuum Pumps

■Summary The dry vacuum pump GR series is a simple pump designed for general industry, based on the proven and reliable LR/HR s...

• Pumps

• Vacuum Pumps

■Summary The DCS series of DC power supplies for sputtering has excellent cost performance as well as basic performance, and ca...

• Power Supplies

• DC Power Supplies

■Summary The SV series is a vertical batch type sputtering device. There is the SV-200, which is dedicated to disk stampers, an...

• Machining / Machine Tools

• Sputtering Equipment

■Summary COVOT is a high-vacuum compatible transfer robot with high rigidity and excellent positioning accuracy, designed based...

• Robots

• Transport Robots

■Summary This is a vacuum pump that performs evacuation through the reciprocating motion of a thin rubber membrane (diaphragm)....

• Pumps

• Vacuum Pumps

■Summary Standard type/1 stage exhaust system/Built-in thermal protector/With motor lead wire crimp terminal ■Features ・Stand...

• Pumps

• Vacuum Pumps

■Summary This is a composite vane-type turbomolecular pump that uses digital 5-axis control magnetic bearings. UTM-FH and UTM-F...

• Pumps

• Vacuum Pumps

■Features JIS standard O-ring V series (for vacuum flanges) is available. ■Note Products and data are subject to change withou...

• Fastening Components

• O-Rings

■Summary The EGN series is an electron beam evaporation source for metal deposition that was newly developed with a focus on im...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Features ULVAC standard square gaskets have a large wire diameter, so they have a large crushing margin and are designed to pr...

• Fastening Components

• Gaskets

■Summary Standard type / 2-stage exhaust system / Built-in thermal protector / Motor lead wire crimp terminal included ■Featur...

• Pumps

• Vacuum Pumps

■Summary Turbo molecular pump (345L/sec) + scroll pump. Ultimate pressure 10^-5Pa class. Necessary equipment such as the main p...

• Purification Equipment

• Exhaust Systems

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary Qualitative analysis of desorbed gas using a mass spectrometer While heating the sample using an infrared gold image f...

• Meters & Instruments

• Gas Analyzers

■Summary VS650A/VS750A is a single stage rotary vane oil rotary vacuum pump. The large displacement provides stable pumping per...

• Pumps

• Vacuum Pumps

■Summary ・Low price ・Can accelerate up to 2kV ・With port aligner ・Adjust the length from the mounting flange to the tip of ...

• Measuring Equipment

• Spectroscopes

■Summary Single wafer PE-CVD equipment CME-200E/400 is a PE-CVD equipment for mass production that is ideal for forming silicon...

• Machining / Machine Tools

• Plasma-Enhanced CVD