ULVAC Sales Co., Ltd.

■Summary EGP-1G is an electron beam evaporation source for optical film deposition that reduces costs by adopting a simple 180º...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

■Summary ULVAC's PBL type oil diffusion ejector pump is a diffusion pump that can increase pumping speed in the medium vacuum r...

• Pumps

• Vacuum Pumps

■Summary The VS series is a single-stage rotary vane type oil rotary vacuum pump. The simplified structure has made it smaller ...

• Pumps

• Vacuum Pumps

■Summary GST-07L-B is a sputter ion pump control that has achieved high functionality and reliability thanks to ULVAC's extensi...

• Semiconductor Manufacturing

• Ion Implanters

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

KF-ISO piping elbows are available.

• Fittings

• Elbows

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary 1-stage exhaust system/With backflow prevention mechanism/Built-in thermal protector/Power cord with plug/With switch ...

• Pumps

• Vacuum Pumps

■Summary This is an ULVAC standard flange that complies with JIS.

• Fittings

• Flanges

We offer KF replacement flanges for KF-ISO piping. Other sizes are also available.

• Fittings

• Flanges

■Summary Standard type/1 stage exhaust system/Built-in thermal protector/Power supply with plug/With switch ■Features ・Standa...

• Pumps

• Vacuum Pumps

■Summary The NCH series is a vacuum transfer platform that combines a robot with a transfer core chamber/load lock chamber, etc...

• Robots

• Transport Robots

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary Two-stage exhaust system/With gas ballast mechanism/Built-in thermal protector/Power cord with plug ■Features ・Oil r...

• Pumps

• Vacuum Pumps

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary Turbo molecular pump (345L/sec) + oil rotary vacuum pump. Ultimate pressure is 10^-5Pa. Necessary equipment such as th...

• Purification Equipment

• Exhaust Systems

■Summary The dry vacuum pump CR series VerB is an air-cooled roots-type dry vacuum pump that has obtained international standar...

• Pumps

• Vacuum Pumps

■Summary The "Qulee HGM2" is a high-end model of ULVAC's new residual gas analyzer Qulee series (Ethernet communication compati...

• Meters & Instruments

• Gas Analyzers

■Summary The Super Trap, which uses a helium refrigerator, greatly increases the speed at which moisture is pumped out, contrib...

• Pumps

• Vacuum Pumps

ISO standard quick (release) coupling flange O-ring seats (with fluororubber (FPM) O-rings) are available.

• Fittings

• Flanges

■Summary VD series Ver.C is an oil rotary vacuum pump equipped with ULVAC's original high efficiency (IE3) multi-voltage motor....

• Pumps

• Vacuum Pumps

■Summary The RFS-N series is a 13.56MHz RF power supply for plasma processes with an output of 0.5kW/1/kW/3kW/5kW. Equipped wit...

■Summary 1-stage exhaust system/With backflow prevention mechanism/Built-in thermal protector/Power cord with plug ■Features ...

• Pumps

• Vacuum Pumps

We have KF-ISO piping cloth available.

• Fittings

• Pipe Fittings

■Summary ELEC-RZ is a high vacuum compatible transfer robot that is compact and low cost based on the excellent functions and p...

• Robots

• Transport Robots

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

We have tees for KF-ISO piping available.

• Fittings

• Pipe Fittings