ULVAC Sales Co., Ltd.

■Summary 1-stage exhaust system/With backflow prevention mechanism/Built-in thermal protector/Power cord with plug/With switch ...

• Pumps

• Vacuum Pumps

■Summary Roots type/effective pumping speed display/with various protection functions ■Features ・A small type of Roots-type v...

• Pumps

• Vacuum Pumps

■Summary The PVD series is a small two-stage rotary vane oil rotary vacuum pump (rotary pump). A belt-driven, low-speed rotary ...

• Pumps

• Vacuum Pumps

■Summary The VS series is a single-stage rotary vane type oil rotary vacuum pump. The simplified structure has made it smaller ...

• Pumps

• Vacuum Pumps

■Summary Turbo molecular pump (345L/sec) + oil rotary vacuum pump. Ultimate pressure is 10^-5Pa. Necessary equipment such as th...

• Purification Equipment

• Exhaust Systems

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary COVOT-6 is a vacuum transfer robot that has four independent arms and achieves high throughput. ■Applications ・Autom...

• Robots

• Transport Robots

We offer KF replacement flanges for KF-ISO piping. Other sizes are also available.

• Fittings

• Flanges

■Summary The NCH series is a vacuum transfer platform that combines a robot with a transfer core chamber/load lock chamber, etc...

• Robots

• Transport Robots

■Summary The dry vacuum pump CR series VerB is an air-cooled roots-type dry vacuum pump that has obtained international standar...

• Pumps

• Vacuum Pumps

■Summary VD series Ver.C is an oil rotary vacuum pump equipped with ULVAC's original high efficiency (IE3) multi-voltage motor....

• Pumps

• Vacuum Pumps

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary Two-stage exhaust system/With gas ballast mechanism/Built-in thermal protector/Power cord with plug ■Features ・Oil r...

• Pumps

• Vacuum Pumps

■Summary Standard type/1 stage exhaust system/Built-in thermal protector/Power supply with plug/With switch ■Features ・Standa...

• Pumps

• Vacuum Pumps

■Summary The "Qulee HGM2" is a high-end model of ULVAC's new residual gas analyzer Qulee series (Ethernet communication compati...

• Meters & Instruments

• Gas Analyzers

■Summary This is an ULVAC standard flange that complies with JIS.

• Fittings

• Flanges

■Summary DC-10 and DC-20 are DC power supplies for sputtering with 10kW and 20kW output. It is composed of reliable parts and c...

• Power Supplies

• DC Power Supplies

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary ELEC-RZ is a high vacuum compatible transfer robot that is compact and low cost based on the excellent functions and p...

• Robots

• Transport Robots

■Summary The Super Trap, which uses a helium refrigerator, greatly increases the speed at which moisture is pumped out, contrib...

• Pumps

• Vacuum Pumps

■Summary The RFS-N series is a 13.56MHz RF power supply for plasma processes with an output of 0.5kW/1/kW/3kW/5kW. Equipped wit...

■Summary 1-stage exhaust system/With backflow prevention mechanism/Built-in thermal protector/Power cord with plug ■Features ...

• Pumps

• Vacuum Pumps

ISO standard quick (release) coupling flange O-ring seats (with fluororubber (FPM) O-rings) are available.

• Fittings

• Flanges

We have KF-ISO piping nozzles available.

• Fittings

• Pipe Fittings

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

We have KF-ISO piping cloth available.

• Fittings

• Pipe Fittings

KF-ISO piping nipples are available.

• Fittings

• Pipe Fittings

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps

■Summary A rotary vane type vacuum pump that uses lubricating oil. A vacuum pump with high performance, low noise and high reli...

• Pumps

• Vacuum Pumps

■Summary Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Oil rotary vacuum pu...

• Pumps

• Vacuum Pumps