This section provides an overview for pirani vacuum gauge as well as their applications and principles. Also, please take a look at the list of 10 pirani vacuum gauge manufacturers and their company rankings.
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A Pirani vacuum gauge is a sensor that uses electrical resistance to measure the degree of vacuum.
A Pirani vacuum gauge devices are used in many situations to measure the degree of vacuum because of their small size, easy portability, and simple operation. A Pirani vacuum gauge is also called a Pirani gauge, or simply Pirani.
A Pirani vacuum gauge is characterized by their simple configuration and low cost. When the measuring element is placed in the measurement environment, the current to the element changes according to the vacuum level, allowing the vacuum level to be measured. In general, a Pirani vacuum gauge consists of a controller and a measuring element, and the measuring range is from about 0.5kPa to 2kPa.
In principle, other vacuum gauges are required for measurements where pressure values are important, since the accuracy becomes poor near the lower limit of the measuring range. Some Pirani vacuum gauges have a separable measuring element and controller. Some vacuum gauges can only be used within their measuring range and will break if used outside of that range, but the Pirani vacuum gauges have no such concerns and can operate from atmospheric pressure.
Pirani vacuum gauges are used in fluid circuits connected to chambers, quartz tubes, etc., where vacuum reach control is required, and where surface cleanliness is required. Specifically, they are often used to measure in the medium vacuum range.
A medium vacuum range is a vacuum state that can be reached using an oil-rotary vacuum pump, such as when measuring CFC gas suction. Pirani vacuum gauges are often used in the roughing line of high vacuum to ultra-high vacuum pumping systems and in the back pressure line of high vacuum pumps.
However, since the indicated value varies depending on the type and composition of the gas, sufficient calibration is required in advance to measure absolute pressure. Pirani vacuum gauges are also used to measure the vacuum conditions created in physical and chemical experiments, vacuum evaporation, freeze-drying, medical instruments, analyzers, laser application equipment, vacuum pumping equipment, plasma etching spaces in semiconductor manufacturing equipment, and vacuum packing in electron microscopes.
Pirani vacuum gauges are electrical resistance vacuum gauges that calculate the current from the thermal energy dissipated when gas impinges on a platinum (Pt) wire that has an electric current flowing through it. The pressure is calculated backward from the value of the current. This infinitesimal pressure corresponds directly to the degree of vacuum.
The Pirani vacuum gauge has very thin platinum wire stretched inside its measuring element, and electricity is applied to this platinum wire to heat it to a temperature of about 200 degrees Celsius. When air strikes the platinum wire, it removes heat from the platinum wire, causing the controller to apply more power to the platinum wire in order to maintain the platinum wire at 200°C. Conversely, when air strikes the platinum wire, it removes heat from the platinum wire.
Conversely, if there are no gas molecules striking the platinum wire, the temperature of the platinum wire can be maintained at 200°C with less power. By measuring the change in the amount of power supplied to the platinum wire, the degree of vacuum in the measurement environment can be measured.
In addition, the management of the platinum wire is important to maintain the accuracy of the Pirani vacuum tube. The platinum wire is worn out by repeated energization and requires more power to reach 200°C than when the wire was new, so it must be replaced periodically. Periodic cleaning of the platinum wire is also essential, as dust adhesion to the platinum wire can affect the measurement accuracy.
Pressure is divided into degrees of vacuum, such as low, medium, high, and ultra-high vacuum, etc. Pirani vacuum gauges can measure from low to medium vacuum. According to JIS (Japanese Industrial Standards), vacuum levels are classified into five categories according to the pressure range as follows:
*Including some distributors, etc.
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