ULVAC Sales Co., Ltd.

■Summary This is a leak test device that uses helium as the detection gas. This is an automatic helium leak test device that in...

• Test Equipment

• Leak Testers

■Summary All of ULVAC's EB guns for electron beam evaporation use magnetic field deflection. In addition, the structure is desi...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary G-TRAN series inverted magnetron type cold cathode gauge. Since no filament is used, there is no need to worry about w...

• Meters & Instruments

• Vacuum Gauges

A portable aspirator with a built-in diaphragm dry vacuum pump. Ideal for reducing pressure in rotary evaporators, centrifugal ...

• Pumps

• Aspirators

■Summary Lamp annealing equipment up to 6 inches. Silicide formation for individual semiconductor processes and process anneali...

• Heat Sources

• Industrial Furnaces

■Summary The medium current ion implanter IMX-3500 is an ion implanter with a maximum energy of 200kV and a wafer size of up to...

• Semiconductor Manufacturing

• Ion Implanters

■Summary Easily evaluate thin film samples that are difficult to measure using the flash method. This is a device that measures...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary The ENTRONTM-EX2 W300 multi-chamber sputtering system is a state-of-the-art platform that connects a variety of proces...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats

■Summary The medium current ion implanter SOPHI-200/260 is an 8, 6, and 5 inch ion implanter equipped with the latest technolog...

• Semiconductor Manufacturing

• Ion Implanters

■Summary High speed heat treatment from 2in to 300mm. Hold for 10 seconds. By combining high-speed heating technology, we manuf...

• Heat Sources

• Industrial Furnaces

■Summary DC pulse power supplies are useful for arcing generated in reactive processes. This power supply improves yield and th...

• Power Supplies

• Pulse Power Supplies

We offer short couplings with ISO standard quick (release) coupling flanges.

• Fittings

• Flanges

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Neces...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary Auger electron spectroscopy (AES) is an analytical method that measures the energy of Auger electrons emitted when a s...

• Analyzers

• Spectroscopic Analyzer

■Summary Evaluation of thermal conductivity of polymers, glass, etc. This device is a steady method thermal conductivity measur...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features...

• Pumps

• Vacuum Pumps

■Summary For research and development and quality control of thermally conductive polymer materials. It is possible to evaluate...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary Adopts water-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation de...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary This display is a 1-channel display compatible with all G-TRAN series vacuum gauges and CCM series. By connecting it t...

• Meters & Instruments

• Vacuum Gauges

■Summary Rapidly heats up to 1,800℃ in 1 minute. This is a compact infrared gold image furnace that can heat up to 1,800℃. It c...

• Heat Sources

• Industrial Furnaces

■Summary A turbo molecular pump with integrated controller that uses magnetic bearings. By integrating the pump body and contro...

• Pumps

• Vacuum Pumps

■Summary Thermal diffusivity measurement in ultra-high temperature ranges up to 3,000℃. Measurement of thermal diffusivity of m...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary This is a composite vane-type turbomolecular pump that uses digital 5-axis control magnetic bearings. UTM-FH and UTM-F...

• Pumps

• Vacuum Pumps

■Summary This is a small, resistance-heating, low-cost vacuum evaporation device that compactly houses a turbomolecular pump an...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Features We offer JIS standard O-ring P series (for motion, for fixing on cylindrical surfaces, and for fixing on flat surface...

• Sealing Devices

• O-Rings

■Summary Adopts air-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation devi...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary This is a tabletop ultra-high temperature lamp annealing device that can heat expensive samples such as SiC and small ...

• Heat Sources

• Industrial Furnaces

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, annealing, brazing, and sintering of var...

• Machining / Machine Tools

• Heat Treating Furnaces

■Summary ULVAC Cryo has been used in many fields such as electronics, optics, solar energy, nuclear fusion, space development, ...

• Pumps

• Vacuum Pumps