ULVAC Sales Co., Ltd.

■Summary The CAS series uses an infrared gold image furnace to achieve rapid heating and cooling, direct temperature control of...

• Machining / Machine Tools

• Heating Apparatus

■Summary Ideal for small sample research and development. Capable of high-speed heating, high-speed cooling, and clean heating....

• Heat Sources

• Industrial Furnaces

■Summary The CC-200/400 load-lock plasma CVD equipment is small and easy to use, and is suitable for everything from research a...

• Machining / Machine Tools

• Plasma-Enhanced CVD

■Summary The VAP series is a compressed air operated high vacuum gate valve developed based on our extensive technology and exp...

• Valves

• Vacuum Gate Valves

■Summary Evaluation of thermal conductivity of polymers, glass, etc. This device is a steady method thermal conductivity measur...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary The medium current ion implanter SOPHI-200/260 is an 8, 6, and 5 inch ion implanter equipped with the latest technolog...

• Semiconductor Manufacturing

• Ion Implanters

■Summary Lamp annealing equipment up to 6 inches. Silicide formation for individual semiconductor processes and process anneali...

• Heat Sources

• Industrial Furnaces

■Summary DC pulse power supplies are useful for arcing generated in reactive processes. This power supply improves yield and th...

• Power Supplies

• Pulse Power Supplies

■Summary A leak detector specially designed for automatic helium leak test systems. ■Applications ・Automatic leak test system...

• Sensors

• Leak Detectors

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats

■Summary The ENTRONTM-EX2 W300 multi-chamber sputtering system is a state-of-the-art platform that connects a variety of proces...

• Machining / Machine Tools

• Sputtering Equipment

■Summary For research and development and quality control of thermally conductive polymer materials. It is possible to evaluate...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary A turbo molecular pump with integrated controller that uses magnetic bearings. By integrating the pump body and contro...

• Pumps

• Vacuum Pumps

■Summary The medium current ion implanter IMX-3500 is an ion implanter with a maximum energy of 200kV and a wafer size of up to...

• Semiconductor Manufacturing

• Ion Implanters

■Summary Auger electron spectroscopy (AES) is an analytical method that measures the energy of Auger electrons emitted when a s...

• Analyzers

• Spectroscopic Analyzer

A portable aspirator with a built-in diaphragm dry vacuum pump. Ideal for reducing pressure in rotary evaporators, centrifugal ...

• Pumps

• Aspirators

■Summary Adopts air-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation devi...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary ULVAC Cryo has been used in many fields such as electronics, optics, solar energy, nuclear fusion, space development, ...

• Pumps

• Vacuum Pumps

■Summary This display is a 1-channel display compatible with all G-TRAN series vacuum gauges and CCM series. By connecting it t...

• Meters & Instruments

• Vacuum Gauges

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Neces...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

We offer blank flanges for ISO standard quick (release) coupling flanges.

• Sealing Devices

• Blank Flanges

■Summary This is a small, resistance-heating, low-cost vacuum evaporation device that compactly houses a turbomolecular pump an...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Features The ULVAC standard Kozan string gasket has a thick wire diameter, so it has a large crushing allowance and is designe...

• Fastening Components

• Gaskets

■Summary Rapidly heats up to 1,800℃ in 1 minute. This is a compact infrared gold image furnace that can heat up to 1,800℃. It c...

• Heat Sources

• Industrial Furnaces

■Summary We respond to customer needs with infrared lamp heating. Infrared gold image furnaces are used in various fields as re...

• Heat Sources

• Industrial Furnaces

■Summary Since manufacturing the first machine in 1957, we have delivered more than 200 units both domestically and internation...

• Machining / Machine Tools

• Metal Melting Furnaces

■Summary This is a tabletop ultra-high temperature lamp annealing device that can heat expensive samples such as SiC and small ...

• Heat Sources

• Industrial Furnaces

■Summary Thermal diffusivity measurement in ultra-high temperature ranges up to 3,000℃. Measurement of thermal diffusivity of m...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary ULVAC's new residual gas analyzer/process gas monitor (RGA) provides high precision and high resolution under high pre...

• Meters & Instruments

• Gas Analyzers