ULVAC Sales Co., Ltd.

■Summary The SCH series is a horizontal in-line sputtering system that forms transparent conductive films, metal films, etc. It...

• Machining / Machine Tools

• Sputtering Equipment

We offer short couplings with ISO standard quick (release) coupling flanges.

• Fittings

• Flanges

■Summary The CCMT-D series is a capacitance manometer whose ceramic diaphragm deforms due to changes in gas pressure and detect...

• Meters & Instruments

• Vacuum Gauges

■Summary The ULDiS series of sputtering systems for optical films is a digital sputtering system that is an advanced version of...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The NLD-5700 dry etching system for opto-devices and MEMS is a dry etching system for mass production equipped with a ...

• Machining / Machine Tools

• Etching Equipment

■Summary The genuine oil "ULVOIL" D series is a special oil developed for oil diffusion pumps, and B-6 is for oil diffusion eje...

• Protective Materials & Equipment

• Lubricants

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Neces...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary This is a small, resistance-heating, low-cost vacuum evaporation device that compactly houses a turbomolecular pump an...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary The YTP series is a simple high vacuum pumping unit consisting of a ULVAC turbo molecular pump (UTM series), a rotary ...

• Purification Equipment

• Exhaust Systems

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, sintering, brazing, annealing, etc. of v...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary The nanoTOF II inherits the triple focus electrostatic analyzer (TRIFT type analyzer) with excellent ion transmission ...

• Measuring Equipment

• Ion Analyzers

■Summary This is a high energy ion implanter that can handle up to 2,400KeV. ■Applications Thin substrate process for power de...

• Semiconductor Manufacturing

• Ion Implanters

■Summary This is a new series of transducer-type vacuum gauges "G-TRAN series multi-ion gauge" that can connect probes with dif...

• Meters & Instruments

• Vacuum Gauges

■Summary SUS valve from 5/8 to 2 inch. Single-acting cylinder type, shaft seal can be selected from O-ring or bellows. The conn...

• Valves

• Vacuum Valves

■Summary The GM refrigerators used in cryopumps are also being used in fields that utilize superconductivity. As the demand for...

• Cooling Equipment

• Cryostats

■Summary Pirani vacuum gauge that can measure a wide range from atmospheric pressure to 5×10^-2Pa. Furthermore, this vacuum gau...

• Meters & Instruments

• Vacuum Gauges

■Vacuum grease BARRIERTA JFE 552HV, SUPER IS/V (fluorinated synthetic oil) Clean room/Sputtering equipment/Vacuum jig equipment...

• Protective Materials & Equipment

• Grease

■Summary ULVAC Sales has begun cooperating with the sales of T&A (Transmittance Analyzer), a gas barrier film gas permeability ...

• Meters & Instruments

• Haze Meters

■Summary Easily evaluate thin film samples that are difficult to measure using the flash method. This is a device that measures...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, annealing, etc. of various metal parts. ...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary For process development from solar cells to compound semiconductors, etc. The QHC series is a high-speed heating/cooli...

• Heat Sources

• Industrial Furnaces

■Summary Measures thermal conductivity of a wide range of materials from polymers to metals. This is a device that measures spe...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Features ULVAC standard square gaskets have a large wire diameter, so they have a large crushing margin and are designed to pr...

• Fastening Components

• Gaskets

■Water-cooled oil diffusion pump (1,100L/sec) + oil rotary vacuum pump Necessary equipment such as oil diffusion pumps, oil rot...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary The sensor unit (SP1) is a Pirani gauge type measurement unit of the G-TRAN series. The sensor unit has a structure in...

• Meters & Instruments

• Vacuum Gauges

■Summary This is a desktop high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. In considera...

• Purification Equipment

• Exhaust Systems

■Summary The high-density plasma dry etching system ULHITETM NE-7800H is a multi-chamber type low-pressure, high-density plasma...

• Machining / Machine Tools

• Etching Equipment

■Lightweight and compact portable type The UNECS series is a spectroscopic ellipsometer that measures the thickness and refract...

• Meters & Instruments

• Ellipsometers

■Summary The VAH series is a manual high vacuum gate valve developed based on extensive technology and experience in the vacuum...

• Valves

• Vacuum Gate Valves

■Summary Ideal for small sample research and development. Capable of high-speed heating, high-speed cooling, and clean heating....

• Heat Sources

• Industrial Furnaces