ULVAC Sales Co., Ltd.

■Summary NLD dry etching for research and development NLD-570 is a dry etching system equipped with low pressure, low electron ...

• Machining / Machine Tools

• Etching Equipment

■Summary This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrati...

• Pumps

• Vacuum Pumps

■Summary SUS valve from 5/8 to 2 inch. Single-acting cylinder type, shaft seal can be selected from O-ring or bellows. The conn...

• Valves

• Vacuum Valves

■Summary The CMD series is a single-wafer CVD system for forming a-Si films, silicon oxide films, and nitride films using SiH4 ...

• Machining / Machine Tools

• Plasma-Enhanced CVD

■Summary The NLD-5700 dry etching system for opto-devices and MEMS is a dry etching system for mass production equipped with a ...

• Machining / Machine Tools

• Etching Equipment

■Summary In-plane distribution evaluation and analysis of materials. This device simultaneously measures the in-plane two-dimen...

• Observation Equipment

• Scanning Probe Microscopes

■Summary The ULDiS series of sputtering systems for optical films is a digital sputtering system that is an advanced version of...

• Machining / Machine Tools

• Sputtering Equipment

■Summary YTP series Ver.B is a high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. Evacuati...

• Purification Equipment

• Exhaust Systems

■Summary This is a high-energy ion implanter for SiC mass production equipped with a high-temperature ESC. ■Applications Ion i...

• Semiconductor Manufacturing

• Ion Implanters

■Summary This is an ion implanter that supports low acceleration and high concentration. ■Applications Thin substrate process ...

• Semiconductor Manufacturing

• Ion Implanters

■Vacuum grease BARRIERTA JFE 552HV, SUPER IS/V (fluorinated synthetic oil) Clean room/Sputtering equipment/Vacuum jig equipment...

• Protective Materials & Equipment

• Grease

■Features ULVAC standard square gaskets have a large wire diameter, so they have a large crushing margin and are designed to pr...

• Fastening Components

• Gaskets

■Summary The HELIOT900 series is a leak detector with a high pumping speed and excellent convenience. We guarantee the best per...

• Sensors

• Leak Detectors

■Summary The PRC series is a mechanical booster pump designed primarily for use in semiconductor and liquid crystal manufacturi...

• Pumps

• Booster Pumps

■Summary It can be widely used for vacuum heat treatment such as hardening, tempering, annealing, etc. of various metal parts. ...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary ULVAC's vacuum drying oven is a device that is suitable for degassing and pretreatment applications in a clean environ...

• Dryers

• Vacuum Dryers

■Built-in type that can be integrated into various devices The UNECS series is a spectroscopic ellipsometer that measures the t...

• Meters & Instruments

• Ellipsometers

■Summary Secondary ion mass spectrometry (SIMS) is a method that highly sensitively measures elemental distribution in the dept...

• Measuring Equipment

• Ion Analyzers

■Summary The SMD series is a single-wafer sputtering system that forms metal films, ITO, IGZO, dielectric films, etc. We have a...

• Machining / Machine Tools

• Sputtering Equipment

■Summary SUS valve from 5/8 to 2 inch. Single-acting cylinder type, shaft seal can be selected from O-ring or bellows. The conn...

• Valves

• Vacuum Valves

■Features ULVAC standard O-rings have a thick wire diameter, so they have a large crushing margin and are designed to prevent l...

• Fastening Components

• O-Rings

■Summary This is a large pendulum valve (gate valve) developed using ULVAC's unique technology. Compatible with large vacuum eq...

• Valves

• Vacuum Gate Valves

■Features The ULVAC standard Kosan gasket has a thick wire diameter, so it has a large crushing margin and is designed to preve...

• Fastening Components

• Gaskets

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Neces...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary It can be widely used for vacuum heat treatment such as heat treatment, brazing, and sintering of various metal parts....

• Machining / Machine Tools

• Vacuum Furnaces

■Lightweight and compact portable type The UNECS series is a spectroscopic ellipsometer that measures the thickness and refract...

• Meters & Instruments

• Ellipsometers

■Summary Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features...

• Pumps

• Vacuum Pumps

■Summary Measures thermal conductivity of a wide range of materials from polymers to metals. This is a device that measures spe...

• Meters & Instruments

• Thermal Conductivity Analyzers

■Summary For process development from solar cells to compound semiconductors, etc. The QHC series is a high-speed heating/cooli...

• Heat Sources

• Industrial Furnaces

■Summary This is a high energy ion implanter that can handle up to 2,400KeV. ■Applications Thin substrate process for power de...

• Semiconductor Manufacturing

• Ion Implanters