ULVAC Sales Co., Ltd.

■Summary The SMD series is a single-wafer sputtering system that forms metal films, ITO, IGZO, dielectric films, etc. We have a...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The NLD-5700 dry etching system for opto-devices and MEMS is a dry etching system for mass production equipped with a ...

• Semiconductor Manufacturing

• Etching Equipment

■Summary The ULDiS series of sputtering systems for optical films is a digital sputtering system that is an advanced version of...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The HELIOT900 series is a leak detector with a high pumping speed and excellent convenience. We guarantee the best per...

• Sensors

• Leak Detectors

■Summary When starting an oil rotary vacuum pump or working in a low vacuum, the oil from the pump is discharged along with the...

• Purification Equipment

• Oil Traps

■Summary SUS valve from 5/8 to 6 inch. The manual type shaft seal can be selected from bellows, and the connection flange can b...

• Valves

• Vacuum Valves

■Summary YTP series Ver.B is a high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. Evacuati...

• Purification Equipment

• Exhaust Systems

■Vacuum grease BARRIERTA JFE 552HV, SUPER IS/V (fluorinated synthetic oil) Clean room/Sputtering equipment/Vacuum jig equipment...

• Lubricator-related Equipment

• Grease

■Summary The CMD series is a single-wafer CVD system for forming a-Si films, silicon oxide films, and nitride films using SiH4 ...

• Semiconductor Manufacturing

• Plasma-Enhanced CVD

■Summary SUS valve from 5/8 to 2 inch. Single-acting cylinder type, shaft seal can be selected from O-ring or bellows. The conn...

• Valves

• Vacuum Valves

■Summary The Luminous NA series is a wafer size-free ashing system that can handle a wide range of processes from critical next...

• Semiconductor Manufacturing

• PVDF

■Lightweight and compact portable type The UNECS series is a spectroscopic ellipsometer that measures the thickness and refract...

• Measuring Equipment

• Ellipsometers

■Summary This is a large pendulum valve (gate valve) developed using ULVAC's unique technology. Compatible with large vacuum eq...

• Valves

• Vacuum Gate Valves

■Summary The multi-chamber device ENTRONTM N300 is a just-fit device that provides appropriate investment efficiency. In additi...

• Machining / Machine Tools

• Sputtering Equipment

■Built-in type that can be integrated into various devices The UNECS series is a spectroscopic ellipsometer that measures the t...

• Measuring Equipment

• Ellipsometers

■Summary This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrati...

• Pumps

• Vacuum Pumps

■Summary SUS valve from 5/8 to 2 inch. Single-acting cylinder type, shaft seal can be selected from O-ring or bellows. The conn...

• Valves

• Vacuum Valves

■Summary This is a high-energy ion implanter for SiC mass production equipped with a high-temperature ESC. ■Applications Ion i...

• Semiconductor Manufacturing

• Ion Implanters

■Summary Secondary ion mass spectrometry (SIMS) is a method that highly sensitively measures elemental distribution in the dept...

• Measuring Equipment

• Ion Analyzers

■Summary The sensor unit (SP1) is a Pirani gauge type measurement unit of the G-TRAN series. The sensor unit has a structure in...

• Meters & Instruments

• Vacuum Gauges

■Summary It can be widely used for vacuum heat treatment such as heat treatment, brazing, and sintering of various metal parts....

• Machining / Machine Tools

• Vacuum Furnaces

■Summary This is a desktop high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. In considera...

• Purification Equipment

• Exhaust Systems

■Summary This device is a tabletop lamp heating device that allows heat treatment of samples up to 50 mm square. Since the rel...

• Heat Sources

• Industrial Furnaces

■Summary The batch type high vacuum evaporation equipment ei series is an equipment for forming metal and oxide films on substr...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Features The ULVAC standard Kosan gasket has a thick wire diameter, so it has a large crushing margin and is designed to preve...

• Sealing Devices

• Gaskets

■Manual stage type compatible with Φ150mm The UNECS series is a spectroscopic ellipsometer that measures the thickness and refr...

• Measuring Equipment

• Ellipsometers

■Summary Two-stage exhaust system/With backflow prevention mechanism/Built-in thermal protector/With switch ■Features - Large ...

• Pumps

• Vacuum Pumps

The GP-G series is a constant temperature Pirani vacuum gauge that utilizes gas heat conduction. Platinum (Pt) is used for the ...

• Meters & Instruments

• Pirani Vacuum Gauge

■Summary In-plane distribution evaluation and analysis of materials. This device simultaneously measures the in-plane two-dimen...

• Observation Equipment

• Scanning Probe Microscopes

■Summary Measures thermal conductivity of a wide range of materials from polymers to metals. This is a device that measures spe...

• Meters & Instruments

• Thermal Conductivity Analyzers