ULVAC Sales Co., Ltd.

■Summary COVOT-LC is a simple and affordable vacuum transfer robot that does not have a Z-axis. ■Applications ・Automatic wafe...

• Robots

• Transport Robots

■Summary Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features ...

• Pumps

• Vacuum Pumps

■Features JIS standard O-ring V series (for vacuum flanges) is available. ■Note Products and data are subject to change withou...

• Fastening Components

• O-Rings

■Summary The RFS-N series is a 13.56MHz RF power supply for plasma processes with an output of 0.5kW/1/kW/3kW/5kW. Equipped wit...

■Summary Reactive process gas monitor Qulee RGM2-202/RGM2-302 is a process monitor with a differential exhaust system that supp...

• Meters & Instruments

• Gas Analyzers

■Summary ULVAC's ULK type oil diffusion pump is a high vacuum pump that is compact and designed with large critical back pressu...

• Pumps

• Vacuum Pumps

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary The VS series is a single-stage rotary vane type oil rotary vacuum pump. The simplified structure has made it smaller ...

• Pumps

• Vacuum Pumps

■Summary Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standa...

• Pumps

• Vacuum Pumps

■Summary This cryopump is equipped with a "rapid room temperature regeneration system" that significantly shortens the regenera...

• Pumps

• Vacuum Pumps

■Summary The DCS series of DC power supplies for sputtering has excellent cost performance as well as basic performance, and ca...

• Power Supplies

• DC Power Supplies

■Features We offer JIS standard O-ring P series (for motion, for fixing on cylindrical surfaces, and for fixing on flat surface...

• Fastening Components

• O-Rings

■Summary The SV series is a vertical batch type sputtering device. There is the SV-200, which is dedicated to disk stampers, an...

• Machining / Machine Tools

• Sputtering Equipment

■Summary For process development from solar cells to compound semiconductors, etc. In addition to the functions of the QHC seri...

• Heat Sources

• Industrial Furnaces

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary Alpha-Step D-500/D-600 is a stylus profiler manufactured by KLA-Tencor that measures the step (film thickness), roughn...

■Summary EGP-1G is an electron beam evaporation source for optical film deposition that reduces costs by adopting a simple 180º...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary The dry vacuum pump LR/HR/UR series achieves high durability in hard processes such as CVD and etching by effectively ...

• Pumps

• Vacuum Pumps

We offer KF replacement flanges for KF-ISO piping. Other sizes are also available.

• Fittings

• Flanges

■Summary The SPW series is a roll-up type sputtering device that can form multilayer films such as optical films and metals on ...

• Machining / Machine Tools

• Sputtering Equipment

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary The vacuum sintering furnace FSC series is a sintering device for magnets, TA capacitors, carbide tools, etc. The in-l...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary Two-stage exhaust system/With gas ballast mechanism/Built-in thermal protector/Power cord with plug ■Features ・Oil r...

• Pumps

• Vacuum Pumps

■Summary The G-TRAN series is a vacuum gauge developed with the concepts of (1) cost reduction, (2) space saving, and (3) wirin...

• Meters & Instruments

• Vacuum Gauges

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary COVOT-6 is a vacuum transfer robot that has four independent arms and achieves high throughput. ■Applications ・Autom...

• Robots

• Transport Robots

■Summary Standard type/1 stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features ...

• Pumps

• Vacuum Pumps

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Features JIS standard O-ring G series (for fixing on cylindrical surfaces and on flat surfaces) is available. ■Note Products ...

• Fastening Components

• O-Rings

■Summary Roots type/effective pumping speed display/with various protection functions ■Features ・A small type of Roots-type v...

• Pumps

• Vacuum Pumps