ULVAC Sales Co., Ltd.

We offer aluminum clamps with ISO standard quick (release) coupling flanges.

• Machining / Machine Tools

• One-Touch Clamps

■Summary Mechanical booster pump (833L/min) + oil rotary vacuum pump. This is a compact high vacuum exhaust system that compact...

• Pumps

• Booster Pumps

■Summary A dry vacuum pump that achieves both high-speed pumping and low power consumption. With a lineup of 4 models, you can ...

• Pumps

• Vacuum Pumps

■Summary Qualitative analysis of desorbed gas using a mass spectrometer While heating the sample using an infrared gold image f...

• Meters & Instruments

• Gas Analyzers

■Summary The EGN series is an electron beam evaporation source for metal deposition that was newly developed with a focus on im...

• Machining / Machine Tools

• Vacuum Vapor Deposition Devices

■Summary The vacuum sintering furnace FSC series is a sintering device for magnets, TA capacitors, carbide tools, etc. The in-l...

• Machining / Machine Tools

• Vacuum Furnaces

■Summary ULVAC's ULK type oil diffusion pump is a high vacuum pump that is compact and designed with large critical back pressu...

• Pumps

• Vacuum Pumps

■Summary Standard type/1 stage exhaust system/Built-in thermal protector/With motor lead wire crimp terminal ■Features ・Stand...

• Pumps

• Vacuum Pumps

■Summary Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement p...

• Purification Equipment

• Exhaust Systems

■Summary Turbo molecular pump (345L/sec) + scroll pump. Ultimate pressure 10^-5Pa class. Necessary equipment such as the main p...

• Purification Equipment

• Exhaust Systems

■Summary COVOT-6 is a vacuum transfer robot that has four independent arms and achieves high throughput. ■Applications ・Autom...

• Robots

• Transport Robots

■Summary The dry vacuum pump LR/HR/UR series achieves high durability in hard processes such as CVD and etching by effectively ...

• Pumps

• Vacuum Pumps

■Summary This cryopump is equipped with a "rapid room temperature regeneration system" that significantly shortens the regenera...

• Pumps

• Vacuum Pumps

■Summary ULVAC's PFL oil diffusion pumps are designed and manufactured using years of research and extensive manufacturing expe...

• Pumps

• Vacuum Pumps

We offer long couplings with ISO standard quick (release) coupling flanges.

• Fittings

• Flanges

Vacuum flange L-type tube/T-type tube are available. *SS product also available (with Ni plating) *We also accept custom-made ...

• Sealing Devices

• Vacuum Flanges

■Vacuum rubber hose Be sure to use a vacuum rubber hose specifically designed for vacuum when connecting the vacuum pump to con...

• Hoses / Tubes

• Vacuum Hose

■Summary The VS series is a single-stage rotary vane type oil rotary vacuum pump. The simplified structure has made it smaller ...

• Pumps

• Vacuum Pumps

■Summary The PVD series is a small two-stage rotary vane oil rotary vacuum pump (rotary pump). A belt-driven, low-speed rotary ...

• Pumps

• Vacuum Pumps

■Summary Roots type/effective pumping speed display/with various protection functions ■Features ・A small type of Roots-type v...

• Pumps

• Vacuum Pumps

■Summary To save space, we use L-type pumps that are lower in height, and multi-systems that operate multiple pumps with one co...

• Pumps

• Vacuum Pumps

■Summary GST-07L-B is a sputter ion pump control that has achieved high functionality and reliability thanks to ULVAC's extensi...

• Semiconductor Manufacturing

• Ion Implanters

■Summary DC-2 and DC-4 are DC power supplies for sputtering with 2kW and 4kW output. High control accuracy provides excellent r...

• Power Supplies

• DC Power Supplies

■Summary Standard type/1 stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features ...

• Pumps

• Vacuum Pumps

■Summary Turbo molecular pump (345L/sec) + oil rotary vacuum pump. Ultimate pressure is 10^-5Pa. Necessary equipment such as th...

• Purification Equipment

• Exhaust Systems

We offer KF replacement flanges for KF-ISO piping. Other sizes are also available.

• Fittings

• Flanges

■Summary Reactive process gas monitor Qulee RGM2-202/RGM2-302 is a process monitor with a differential exhaust system that supp...

• Meters & Instruments

• Gas Analyzers

■Summary Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standa...

• Pumps

• Vacuum Pumps

■Summary CFS treatment is completely different from conventional pretreatment and surface treatment.It mixes a small amount of ...

■Summary This is a vacuum pump that performs evacuation through the reciprocating motion of a thin rubber membrane (diaphragm)....

• Pumps

• Vacuum Pumps