All Categories

History

  1. Metoree
  2. Machining / Machine Tools
  3. Vacuum Vapor Deposition Devices
  4. Electron beam deposition system for research and development, BS series, box type. (JEOL Ltd.)
Electron beam deposition system for research and development, BS series, box type.-Box type
Electron beam deposition system for research and development, BS series, box type.-JEOL Ltd.

Electron beam deposition system for research and development, BS series, box type.
JEOL Ltd.

About This Product

This electron beam evaporation system is suitable for research and development. It can be used for a wide range of applications by adding various optional mechanisms. The evaporation source can be selected from an electron beam evaporation source (electron gun), a bombarded evaporation source, or a resistance heating evaporation source. Combinations of an electron gun and a bombarded evaporation source, or an electron gun and a resistance heating source, are also possible. Features

■ Electron Beam Evaporation Source (Electron Gun)

It can evaporate various inorganic materials, such as high-melting-point metals that cannot be evaporated by resistance heating or induction heating, and oxides and sublimable materials with low thermal conductivity. Since the evaporation material in the water-cooled copper crucible is directly heated by the electron beam, there is no reaction with the crucible. High-speed output control is possible, allowing for precise film thickness control and evaporation rate control that is not possible with resistance heating. Compared to sputtering and CVD, the film deposition rate is more than an order of magnitude higher, and thick film deposition of 1 µm or more is easy. The electron gun, crucible, and electron gun power supply can be selected. The standard EBG-102UB6S electron gun has a high-speed scanning function and comes with a 12 ml x 6 crucible.

■ Combination of Electron Gun and Backscattered Electron Trap

By combining an electron gun and a backscattered electron trap, the amount of backscattered electrons incident on the substrate can be significantly reduced. Deformation of the resist during electron beam deposition is caused by temperature rise due to backscattered electron incidence. The backscattered electron trap suppresses backscattered electrons, enabling stable lift-off deposition. Ideal for electrode film formation in MEMS and other applications.

■ Bombard Deposition Source

An electron beam is irradiated onto the back surface of a liner filled with deposition material, heating the liner by electron shock (bombardment). The electron beam is not directly applied to the deposition material.

  • Product

    Electron beam deposition system for research and development, BS series, box type.

Share this product


10+ people viewing

Last viewed: 14 minutes ago

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

1 Models of Electron beam deposition system for research and development, BS series, box type.

Image Part Number Price (excluding tax)
Electron beam deposition system for research and development, BS series, box type.-Part Number-Box type

Box type

Available upon quote

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

Vacuum vaporization device Small desktop high vacuum vapor sequence device VE -2013-Vacuum device

Vacuum vaporization device Small desktop high vacuum vapor sequence device VE -2013

Vacuum device

5.0

1120+ people viewing

Last viewed: 1 hour ago

Response time: 22.56 hours

Vacuum Vapor Deposition Devices

2 models listed

Glovebox built-in vacuum evaporation equipment MPVAP-Glovebox-Microphase Co., Ltd.

Glovebox built-in vacuum evaporation equipment MPVAP-Glovebox

Microphase Co., Ltd.

4.0

620+ people viewing

Last viewed: 2 hours ago

Response time: 51.72 hours

Vacuum Vapor Deposition Devices
Small evaporation equipment VDE-300-Epiquest Co., Ltd.

Small evaporation equipment VDE-300

Epiquest Co., Ltd.

260+ people viewing

Last viewed: 1 hour ago

Response time: 5.57 hours

Vacuum Vapor Deposition Devices
Source Mini electron beam evaporator EBV40A1-Kitano Seiki Co., Ltd.

Source Mini electron beam evaporator EBV40A1

Kitano Seiki Co., Ltd.

4.5

640+ people viewing

Response time: 19.89 hours

Vacuum Vapor Deposition Devices

3 models listed

Vacuum application equipment Vacuum evaporation equipment Chamber moving type LL-Fuji Inback Co., Ltd.

Vacuum application equipment Vacuum evaporation equipment Chamber moving type LL

Fuji Inback Co., Ltd.

4.8

340+ people viewing

Last viewed: 2 hours ago

Response time: 20.60 hours

Vacuum Vapor Deposition Devices

2 models listed

Drum sputtering equipment for particle surface film formation-Arios Co., Ltd.

Drum sputtering equipment for particle surface film formation

Arios Co., Ltd.

5.0

820+ people viewing

Last viewed: 2 hours ago

Response time: 3.40 hours

Vacuum Vapor Deposition Devices

3 models listed

High-performance vacuum evaporation equipment MPVAP-Microphase Co., Ltd.

High-performance vacuum evaporation equipment MPVAP

Microphase Co., Ltd.

4.0

580+ people viewing

Last viewed: 7 hours ago

Response time: 51.72 hours

Vacuum Vapor Deposition Devices
Resistance heating vapor deposition equipment-MPS Co., Ltd.

Resistance heating vapor deposition equipment

MPS Co., Ltd.

530+ people viewing

Last viewed: 6 hours ago

Response time: 46.46 hours

Vacuum Vapor Deposition Devices

2 models listed

Thin film production equipment PVD equipment Hybrid vapor deposition equipment-Kitano Seiki Co., Ltd.

Thin film production equipment PVD equipment Hybrid vapor deposition equipment

Kitano Seiki Co., Ltd.

4.5

800+ people viewing

Last viewed: 1 hour ago

Response time: 19.89 hours

Vacuum Vapor Deposition Devices

3 models listed

Thin film production equipment 4-element magnetron sputtering equipment-Kitano Seiki Co., Ltd.

Thin film production equipment 4-element magnetron sputtering equipment

Kitano Seiki Co., Ltd.

4.5

820+ people viewing

Last viewed: 2 hours ago

Response time: 19.89 hours

Vacuum Vapor Deposition Devices

4 models listed

Metal vapor deposition equipment for powder particles MPVAP-Powder-Microphase Co., Ltd.

Metal vapor deposition equipment for powder particles MPVAP-Powder

Microphase Co., Ltd.

4.0

500+ people viewing

Response time: 51.72 hours

Vacuum Vapor Deposition Devices
MBE equipment-Arios Co., Ltd.

MBE equipment

Arios Co., Ltd.

5.0

840+ people viewing

Last viewed: 2 hours ago

Response time: 3.40 hours

Vacuum Vapor Deposition Devices

2 models listed

See More Vacuum Vapor Deposition Devices Products

Other products of JEOL Ltd.

Reviews shown here are reviews of companies.

JMS-TQ4000GC UltraQuad™ TQ Gas Chromatograph Triple Quadrupole Mass Spectrometer-JEOL Ltd.

JMS-TQ4000GC UltraQuad™ TQ Gas Chromatograph Triple Quadrupole Mass Spectrometer

JEOL Ltd.

4.0

590+ people viewing

Last viewed: 57 minutes ago

Response time: 28.53 hours

Chromatographic Gas
Electron beam lithography system (variable/spot) JBX-A9 series-JEOL Ltd.

Electron beam lithography system (variable/spot) JBX-A9 series

JEOL Ltd.

4.0

580+ people viewing

Last viewed: 57 minutes ago

Response time: 28.53 hours

Electron Beam Lithography Systems
NMR spectrometer ECZ Luminous™ (JNM-ECZL series) FT NMR instrument-JEOL Ltd.

NMR spectrometer ECZ Luminous™ (JNM-ECZL series) FT NMR instrument

JEOL Ltd.

4.0

490+ people viewing

Last viewed: 57 minutes ago

Response time: 28.53 hours

Nuclear Magnetic Resonance (NMR) Analyzers
JSX-1000S Energy-Dispersive X-ray Fluorescence (XRF) Spectrometer-JEOL Ltd.

JSX-1000S Energy-Dispersive X-ray Fluorescence (XRF) Spectrometer

JEOL Ltd.

4.0

2140+ people viewing

Last viewed: 9 hours ago

Response time: 28.53 hours

X-Ray Fluorescence (XRF) Analyzers

3 models listed

JMS-T2000GC AccuTOF™ GC-Alpha High-Performance Gas Chromatograph Time-of-Flight Mass Spectrometer-JEOL Ltd.

JMS-T2000GC AccuTOF™ GC-Alpha High-Performance Gas Chromatograph Time-of-Flight Mass Spectrometer

JEOL Ltd.

4.0

600+ people viewing

Last viewed: 4 hours ago

Response time: 28.53 hours

Chromatographic Gas
JSM-IT810 Schottky Field Emission Scanning Electron Microscope-JEOL Ltd.

JSM-IT810 Schottky Field Emission Scanning Electron Microscope

JEOL Ltd.

4.0

870+ people viewing

Last viewed: 2 hours ago

Response time: 28.53 hours

Semiconductor inspection equipment

4 models listed

JIB-PS500i FIB-SEM System SEM-JEOL Ltd.

JIB-PS500i FIB-SEM System SEM

JEOL Ltd.

4.0

1360+ people viewing

Last viewed: 20 hours ago

Response time: 28.53 hours

Electron Microscopes

3 models listed

JMS-Q1600GC UltraQuad™ SQ-Zeta Gas Chromatograph Quadrupole Mass Spectrometer-JEOL Ltd.

JMS-Q1600GC UltraQuad™ SQ-Zeta Gas Chromatograph Quadrupole Mass Spectrometer

JEOL Ltd.

4.0

690+ people viewing

Last viewed: 2 hours ago

Response time: 28.53 hours

Chromatographic Gas
JEM-ACE200F High-Throughput Analytical Electron Microscope-JEOL Ltd.

JEM-ACE200F High-Throughput Analytical Electron Microscope

JEOL Ltd.

4.0

940+ people viewing

Response time: 28.53 hours

Semiconductor inspection equipment

3 models listed

JCM-7000 NeoScope™ Desktop Scanning Electron Microscope-JEOL Ltd.

JCM-7000 NeoScope™ Desktop Scanning Electron Microscope

JEOL Ltd.

4.0

880+ people viewing

Last viewed: 1 hour ago

Response time: 28.53 hours

Electron Microscopes

3 models listed

JEM-120i Electron Microscope-JEOL Ltd.

JEM-120i Electron Microscope

JEOL Ltd.

4.0

850+ people viewing

Last viewed: 6 hours ago

Response time: 28.53 hours

Electron Microscopes

2 models listed

Electron beam deposition system for research and development, BS series, continuous winding type (Roll to Roll)-JEOL Ltd.

Electron beam deposition system for research and development, BS series, continuous winding type (Roll to Roll)

JEOL Ltd.

4.0

30+ people viewing

Response time: 28.53 hours

Vacuum Vapor Deposition Devices

View more products of JEOL Ltd.

About Company Handling This Product

JEOL Ltd.

  • Japan

Related search keywords

Vacuum Vapor Deposition Devices
Vacuum Vapor Deposition Devices　JEOL Ltd.
JEOL Ltd.

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Copyright © 2026 Metoree