Vapulator for research and development of thin film formation equipment
SHINKO SEIKI CO., LTD.
About This Product
It is a low -cost small vapor equipment that supports basic research experiments.
Various aspects such as evaporation mechanism, substrate heating, and cooling mechanism can be selected according to the purpose.
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Product
Vapulator for research and development of thin film formation equipment
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Handling Company
SHINKO SEIKI CO., LTD.
4 Models of Vapulator for research and development of thin film formation equipment
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Exhaust system / Achievement power | Exhaust system / exhaust time | Exhaust system / main pump | Method of operation | Operation method / exhaust operation | Operation method / film formation operation | Slamy -based / membrane thickening | Slamy system / evaporation method | Slamy system / processing amount | Slamy system / substrate heating |
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EM-330s |
Available upon quote | × 10-4 PA | × 10-⁴ within 20 minutes to the PA stand | Oil diffusion pump | Complete manual | - | - | ± 15% | Resistance heat | ¢ 3 inches x 4 sheets | 350 ° C | |
EM-435S |
Available upon quote | × 10-⁵ PA stand | × 10-⁴ within 15 minutes to PA stand | Oil diffusion pump | Complete manual | - | - | ± 15% | Resistance heat | ¢ 3 inches x 5 sheets | 350 ° C | |
AM-645SB |
Available upon quote | × 10-⁵ PA stand | × 10-⁴ within 20 minutes to the PA stand | Oil diffusion pump | - | Automatic | Manual | ± 10% | Electronic gun | ¢ 4 inches x 6 sheets | 350 ° C | |
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AMF-645SB |
Available upon quote | × 10-⁵ PA stand | × 10-⁴ within 20 minutes to the PA stand | Oil diffusion pump | - | Automatic | Manual | ± 10% | Electronic gun | ¢ 4 inches x 6 sheets | 350 ° C |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan
- Since 1949