Plasma etching device EXAM
SHINKO SEIKI CO., LTD.
About This Product
EXAM is a multipurpose plasma etching device that can handle multiple purposes that make use of the know -how of semiconductor product devices.
Multi -processing is possible in the same chamber such as etching and assessing by switching gas and plasma mode.
Product features
･ Batch plasma etching device with a 250mm processing stage
･ Compatible not only for silicon, oxide membrane, and nitride film but also for quartz etching
-
Product
Plasma etching device EXAM
-
Handling Company
SHINKO SEIKI CO., LTD.
1 Models of Plasma etching device EXAM
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
|
|
Plasma etching device EXAM |
Available upon quote |
Customers who viewed this product also viewed
Other products of SHINKO SEIKI CO., LTD.
View more products of SHINKO SEIKI CO., LTD.
About Company Handling This Product
- Japan
- Since 1949