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This section provides an overview for ellipsometers as well as their applications and principles. Also, please take a look at the list of 12 ellipsometer manufacturers and their company rankings. Here are the top-ranked ellipsometer companies as of December, 2024: 1.Angstrom Sun Technologies Inc., 2.OTSUKA ELECTRONICS CO.,LTD, 3.Semilab Semiconductor Physics Laboratory Co. Ltd..
Table of Contents
An Ellipsometer is a non-contact, non-destructive instrument for measuring the thickness of a thin film or the optical constant of a material using its optical properties.
It is also called an ellipsoid polarization analyzer. The Ellipsometer measures the optical constant of an object by shining light from an oblique angle onto the object, receiving the reflected light with a sensor, and measuring the change in polarization state.
Although commonly referred to as an ellipsometer, the correct term is spectroscopic ellipsometer. Measurements cannot be made on opaque films that do not transmit light or on rough surfaces that do not reflect light sufficiently.
Ellipsometers are primarily used to measure optical constants and, based on these constants, to measure film thickness. Since ellipsometers measure reflected polarized light, they cannot measure very thick objects (1 mm or less).
However, some instruments have a resolution of 0.01nm scale for thin films, so they are often used to measure the thickness of thin films with high accuracy. The optical properties of optical films such as various coatings and lenses can be measured, as well as the crystallinity, composition, and optical anisotropy of the materials that make up the film.
Depending on the instrument, it is also possible to measure the optical properties of liquids.
Light projected at an oblique angle from a light source is shined onto the object (film) to be measured, and the reflected light is received by a light-receiving sensor to measure the change in polarization. Since the projected light is known, the difference from the received light is measured at each wavelength for fitting analysis.
Ellipsometers are available in two main types of light sources: single wavelength laser light sources and spectroscopic xenon lamp light sources. The former can only measure a limited number of wavelengths because it only measures a single wavelength, but its advantage is that it is inexpensive.
The latter can perform more detailed measurements, such as analysis of multilayer films and measurement of the boundary (interface) between films. However, it has disadvantages such as light source calibration and higher equipment cost. The Ellipsometer is also equipped with an autocollimator that measures whether the object is installed horizontally.
The angle of incidence from the light source is also very important. Therefore, the data from the autocollimator is compared with the angle of the light source (fixed value) and used for analysis.
Ellipsometers measure different properties depending on the wavelength of light. It is important to select an ellipsometer with an appropriate wavelength range according to the properties and purpose of the material to be measured.
Most ellipsometers cover the wavelength range from general visible light to near-infrared light, but some applications may require a wider wavelength range.
The measurement accuracy and sensitivity of ellipsometers are important factors. Selecting an ellipsometer with high accuracy and sensitivity will enable more accurate measurement of optical properties and thickness of thin films. Especially in fields such as research and manufacturing process control, highly accurate measurements are required.
Check to see if the Ellipsometer is easy to operate and automated. If it is automated, many measurements can be made quickly, allowing for efficient data collection. Selecting an ellipsometer with an easy-to-use interface and software will also ensure smooth operation.
It is important to select the appropriate measurement device according to the size and shape of the sample you wish to measure. In general, an Ellipsometer that can handle large samples and samples with special shapes is required. In addition, a non-contact Ellipsometer capable of non-destructive measurement should be considered as an option.
*Including some distributors, etc.
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J.A. Woollam Company, headquartered in Nebraska, USA, has been a supplier of wide spectral range spectroscopic ellipsometer equipment since 1987. The company’s main products are Ellipsometer M-2000, RC2, iSE, theta-SE, and alpha 2.0. It also provides VASE ellipsometer with an extended wavelength range of up to 4000 nm. The company has over 200 US and international patents, including RCE (rotating compensator ellipsometer) technology for high accuracy and precision. It has representatives in Australia, Europe, India, Japan, and Saudi Arabia.
Axometrics, Inc, established in 2002 and based in Alabama, USA, is a manufacturer of polarization testing equipment manufacturing that could reveal the properties of polarization elements. It produces polarimeters and ellipsometers to measure the full Mueller matrix of a sample. In addition, it manufactures large and inline measurement systems, light sources, calibration standards, and software. The applications of the aforementioned products are LCD panel testing, birefringence mapping, anisotropic films, LCOS panels and reflective display testing, and many more.
Film Sense, founded in 2013 and based in Nebraska, USA, is a manufacturer of multi-wavelength ellipsometers that only measure layers of films, with automated mapping systems, in situ monitoring, and liquid cells. It produces ellipsometers with the technology of durable LED lighting and a rapid motionless detector. Furthermore, it manufactures ellipsometers with compact automated mapping stages, those for in situ monitoring, and plenty with characterization capabilities. Multi-Wavelength ellipsometers are highly proficient in gauging thin-film characteristics, accurately determining the thickness and refractive index of translucent individual coatings.
Bruker, founded in 1960 and based in Billerica, Massachusetts, is a manufacturer and distributor of scientific instruments and analytical and diagnostic solutions. The company's product range includes analyzers, microscopes, and imaging solutions, which have applications in fields such as life science research, cell biology, and microbiology. In 1969, the company developed the world's first FT-NMR spectrometer system, enabling broadband proton decoupling. In 1997, it further expanded its capabilities by acquiring the analytical X-ray division of Siemens AG. The company holds ISO 9001 and ISO 13485 certifications, and its products are available for sale worldwide.
HORIBA RADIO LABORATORY was established in Japan in 1945 and has spent the last three-quarters of a century growing as an R&D company and engaged in international operations. HORIBA Scientific offers 200 years of experience developing high-performance scientific instruments and analytical solutions. The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing, and metrology to a broad range of scientific R&D and QC measurements. Operating in Asia, Europe, and North and South America, HORIBA scientific develops solutions that go beyond just products.
Otsuka Electronics, established in 1970, is a manufacturer and supplier based in Osaka, Japan, specializing in optical, medical, and industrial measurement devices. The company's product portfolio spans a broad spectrum of optical, medical, and industrial measurement devices and equipment. Emphasizing advanced technology, Otsuka Electronics provides solutions tailored to various sectors, including medical, pharmaceutical, and electric-related precision devices. With a global network of affiliate companies, Otsuka Electronics supports businesses in the health and medical industry worldwide.
Semilab Semiconductor Physics Laboratory Co. Ltd. is a manufacturer of metrology equipment since 1989 having its Corporate headquarters in Budapest, Hungary. The company provides equipment for specific industries and their related applications along with patent technology. Such as they serve the semiconductor industry by providing machines and equipment for various applications like Ion Implant Monitoring, Contamination analysis, and much more. Similarly, the Display and the Photovoltaic industry benefit from different Laboratory applications, Sheet Resistance measurements, and the Research and Development processes within the same sectors are also carried out.
Holmarc Opto-Mechatronics Ltd. is an Indian manufacturer established in 1999, specializing in precision optical and mechatronics products. They design solutions for research, education, and industry, offering optical components, lasers, as well as precision positioning systems. Holmarc serves a global clientele in physics, chemistry, biology, engineering, and material science, empowering scientists and engineers with advanced technologies. Their solutions aid scientific research and educational advancements, remaining at the forefront of progress and excellence.
SENTECH Instruments GmbH was founded in 1990 and is based in Berlin, Germany, and is a manufacturer of measuring instruments for various industrial applications. The company has membership in the German Ministry of Economics, the International Photovoltaic Equipment Association, and, the European Industry Association and provides systems and instruments for plasma etching, atomic layer deposition, cluster configuration, and, thin film measurement, as well as offers spectroscopic ellipsometry, laser ellipsometer, metrology for photovoltaics, and, silicon & thin film solar cells that have applications in the semiconductor, microsystems, photovoltaics, nanotechnology, and materials research industries.
Angstrom Sun Technologies Inc. was established in 2002 and is headquartered in Boston, USA, is a manufacturer of optical systems & solutions for various industrial applications. The company associates with NASA Marshall Space Flight Center, National Institute of Standards and Technology, Massachusetts Institute of Technology, and Seoul National NanoTech Center, and provides spectroscopic reflectometers, micro spectrophotometers, micro reflectometers, film thickness mapping systems, and, simple desktop film thickness stations, as well as automatic variable angle spectroscopic ellipsometers, wafer & gap thickness tools, along with associated software& accessories that have applications in optometry, semiconductor, photonics, and, microsystems research arenas.
Ranking as of December 2024
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | Angstrom Sun Technologies Inc. |
16.3%
|
| 2 | OTSUKA ELECTRONICS CO.,LTD |
14.3%
|
| 3 | Semilab Semiconductor Physics Laboratory Co. Ltd. |
11.5%
|
| 4 | Bruker Corporation |
10.3%
|
| 5 | Axometrics, Inc |
8.9%
|
| 6 | Holmarc Opto-Mechatronics Ltd. |
8.6%
|
| 7 | J.A. WOOLLAM CO., INC. |
8.3%
|
| 8 | SENTECH Instruments GmbH |
6.6%
|
| 9 | Film Sense LLC |
6.3%
|
| 10 | Angstrom Advanced Inc. |
5.4%
|
Derivation Method
The ranking is calculated based on the click share within the ellipsometer page as of December 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
Newly Established Company
Company with a History
*Including some distributors, etc.
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
|
United States of America
|
4 | 40.0% |
|
Japan
|
3 | 30.0% |
|
Hungary
|
1 | 10.0% |
|
India
|
1 | 10.0% |
|
Germany
|
1 | 10.0% |
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