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  2. Linear motor-driven alignment stage SA (Nippon Thompson Europe B.V.)

Linear motor-driven alignment stage SA
Nippon Thompson Europe B.V.

About This Product

■ Overview

The IKO Alignment Stage SA...DE is a compact, low-profile alignment stage that achieves XYθ motion by using IKO C-Lubrine Nearway L in the linear guide section, IKO cross roller bearings in the rotary guide section, and a direct drive system in the drive unit. The Alignment Stage SA...DE achieves high-precision positioning without backlash through the combination of a high-resolution linear scale and full closed-loop control. It is ideal as a positioning mechanism for semiconductor and LCD manufacturing equipment, and for measuring instruments and inspection equipment that require alignment processing using image processing or a clean environment.

■ Product Features

The linear motor-driven X and Y axes are available in two resolutions: 0.1 μm and 0.5 μm. You can choose the optimal option for your application. The Alignment Stage SA...DE is a compact, low-profile alignment stage that achieves XYθ motion by combining two orthogonal axes of movable tables with linear way L and linear motor drive in the linear guide section (XY axes) and a cross roller bearing and direct drive motor in the θ axis of the rotary guide section. The combination of a high-resolution linear encoder and full closed-loop control enables highly accurate positioning without backlash. Furthermore, since the X-axis movable table for linear movement and the θ-axis turntable for rotational positioning are standardized, combinations of the X and θ axes, as well as XY axis alignment tables, can be easily constructed.

  • Product

    Linear motor-driven alignment stage SA

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1 Models of Linear motor-driven alignment stage SA

Image Part Number Price (excluding tax)

SA65DE/1X

Available upon quote

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Nippon Thompson Europe B.V.

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