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Vapulator for research and development of thin film formation equipmentHandling Company
SHINKO SEIKI CO., LTD.Categories
Click on the part number for more information about each product
| Image | Part Number | Price (excluding tax) | Method of operation | Exhaust system / Achievement power | Exhaust system / exhaust time | Exhaust system / main pump | Slamy system / processing amount | Slamy -based / membrane thickening | Slamy system / evaporation method | Slamy system / substrate heating | Operation method / exhaust operation | Operation method / film formation operation |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
EM-330s |
Available upon quote |
Complete manual |
× 10-4 PA |
× 10-⁴ within 20 minutes to the PA stand |
Oil diffusion pump |
¢ 3 inches x 4 sheets |
± 15% |
Resistance heat |
350 ° C |
- | - | |
EM-435S |
Available upon quote |
Complete manual |
× 10-⁵ PA stand |
× 10-⁴ within 15 minutes to PA stand |
Oil diffusion pump |
¢ 3 inches x 5 sheets |
± 15% |
Resistance heat |
350 ° C |
- | - | |
AM-645SB |
Available upon quote | - |
× 10-⁵ PA stand |
× 10-⁴ within 20 minutes to the PA stand |
Oil diffusion pump |
¢ 4 inches x 6 sheets |
± 10% |
Electronic gun |
350 ° C |
Automatic |
Manual |
|
|
|
AMF-645SB |
Available upon quote | - |
× 10-⁵ PA stand |
× 10-⁴ within 20 minutes to the PA stand |
Oil diffusion pump |
¢ 4 inches x 6 sheets |
± 10% |
Electronic gun |
350 ° C |
Automatic |
Manual |
Click on the part number for more information about each product
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