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Sputtering device for thin film formation equipment research and developmentHandling Company
SHINKO SEIKI CO., LTD.Categories
Click on the part number for more information about each product
| Image | Part Number | Price (excluding tax) | Processing board | Target / Cathode type | Target / Size x number | Sputta direction | Base platform / rotation mechanism | Base board / substrate heating | Base platform / membrane thick distribution | Base board / transport method | Exhaust system / Achievement power | Exhaust system / exhaust time | Exhaust system / main pump | Operation method / exhaust operation | Operation method / Transportation operation | Operation method / film formation operation | Sputta power supply / RF | Spatta power supply / DC | Gas introduction system |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
SRL3320 |
Available upon quote |
¢ 180mm x 1 sheet |
Plena magnetron |
¢ 75m x 3 |
up |
◯ |
300 ° C on the board stand |
Within ± 5%(¢ 50) |
Transfer rod |
8.0 x 10-⁵ PA or less |
5.0 x 10-⁴ PA within 25 minutes |
Turbo molecular pump |
Automatic |
Manual |
Half -automatic (timer type) |
500W |
option |
Two systems |
|
SDL4320 |
Available upon quote |
¢ 200mm x 1 sheet |
Plena magnetron |
¢ 100mm x 3 |
up |
◯ |
300 ° C on the board stand |
Within ± 10%(¢ 180) |
Transfer rod |
8.0 x 10-⁵ PA or less |
5.0 x 10-⁴ PA within 20 minutes |
Turbo molecular pump |
Automatic |
Manual |
Half -automatic (timer type) |
option |
3kw |
Two systems |
|
STL5520 |
Available upon quote |
¢ 200mm x 1 sheet |
Plena magnetron |
¢ 75m x 5 |
up |
◯ |
700 ° C on the board stand |
Within ± 10%(¢ 200) |
Multi -stage rod |
8.0 x 10-⁵ PA or less |
5.0 x 10-⁴ PA within 20 minutes |
Turbo molecular pump |
Automatic |
Automatic |
Automatic |
500W |
3kw |
Two systems |
|
|
|
SRV3100 |
Available upon quote |
¢ 100mm |
Plena magnetron |
¢ 75m x 1 |
up |
- |
200 ° C on the board stand |
Within ± 10%(¢ 50) |
- |
5.0 x 10-⁴ PA or less |
9.9 X 10-⁴ PA within 20 minutes |
Oil diffusion pump |
Manual |
- |
Manual (timer type) |
500W |
option |
One system |
|
|
SRV3300 |
Available upon quote |
¢ 190mm |
Plena magnetron |
¢ 75m x 3 |
down |
◯ |
300 ° C on the board stand |
Within ± 5%(¢ 180) |
- |
5.0 x 10-⁴ PA or less |
9.9 X 10-⁴ PA within 20 minutes |
Oil diffusion pump |
Manual |
- |
Manual (timer type) |
500W |
option |
Two systems |
|
|
SRV4320 |
Available upon quote |
¢ 280mm |
Plena magnetron |
¢ 100mm x 3 |
up |
◯ |
300 ° C on the board stand |
Within ± 5%(¢ 200) |
- |
5.0 x 10-⁴ PA or less |
9.9 X 10-⁴ PA within 20 minutes |
Turboquet pump |
Manual |
- |
Manual (timer type) |
1kw |
option |
Two systems |
Click on the part number for more information about each product
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