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Thin film forming device super high vacuum sputter ring device
SHINKO SEIKI CO., LTD.


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It is an ultra -high vacuum compatible sputtering device with a 10 -PA background exhaust performance in the spatta room. It consists of 6 rooms in the road rock room, cassette room, transport room, and sputter room, and can be used in a multilayer film in ultra -high and air. It is extremely effective for developing magnetic devices and compounds. 【feature】 ・ For research and development of state -of -the -art devices such as magnetic devices, nitride, and oxide semiconductors ・ The latest multi -chamber system compatible with up to φ8 inchwayha

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    Thin film forming device super high vacuum sputter ring device

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0 Models of Thin film forming device super high vacuum sputter ring device

Image Part Number Price (excluding tax) Processing board Equipment configuration / road rock room Equipment configuration / cassette room Equipment configuration / transport room Equipment configuration / Sputta room Cathode specifications Sputta direction Process performance / membrane thickening Process performance / etching distribution Process performance / board heating Achievement of each room / Road Lock Room Each room reaches the power / cassette room Achievement of each room 压 Power / transport room Achievement of each room 压 Power / Spatta room Method of operation

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Company Overview

SHINKO SEIKI CO., LTD., established in 1949, and located in Kobe, Japan, is a manufacturer of vacuum devices, ...

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