Vacuum Plasma Etcher CPE-B series
SAKIGAKE-Semiconductor
About This Product
Hyperataking on the surface of Teflon and water repellency of non -woven fabric.
■ Use
･ PTFE (Teflon) Hydrylore (NH3 required)
･ Water -repellent treatment of various materials (CF4 required)
･ Etching process of silicon membrane (substrate) (CF4 required)
･ Formation of glass film (substrate) (bubbler required)
･ Processing in cell culture containers
･ All control conditions manual operation specifications
→ Hit to researchers who are used to handling plasma devices
･ Can be incorporated into the manufacturing process at production sites
→ Because it can be used in conjunction with existing equipment, cost, time, and manufacturing efficiency are also improved.
･ Simple, price range with low introduction costs
→ Realize product sales that are low price by corporate efforts
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Product
Vacuum Plasma Etcher CPE-B series
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Handling Company
SAKIGAKE-Semiconductor
2 Models of Vacuum Plasma Etcher CPE-B series
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | External dimensions | Gas system | Processing pressure adjustment | Stage dimensions | Vacuum gauge | power supply | remarks |
|---|---|---|---|---|---|---|---|---|---|
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CPE-100B |
Available upon quote | 392mm (W) x 500mm (d) x 1,050mm (h) (not included, upper lid closing time), 850mm (W) x 900mm (d) x 1,050mm (without protrusions. | One system | Manual adjustment by manual exhaust valve and gas introduced | Diameter 100mm, diameter 400mm | Analog display Pirani vacuum | Single-phase 100V, 15A (50Hz/60Hz) model CPE-400B, single-phase 100V, 30A (50Hz/60Hz) | - |
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CPE-1000B |
Available upon quote | 1,600mm (W) x 1.600mm (d) x 1,100mm (H) (not included, close lid closing) | One system | Manual adjustment by manual exhaust valve and gas introduced | Diameter 1,000mm | Analog display Pirani vacuum | Single phase 200V, 30A (50Hz/60Hz) | * Vacuum pumps are sold separately. In addition, we accept specification changes separately. |
Click on the part number for more information about each product
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