CPE-100B | Vacuum Plasma Etcher CPE-B series
SAKIGAKE-Semiconductor
Price (excluding tax)
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External dimensions
Gas system
Processing pressure adjustment
Stage dimensions
Vacuum gauge
power supply
remarks
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Part Number
CPE-100B
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Handling Company
SAKIGAKE-Semiconductor
Vacuum Plasma Etcher CPE-B series CPE-100B's performance table
Items marked with have different values depending on the model number.
| Product Image | Price (excluding tax) | External dimensions | Gas system | Processing pressure adjustment | Stage dimensions | Vacuum gauge | power supply |
|---|---|---|---|---|---|---|---|
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Available upon quote | 392mm (W) x 500mm (d) x 1,050mm (h) (not included, upper lid closing time), 850mm (W) x 900mm (d) x 1,050mm (without protrusions. | One system | Manual adjustment by manual exhaust valve and gas introduced | Diameter 100mm, diameter 400mm | Analog display Pirani vacuum | Single-phase 100V, 15A (50Hz/60Hz) model CPE-400B, single-phase 100V, 30A (50Hz/60Hz) |
There are 2 models for this product.
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