Vacuum Plasma Etcher Semi-Auto Series CPE-S Series
SAKIGAKE-Semiconductor
About This Product
Ptfe (Teflon) nytherization. Water -repellent treatment of various materials. Glass film formation. Such
■ Product overview
･ A new semi -auto series is now available in the plasma device CPE series.
･ In addition to manual operation, you can easily operate the touch panel, and by registering the recipe in advance, you can simply drive a button.
･ Large area of φ300mm (we also accept changes in size)
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Product
Vacuum Plasma Etcher Semi-Auto Series CPE-S Series
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Handling Company
SAKIGAKE-Semiconductor
1 Models of Vacuum Plasma Etcher Semi-Auto Series CPE-S Series
| Product Image | Part Number | Price (excluding tax) | Discharge dimensions | External dimensions | Gas control method | Gas system | Output adjustment | Pressure adjustment | power supply | weight |
|---|---|---|---|---|---|---|---|---|---|---|
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CPE-S series |
Available upon quote | Diameter 300mm (circular) | 680mm (W) x 785mm (d) x 1,020mm (H) | Mass flow controller | 1 system (2 systems are optional) | can be | valve | AC100V, 30A (50Hz/60Hz) | 160kg |
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