Product
High-frequency power supply vacuum plasma device US-80AHandling Company
SAKIGAKE-SemiconductorProduct Image | Part Number | Price (excluding tax) | External dimensions | Gas introduction | Operating system | Processing pressure adjustment | Throughput | power supply | weight |
---|---|---|---|---|---|---|---|---|---|
US-80A |
Available upon quote | W745mm, D695mm, H1,445mm (lid closing, without protrusions) | Automatic flow control by 1 system, MFC | Touch panel | APC process pressure automatic control | 80 / batch (when using Iboy 500ml bottle (diameter 75mm, height 160mm)) | 13.56MHz max.1kw | Approximately 250kg |