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  3. Vacuum Vapor Deposition Devices
Description 9 Manufacturers 136 Products
ULVAC, Inc
ULVAC KIKO, Inc.
ST Instruments B.V
SHOWA SHINKU CO., LTD.
SHINKO SEIKI CO., LTD.
SATO VAC INC.
PREMATEC Corporation
Microphase Co., Ltd.
Japan Create Co., Ltd.

9 Vacuum Vapor Deposition Device Manufacturers in 2026

This section provides an overview for vacuum vapor deposition devices as well as their applications and principles. Also, please take a look at the list of 9 vacuum vapor deposition device manufacturers and their company rankings. Here are the top-ranked vacuum vapor deposition device companies as of March, 2026: 1.ST Instruments B.V, 2.SATO VAC INC., 3.PREMATEC Corporation.

Table of Contents

Categories Related to Vacuum Vapor Deposition Devices

Vacuum Pumps
Probe Cards
Vacuum Furnaces
FPD Lithography Equipment
Cleanrooms
Semiconductor Lithography Equipment
Probers
Sputtering Equipment
Etching Equipment
Semiconductor Manufacturing Equipment Component & Part Machining
ALD Systems
Glass Substrates
Plasma-Enhanced CVD
Deposition Equipment
Lithographers
Vacuum equipment
Chemical Vapor Deposition (CVD) Systems

What Is a Vacuum Vapor Deposition Device?

Vacuum Vapor Deposition DevicesA vacuum vapor deposition device is a device that forms a film on an object by vaporizing a substance under reduced pressure.

A vacuum vapor deposition device can form a smooth coating on an object, and the thickness and composition of the coating can be controlled.

Uses of Vacuum Vapor Deposition Devices

Vacuum vapor deposition devices can form films of various materials, including metallic materials, such as aluminum and organic/inorganic materials.

Vacuum vapor deposition devices are used for the following applications:

  • Optical thin films (antireflection coatings for lenses, special mirrors, etc.)
  • Magnetic tapes (audio and video tapes, etc.)
  • Semiconductors (organic EL, LED, solar cells, etc.)
  • Electronic components (resistors, capacitors, semiconductor integrated circuits, etc.)
  • Food packaging materials (e.g. aluminum evaporated film used for snack bags, etc.)
  • Analytical applications (sample preparations)

Principle of Vacuum Vapor Deposition Devices

Vacuum-Vapor-Deposition-Devices_蒸着装置-1

A rotary pump or turbomolecular pump is used to depressurize the chamber, vaporize the material to be deposited, and deposit it on the object at a distance. The reduced pressure removes impurities from the chamber and improves the diffusion of the vaporized material to produce a smooth film with good adhesion.

Plating is a well-known method of forming a film on the surface of a material. The difference is in plating, raw materials are supplied from the liquid phase, whereas in vapor deposition, raw materials are supplied from the gas phase.

Types of Vacuum Vapor Deposition Devices

Deposition methods used in vacuum vapor deposition devices can be divided into two types according to the method used to vaporize the substance: physical vapor deposition (PVD) and chemical vapor deposition (CVD).

1. Physical Vapor Deposition (PVD)

Vacuum-Vapor-Deposition-Devices_蒸着装置-2

Physical vapor deposition (PVD) is a method of forming films by vaporizing or sublimating evaporation materials through physical means, such as heating. Heating methods include electron beam, resistance heating, high-frequency induction, and laser.

  • Electron Beam Heating
    Vaporization is caused by irradiating the evaporation material stored in a crucible made of refractory materials with an electron beam. Electron beams have high energy and can be applied to materials with high melting points.
  • Resistance Heating
    An electric current is applied to a resistor such as tungsten to generate heat, and the evaporation material is placed on the resistor to heat and vaporize the evaporation material. Since it is relatively difficult to raise the temperature, this method is suitable for materials with low melting points.
  • High-frequency Induction Heating
    The evaporation material is placed in a crucible with a coil wound around it, and a high-frequency current is passed through the coil to generate a strong magnetic field. The current generated by the magnetic field and the heat generated by the electric heat resistance rapidly raise the temperature to vaporize the film material.
  • Laser Heating
    By irradiating the deposition material with a laser, high energy is supplied to vaporize the deposition material.

Plasma and molecular beam methods are also used as physical vapor deposition methods.

  • Molecular Beam Epitaxy (MBE)
    This method uses vacuum deposition in an ultra-high vacuum to align the vaporized molecules in the same direction, allowing for more precise control of film thickness and composition. The growth rate is slow and requires a high vacuum, making it unsuitable for larger equipment and poor for mass production.
  • Sputtering
    When an inert gas, such as argon, is injected into a vacuum and a voltage is applied to the electrode to cause a glow discharge, the plasmaized argon collides with the cathode, repelling atoms and molecules on the cathode. If the object to be deposited is placed on the anode, the repelled atoms are deposited on the surface. Ionization methods include direct current voltage (DC), radio frequency alternating current voltage (RF-AC), magnetrons, and ion beams.

2. Chemical Vapor Deposition (CVD)

Vacuum-Vapor-Deposition-Devices_蒸着装置-3

Chemical vapor deposition (CVD) is a method of forming films by depositing evaporation materials on an object using chemical reactions or other chemical methods. Typical methods include thermal CVD, optical CVD, plasma CVD, organometallic CVD, and atomic layer deposition (ALD).

  • Thermal CVD
    This method uses a resistively heated furnace to create high temperatures, through which raw material gases flow to induce chemical reactions to form thin films. Relatively uniform film thickness can be achieved.
  • Optical CVD
    This method uses ultraviolet lamps or laser beams to cause chemical reactions in a low-temperature process to form thin films. Since no ions are generated, there is little damage to the substrate.
  • Plasma CVD
    Plasma CVD is a method in which the reactivity of raw materials is increased by plasticizing them, causing a reaction to the evaporation target to form a film. High-quality films can be formed because thin films are formed at low temperatures. However, the equipment is expensive and maintenance is difficult.
  • Organometallic CVD
    This method uses an organometallic precursor of the metal to be vapor-deposited as a raw material, which reacts on the target to form a metallic thin film. This method is used for the mass production of LEDs and other devices because it can form films at high speed while precisely controlling film thickness.
  • Atomic Layer Deposition (ALD)
    By depositing and replacing multiple types of raw materials one at a time, the materials react in a controlled manner at a fixed location to form a thin film with a controlled structure and thickness.

In addition to the above, vacuum vapor deposition devices of various methods have been developed and are sold. It is necessary to select the appropriate equipment according to the application.

List of 9 Vacuum Vapor Deposition Device Manufacturers

*Including some distributors, etc.

Sort by Features

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  • Company Size: largest first
  • Year Founded: oldest first
  • Year Founded: earliest first

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  • Japan
  • Netherlands
    • SATO VAC INC.
      • Japan Address: 5-1-27, Oi, Shinagawa-ku, Tokyo, Japan

      Manufacturer Overview

      SATO VAC INC., established in 1932 and based in Tokyo, Japan, is a manufacturer of vacuum equipment including vacuum pumps, measuring instruments, and parts & components. Its production line is segmented into vacuum pumps, gauges, and equipment used in space development, semiconductors, energy, medical, optics, and automobile industries. The company's vacuum equipment includes compact CVD systems, vacuum defoamers, heat treatment furnaces, dryers, and evaporation systems. The company's production process involves structural designing, prototype creation, design review, and performance testing.

    • SHINKO SEIKI CO., LTD.
      • Japan Address: 1-35-3-chome, Takatsukadai, Nishi-ku, Kobe, Hyogo, Japan

      Manufacturer Overview

      SHINKO SEIKI CO., LTD., established in 1949, and located in Kobe, Japan, is a manufacturer of vacuum devices, electric furnaces and semiconductor manufacturing equipment. Its product line includes a vast array of vacuum pumps such as mechanical booster pumps, vacuum exhaust unit, oil sealed rotary vacuum pumps and water ring vacuum pumps. Its product range also inlcudes soldering equipments, optical inspection equipments, thin film forming equipments, and plasma processing equipments. The company holds several certification for its operation such as the ISO 14004, and the ISO 9001.

    • ULVAC KIKO, Inc.
      • Japan Address: 291-7, Chausubaru, Saito-City, Miyazaki, Japan

      Manufacturer Overview

      ULVAC KIKO, Inc., established in 1971 and headquartered in Miyazaki, Japan, is a manufacturer specializing in vacuum pumps and deposition systems. Its product portfolio encompasses oil-sealed rotary vacuum pumps, diaphragm type dry vacuum pumps, rocking piston type dry vacuum pumps, sliding vane type dry vacuum pumps, and high vacuum pumping systems. These products are vital for creating vacuum environments in industries like semiconductor manufacturing and flat panel display production. The company is known for its adherence to quality, holding ISO 9001 certification since 1997 and ISO 14001 certification since 2001.

    • ULVAC, Inc
      • Japan Address: 2500 Hagisono, Chigasaki, Kanagawa, Japan

      Manufacturer Overview

      Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, components, peripheral devices, and materials for the solar cell and semiconductor industries, among others. The company operates businesses in six areas, including materials, components, electronic devices, semiconductors, and flat panel display production equipment. Some of its products include roll coaters, semiconductor production equipment, LED production equipment, leak detectors, and vacuum brazing furnaces. It is ISO9001 certified, and its net sales in the 2022 fiscal year were 227.5 billion Japanese Yen, with 34% of this amount coming from semiconductor and electronic device production equipment.

    • PREMATEC Corporation
      • Japan Address: 11400-327 Aza Harayama, Tamagawa, Chino-City, Nagano, Japan

      Manufacturer Overview

      PREMATEC Corporation, established in 1962, is a manufacturer of equipment used in the production of LCDs based in Nagano, Japan. The company's product portfolio includes bonding, dispensing, slit coater, ambient lamination, and other related equipment. These products are critical in the manufacturing processes of flat panel displays, including LCDs. Additionally, the company is involved in designing and manufacturing special-purpose equipment. These machines are tailored for specific industrial applications. The company serves electronics manufacturers, OEMs, and industrial equipment manufacturers.

    • Microphase Co., Ltd.
      • Japan Address: 1147-9 Onigakubo, Tsukuba-city, Ibaraki, Japan

      Manufacturer Overview

      Microphase Co. Ltd., established in 1999 and headquartered in Ibaraki, Japan, is a manufacturer of nanotechnology products and energy device innovations. The company's products include high-dispersion CNT, long-length CNT, and various Carbon nanotubes (CNT) applications for energy storage and semiconductor devices. It offers sophisticated equipment like desk-top CVD systems for CNT synthesis and multi-purpose CVD Systems. It also provides specialized nanomaterial synthesis and analysis equipment in nanotechnology, energy, and environmental sectors.

    • SHOWA SHINKU CO., LTD.
      • Japan Address: 3062-10 Tana, Chuo-ku, Sagamihara-city, Kanagawa, Japan

      Manufacturer Overview

      Showa Shinku Co. Ltd., founded in 1953 and headquartered in Tokyo, Japan, is a manufacturer of vacuum equipment and components for quartz devices, optical thin films, and more. Its product line features vacuum evaporation equipment, sputtering equipment, ion plating equipment, atomic layer deposition equipment, and dry etching and ashing equipment. These products are integral to various manufacturing processes, particularly in the production of quartz devices, which hold significant importance in industrial applications.

Vacuum Vapor Deposition Device Manufacturer Ranking

*Including some distributors, etc.

Derivation Method

The ranking is calculated based on the click share within the vacuum vapor deposition device page as of March 2026. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.

Number of Employees

  1. ULVAC, Inc: 6,235
  2. SHOWA SHINKU CO., LTD.: 195
  3. Japan Create Co., Ltd.: 40

Newly Established Company

  1. Microphase Co., Ltd.: 1999 (27 years ago)
  2. Japan Create Co., Ltd.: 1963 (63 years ago)
  3. SHOWA SHINKU CO., LTD.: 1953 (73 years ago)

Company with a History

  1. SATO VAC INC.: 1932 (94 years ago)
  2. SHINKO SEIKI CO., LTD.: 1949 (77 years ago)
  3. PREMATEC Corporation: 1951 (75 years ago)

Global Distribution of Vacuum Vapor Deposition Device Manufacturers by Country

*Including some distributors, etc.

Country Number of Companies Share (%)
Japan Japan 8 88.9%
Netherlands Netherlands 1 11.1%

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List of Vacuum Vapor Deposition Device Products

136 products found

136 products

Vacuum vaporization device Small desktop high vacuum vapor sequence device VE -2013-Vacuum device

Vacuum device

Vacuum vaporization device Small desktop high vacuum vapor sequence device VE -2013

960+ people viewing

Last viewed: 6 hours ago

A vacuum vapor is a device that evaporates the material in a vacuum atmosphere and a thin film film on the sample. It is common to form a film in a...

2 models listed

VE -2013-Vacuum vaporization device Small desktop high vacuum vapor sequence device VE -2013
-Vacuum vaporization device Small desktop high vacuum vapor sequence device VE -2013

Glovebox built-in vacuum evaporation equipment MPVAP-Glovebox-Microphase Co., Ltd.

Microphase Co., Ltd.

Glovebox built-in vacuum evaporation equipment MPVAP-Glovebox

490+ people viewing

Last viewed: 9 hours ago

There are cases where it is desired to vacuum deposit a metal film on the surface of a sample that dislikes moisture or oxygen and collect it witho...


Small evaporation equipment VDE-300-Epiquest Co., Ltd.

Epiquest Co., Ltd.

Small evaporation equipment VDE-300

170+ people viewing

Last viewed: 3 hours ago

This is a small vacuum evaporation device that compactly houses a turbo molecular pump, rotary pump, Pirani vacuum gauge, ionization vacuum gauge, ...


Source Mini electron beam evaporator EBV40A1-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Source Mini electron beam evaporator EBV40A1

510+ people viewing

Last viewed: 9 hours ago

■Summary EBV40A1 is a device developed for producing films of several atomic layers or as a dopant for multilayer films produced using MBE equipmen...


Vacuum application equipment Vacuum evaporation equipment Chamber moving type LL-Fuji Inback Co., Ltd.

Fuji Inback Co., Ltd.

Vacuum application equipment Vacuum evaporation equipment Chamber moving type LL

230+ people viewing

Last viewed: 9 hours ago


Drum sputtering equipment for particle surface film formation-Arios Co., Ltd.

Arios Co., Ltd.

Drum sputtering equipment for particle surface film formation

640+ people viewing

Last viewed: 9 hours ago

■Summary In order to uniformly form a film on the surface of the sample, this device places the sample in a drum-shaped sample holder and performs ...


High-performance vacuum evaporation equipment MPVAP-Microphase Co., Ltd.

Microphase Co., Ltd.

High-performance vacuum evaporation equipment MPVAP

490+ people viewing

Last viewed: 9 hours ago

Equipped with a 360-degree rotating cubic substrate holder invented by our company, the sample installation area has been increased by four times. ...


Resistance heating vapor deposition equipment-MPS Co., Ltd.

MPS Co., Ltd.

Resistance heating vapor deposition equipment

440+ people viewing

Last viewed: 5 hours ago

■Summary This is a resistance heating type vapor deposition device. It is used for small-scale optical film production.


Thin film production equipment PVD equipment Hybrid vapor deposition equipment-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Thin film production equipment PVD equipment Hybrid vapor deposition equipment

580+ people viewing

Last viewed: 9 hours ago

■Features This equipment is a hybrid type evaporation equipment equipped with 4 magnetron sputter sources using PVD method, 2 EB evaporation source...


Thin film production equipment 4-element magnetron sputtering equipment-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Thin film production equipment 4-element magnetron sputtering equipment

600+ people viewing

Last viewed: 2 hours ago

This equipment is a Brainer type magnetron sputtering equipment that uses a DC magnetron sputtering source. This is an ultra-high vacuum compatible...


Metal vapor deposition equipment for powder particles MPVAP-Powder-Microphase Co., Ltd.

Microphase Co., Ltd.

Metal vapor deposition equipment for powder particles MPVAP-Powder

410+ people viewing

Last viewed: 7 hours ago

This is a vacuum evaporation device for coating various metal thin films on the surface of granular or powder-type samples. By allowing the evapora...


MBE equipment-Arios Co., Ltd.

Arios Co., Ltd.

MBE equipment

670+ people viewing

Last viewed: 28 minutes ago

■Summary Arios is a professional group with over 20 years of experience in manufacturing MBE equipment. Arios' MBE equipment supports substrate siz...


Thin film production equipment Magnetron sputtering deposition equipment-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Thin film production equipment Magnetron sputtering deposition equipment

590+ people viewing

Last viewed: 5 hours ago

■Features This equipment is a Brainer-type magnetron sputtering ultra-high vacuum thin film production equipment using a DC magnetron sputtering so...


Tabletop vacuum baking/HMDS deposition equipment 310TA-HiSOL,Inc.

HiSOL,Inc.

Tabletop vacuum baking/HMDS deposition equipment 310TA

870+ people viewing

Last viewed: 9 hours ago

This equipment is specialized for vapor deposition (vapor priming) of HMDS (hexamethyldisilazane), and various parameters of the equipment are pres...


MBE equipment for research/semi-production RC6100-Epiquest Co., Ltd.

Epiquest Co., Ltd.

MBE equipment for research/semi-production RC6100

360+ people viewing

Last viewed: 9 hours ago

For production. The cell substrate equipment designed using advanced molecular beam simulation technology enables highly uniform (±1% or less) crys...


EBPVD equipment-MPS Co., Ltd.

MPS Co., Ltd.

EBPVD equipment

390+ people viewing

Last viewed: 9 hours ago

■Summary This is an EBPVD device equipped with a 100kW straight gun. It is used for research and development of new heat insulating membranes.


MBE equipment for research RC3100-Epiquest Co., Ltd.

Epiquest Co., Ltd.

MBE equipment for research RC3100

280+ people viewing

Last viewed: 9 hours ago

For high-grade research. This MBE equipment is ideal for use in advanced research and semi-production. In addition to the standard III-V materials,...


Thin film forming device large resin substrate vapor package device-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Thin film forming device large resin substrate vapor package device

590+ people viewing

Last viewed: 9 hours ago

It is a large vapor advertisement that corresponds to the film for decorating the exterior of the car. It is possible to vapor a resin substrate at...


Thin film production equipment Electron beam evaporation equipment Large EB evaporation equipment-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Thin film production equipment Electron beam evaporation equipment Large EB evaporation equipment

510+ people viewing

Last viewed: 9 hours ago

■Features This device is a high melting point metal evaporation device using electron beam (EB). This device uses a rotating/revolving planetary to...


Small vacuum evaporation equipment VWR-400M/ERH-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Small vacuum evaporation equipment VWR-400M/ERH

350+ people viewing

Last viewed: 8 hours ago

■Summary Adopts water-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equi...


MBE equipment for research RC2100-Epiquest Co., Ltd.

Epiquest Co., Ltd.

MBE equipment for research RC2100

410+ people viewing

Last viewed: 9 hours ago

For high-grade research. This MBE equipment is ideal for use in advanced research and semi-production. In addition to the standard III-V materials,...


Thin film formation device lift off process compatible vapor package device-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Thin film formation device lift off process compatible vapor package device

350+ people viewing

Last viewed: 9 hours ago

This is a dedicated vapor equipment that supports the expanded lift off process. The verticality of high evaporation particles and the adoption of ...

2 models listed

AAMF-C1650SBR-Thin film formation device lift off process compatible vapor package device

Vapulator for research and development of thin film formation equipment-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Vapulator for research and development of thin film formation equipment

320+ people viewing

Last viewed: 9 hours ago

It is a low -cost small vapor equipment that supports basic research experiments. Various aspects such as evaporation mechanism, substrate heating,...

4 models listed

AMF-645SB-Vapulator for research and development of thin film formation equipment

Small vacuum evaporation equipment VTR-350M/ERH-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Small vacuum evaporation equipment VTR-350M/ERH

390+ people viewing

Last viewed: 9 hours ago

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipment such ...


Centrifugal thin film evaporator CEH series-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Centrifugal thin film evaporator CEH series

880+ people viewing

Last viewed: 9 hours ago

■Summary This equipment is intended for vacuum distillation processing. It is possible to distill highly heat-sensitive substances (substances that...


Thin film formation device standard type vaporization device-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Thin film formation device standard type vaporization device

390+ people viewing

Last viewed: 9 hours ago

It is a bestseller type that boasts a wealth of track record in the production process of individual semiconductors and compound semiconductors. Ab...

4 models listed

AAMF-C2280SPB-Thin film formation device standard type vaporization device

Small vacuum evaporation equipment VTS-350M/ERH-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Small vacuum evaporation equipment VTS-350M/ERH

430+ people viewing

Last viewed: 9 hours ago

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipment such ...


Thin film forming device horizontal vapor adhesion device-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Thin film forming device horizontal vapor adhesion device

270+ people viewing

Last viewed: 1 day ago

Ideal for production of small electronic components such as the end of the resistor, the electrode formation of the crystal vibration. A large amou...

3 models listed

Aamh-C1075SB-Thin film forming device horizontal vapor adhesion device
Aamh-C1080SB-Thin film forming device horizontal vapor adhesion device
Aamh-C20130SB-Thin film forming device horizontal vapor adhesion device

MBE device for small research RC1100-Epiquest Co., Ltd.

Epiquest Co., Ltd.

MBE device for small research RC1100

680+ people viewing

Last viewed: 1 hour ago

For personal use. This is an MBE device for research that is low-cost, space-saving, and has high performance. Although it is a small machine, full...


Tabletop vacuum bake/HMDS deposition equipment 58TA-HiSOL,Inc.

HiSOL,Inc.

Tabletop vacuum bake/HMDS deposition equipment 58TA

570+ people viewing

Last viewed: 15 hours ago

This equipment is specialized for vapor deposition (vapor priming) of HMDS (hexamethyldisilazane), and various parameters of the equipment are pres...








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