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  3. Vacuum Vapor Deposition Devices
Description 9 Manufacturers 80 Products
ULVAC, Inc
ULVAC KIKO, Inc.
ST Instruments B.V
SHOWA SHINKU CO., LTD.
SHINKO SEIKI CO., LTD.
SATO VAC INC.
PREMATEC Corporation
Microphase Co., Ltd.
Japan Create Co., Ltd.

9 Vacuum Vapor Deposition Device Manufacturers in 2024

This section provides an overview for vacuum vapor deposition devices as well as their applications and principles. Also, please take a look at the list of 9 vacuum vapor deposition device manufacturers and their company rankings. Here are the top-ranked vacuum vapor deposition device companies as of December, 2024: 1.ST Instruments B.V, 2.SATO VAC INC., 3.ULVAC, Inc.

Table of Contents

What Is a Vacuum Vapor Deposition Device?

Vacuum Vapor Deposition DevicesA vacuum vapor deposition device is a device that forms a film on an object by vaporizing a substance under reduced pressure.

A vacuum vapor deposition device can form a smooth coating on an object, and the thickness and composition of the coating can be controlled.

Uses of Vacuum Vapor Deposition Devices

Vacuum vapor deposition devices can form films of various materials, including metallic materials, such as aluminum and organic/inorganic materials.

Vacuum vapor deposition devices are used for the following applications:

  • Optical thin films (antireflection coatings for lenses, special mirrors, etc.)
  • Magnetic tapes (audio and video tapes, etc.)
  • Semiconductors (organic EL, LED, solar cells, etc.)
  • Electronic components (resistors, capacitors, semiconductor integrated circuits, etc.)
  • Food packaging materials (e.g. aluminum evaporated film used for snack bags, etc.)
  • Analytical applications (sample preparations)

Principle of Vacuum Vapor Deposition Devices

Vacuum-Vapor-Deposition-Devices_蒸着装置-1

A rotary pump or turbomolecular pump is used to depressurize the chamber, vaporize the material to be deposited, and deposit it on the object at a distance. The reduced pressure removes impurities from the chamber and improves the diffusion of the vaporized material to produce a smooth film with good adhesion.

Plating is a well-known method of forming a film on the surface of a material. The difference is in plating, raw materials are supplied from the liquid phase, whereas in vapor deposition, raw materials are supplied from the gas phase.

Types of Vacuum Vapor Deposition Devices

Deposition methods used in vacuum vapor deposition devices can be divided into two types according to the method used to vaporize the substance: physical vapor deposition (PVD) and chemical vapor deposition (CVD).

1. Physical Vapor Deposition (PVD)

Vacuum-Vapor-Deposition-Devices_蒸着装置-2

Physical vapor deposition (PVD) is a method of forming films by vaporizing or sublimating evaporation materials through physical means, such as heating. Heating methods include electron beam, resistance heating, high-frequency induction, and laser.

  • Electron Beam Heating
    Vaporization is caused by irradiating the evaporation material stored in a crucible made of refractory materials with an electron beam. Electron beams have high energy and can be applied to materials with high melting points.
  • Resistance Heating
    An electric current is applied to a resistor such as tungsten to generate heat, and the evaporation material is placed on the resistor to heat and vaporize the evaporation material. Since it is relatively difficult to raise the temperature, this method is suitable for materials with low melting points.
  • High-frequency Induction Heating
    The evaporation material is placed in a crucible with a coil wound around it, and a high-frequency current is passed through the coil to generate a strong magnetic field. The current generated by the magnetic field and the heat generated by the electric heat resistance rapidly raise the temperature to vaporize the film material.
  • Laser Heating
    By irradiating the deposition material with a laser, high energy is supplied to vaporize the deposition material.

Plasma and molecular beam methods are also used as physical vapor deposition methods.

  • Molecular Beam Epitaxy (MBE)
    This method uses vacuum deposition in an ultra-high vacuum to align the vaporized molecules in the same direction, allowing for more precise control of film thickness and composition. The growth rate is slow and requires a high vacuum, making it unsuitable for larger equipment and poor for mass production.
  • Sputtering
    When an inert gas, such as argon, is injected into a vacuum and a voltage is applied to the electrode to cause a glow discharge, the plasmaized argon collides with the cathode, repelling atoms and molecules on the cathode. If the object to be deposited is placed on the anode, the repelled atoms are deposited on the surface. Ionization methods include direct current voltage (DC), radio frequency alternating current voltage (RF-AC), magnetrons, and ion beams.

2. Chemical Vapor Deposition (CVD)

Vacuum-Vapor-Deposition-Devices_蒸着装置-3

Chemical vapor deposition (CVD) is a method of forming films by depositing evaporation materials on an object using chemical reactions or other chemical methods. Typical methods include thermal CVD, optical CVD, plasma CVD, organometallic CVD, and atomic layer deposition (ALD).

  • Thermal CVD
    This method uses a resistively heated furnace to create high temperatures, through which raw material gases flow to induce chemical reactions to form thin films. Relatively uniform film thickness can be achieved.
  • Optical CVD
    This method uses ultraviolet lamps or laser beams to cause chemical reactions in a low-temperature process to form thin films. Since no ions are generated, there is little damage to the substrate.
  • Plasma CVD
    Plasma CVD is a method in which the reactivity of raw materials is increased by plasticizing them, causing a reaction to the evaporation target to form a film. High-quality films can be formed because thin films are formed at low temperatures. However, the equipment is expensive and maintenance is difficult.
  • Organometallic CVD
    This method uses an organometallic precursor of the metal to be vapor-deposited as a raw material, which reacts on the target to form a metallic thin film. This method is used for the mass production of LEDs and other devices because it can form films at high speed while precisely controlling film thickness.
  • Atomic Layer Deposition (ALD)
    By depositing and replacing multiple types of raw materials one at a time, the materials react in a controlled manner at a fixed location to form a thin film with a controlled structure and thickness.

In addition to the above, vacuum vapor deposition devices of various methods have been developed and are sold. It is necessary to select the appropriate equipment according to the application.

List of 9 Vacuum Vapor Deposition Device Manufacturers

*Including some distributors, etc.

Sort by Features

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  • Company Size: largest first
  • Year Founded: oldest first
  • Year Founded: earliest first

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  • Japan
  • Netherlands
    • SATO VAC INC.
      • Japan Address: 5-1-27, Oi, Shinagawa-ku, Tokyo, Japan

      Manufacturer Overview

      SATO VAC INC., established in 1932 and based in Tokyo, Japan, is a manufacturer of vacuum equipment including vacuum pumps, measuring instruments, and parts & components. Its production line is segmented into vacuum pumps, gauges, and equipment used in space development, semiconductors, energy, medical, optics, and automobile industries. The company's vacuum equipment includes compact CVD systems, vacuum defoamers, heat treatment furnaces, dryers, and evaporation systems. The company's production process involves structural designing, prototype creation, design review, and performance testing.

    • SHINKO SEIKI CO., LTD.
      • Japan Address: 1-35-3-chome, Takatsukadai, Nishi-ku, Kobe, Hyogo, Japan

      Manufacturer Overview

      SHINKO SEIKI CO., LTD., established in 1949, and located in Kobe, Japan, is a manufacturer of vacuum devices, electric furnaces and semiconductor manufacturing equipment. Its product line includes a vast array of vacuum pumps such as mechanical booster pumps, vacuum exhaust unit, oil sealed rotary vacuum pumps and water ring vacuum pumps. Its product range also inlcudes soldering equipments, optical inspection equipments, thin film forming equipments, and plasma processing equipments. The company holds several certification for its operation such as the ISO 14004, and the ISO 9001.

    • ULVAC KIKO, Inc.
      • Japan Address: 291-7, Chausubaru, Saito-City, Miyazaki, Japan

      Manufacturer Overview

      ULVAC KIKO, Inc., established in 1971 and headquartered in Miyazaki, Japan, is a manufacturer specializing in vacuum pumps and deposition systems. Its product portfolio encompasses oil-sealed rotary vacuum pumps, diaphragm type dry vacuum pumps, rocking piston type dry vacuum pumps, sliding vane type dry vacuum pumps, and high vacuum pumping systems. These products are vital for creating vacuum environments in industries like semiconductor manufacturing and flat panel display production. The company is known for its adherence to quality, holding ISO 9001 certification since 1997 and ISO 14001 certification since 2001.

    • ULVAC, Inc
      • Japan Address: 2500 Hagisono, Chigasaki, Kanagawa, Japan

      Manufacturer Overview

      Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, components, peripheral devices, and materials for the solar cell and semiconductor industries, among others. The company operates businesses in six areas, including materials, components, electronic devices, semiconductors, and flat panel display production equipment. Some of its products include roll coaters, semiconductor production equipment, LED production equipment, leak detectors, and vacuum brazing furnaces. It is ISO9001 certified, and its net sales in the 2022 fiscal year were 227.5 billion Japanese Yen, with 34% of this amount coming from semiconductor and electronic device production equipment.

    • PREMATEC Corporation
      • Japan Address: 11400-327 Aza Harayama, Tamagawa, Chino-City, Nagano, Japan

      Manufacturer Overview

      PREMATEC Corporation, established in 1962, is a manufacturer of equipment used in the production of LCDs based in Nagano, Japan. The company's product portfolio includes bonding, dispensing, slit coater, ambient lamination, and other related equipment. These products are critical in the manufacturing processes of flat panel displays, including LCDs. Additionally, the company is involved in designing and manufacturing special-purpose equipment. These machines are tailored for specific industrial applications. The company serves electronics manufacturers, OEMs, and industrial equipment manufacturers.

    • Microphase Co., Ltd.
      • Japan Address: 1147-9 Onigakubo, Tsukuba-city, Ibaraki, Japan

      Manufacturer Overview

      Microphase Co. Ltd., established in 1999 and headquartered in Ibaraki, Japan, is a manufacturer of nanotechnology products and energy device innovations. The company's products include high-dispersion CNT, long-length CNT, and various Carbon nanotubes (CNT) applications for energy storage and semiconductor devices. It offers sophisticated equipment like desk-top CVD systems for CNT synthesis and multi-purpose CVD Systems. It also provides specialized nanomaterial synthesis and analysis equipment in nanotechnology, energy, and environmental sectors.

    • SHOWA SHINKU CO., LTD.
      • Japan Address: 3062-10 Tana, Chuo-ku, Sagamihara-city, Kanagawa, Japan

      Manufacturer Overview

      Showa Shinku Co. Ltd., founded in 1953 and headquartered in Tokyo, Japan, is a manufacturer of vacuum equipment and components for quartz devices, optical thin films, and more. Its product line features vacuum evaporation equipment, sputtering equipment, ion plating equipment, atomic layer deposition equipment, and dry etching and ashing equipment. These products are integral to various manufacturing processes, particularly in the production of quartz devices, which hold significant importance in industrial applications.

Vacuum Vapor Deposition Device Manufacturer Ranking

*Including some distributors, etc.

Derivation Method

The ranking is calculated based on the click share within the vacuum vapor deposition device page as of December 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.

Number of Employees

  1. ULVAC, Inc: 6,235
  2. SHOWA SHINKU CO., LTD.: 195
  3. Japan Create Co., Ltd.: 40

Newly Established Company

  1. Microphase Co., Ltd.: 1999 (25 years ago)
  2. Japan Create Co., Ltd.: 1963 (61 years ago)
  3. SHOWA SHINKU CO., LTD.: 1953 (71 years ago)

Company with a History

  1. SATO VAC INC.: 1932 (92 years ago)
  2. SHINKO SEIKI CO., LTD.: 1949 (75 years ago)
  3. PREMATEC Corporation: 1951 (73 years ago)

Global Distribution of Vacuum Vapor Deposition Device Manufacturers by Country

*Including some distributors, etc.

Country Number of Companies Share (%)
Japan Japan 8 88.9%
Netherlands Netherlands 1 11.1%

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List of Vacuum Vapor Deposition Device Products

80 products found - Page 2

80 products - Page 2

Metal evaporation cell Single element evaporation simple cell KMDS-Cell-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Metal evaporation cell Single element evaporation simple cell KMDS-Cell

50+ people viewing

Last viewed: 6 hours ago

Response Rate
100.0 %
Response Time
50.9 hours

■Features ・Compact and easy-to-use vapor deposition source ・Easy maintenance ・Filament heating crucible configuration for electrical heating ・C...


Metal Deposition Cell Binary Metal Deposition Cell KMDW-Cell-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Metal Deposition Cell Binary Metal Deposition Cell KMDW-Cell

40+ people viewing

Last viewed: 7 hours ago

Response Rate
100.0 %
Response Time
50.9 hours

■Features ・Compact and easy to use ・Easy maintenance ・Filament heating crucible configuration for electrical heating ・Two types of metal materi...


Metal evaporation cell Ternary metal evaporation cell KMDT-Cell-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Metal evaporation cell Ternary metal evaporation cell KMDT-Cell

40+ people viewing

Last viewed: 9 hours ago

Response Rate
100.0 %
Response Time
50.9 hours

■Features ・Compact and easy to use ・Easy maintenance ・Filament heating crucible configuration for electrical heating ・3 types of metal material...


Source Mini electron beam evaporator EBV40A1-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Source Mini electron beam evaporator EBV40A1

40+ people viewing

Last viewed: 1 day ago

Response Rate
100.0 %
Response Time
50.9 hours

■Summary EBV40A1 is a device developed for producing films of several atomic layers or as a dopant for multilayer films produced using MBE equipmen...


Deposition controller for evaporation TMC-13-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Deposition controller for evaporation TMC-13

20+ people viewing

Last viewed: 1 day ago

Response Rate
100.0 %
Response Time
50.9 hours

■Summary TMC-13 is a film thickness monitor compatible with standard 6MHz crystal resonators. It can be operated from the LCD touch panel and has a...


Thin film production equipment Magnetron sputtering deposition equipment-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Thin film production equipment Magnetron sputtering deposition equipment

40+ people viewing

Last viewed: 13 hours ago

Response Rate
100.0 %
Response Time
50.9 hours

■Features This equipment is a Brainer-type magnetron sputtering ultra-high vacuum thin film production equipment using a DC magnetron sputtering so...


Thin film production equipment 4-element magnetron sputtering equipment-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Thin film production equipment 4-element magnetron sputtering equipment

30+ people viewing

Last viewed: 10 hours ago

Response Rate
100.0 %
Response Time
50.9 hours

This equipment is a Brainer type magnetron sputtering equipment that uses a DC magnetron sputtering source. This is an ultra-high vacuum compatible...


Vacuum coating equipment for decorative film market 5-tank inline sputtering + plasma polymerization system-ShinMaywa Industries, Ltd.

ShinMaywa Industries, Ltd.

Vacuum coating equipment for decorative film market 5-tank inline sputtering + plasma polymerization system

40+ people viewing

Last viewed: 1 hour ago

Response Rate
100.0 %
Response Time
160.0 hours

■Features ・Achieve continuous processing of RF plasma pretreatment, DC sputtering, and RF plasma polymerization in 1 minute takt ・Equipped with a...


Resistance heating vapor deposition equipment-MPS Co., Ltd.

MPS Co., Ltd.

Resistance heating vapor deposition equipment

70+ people viewing

Last viewed: 1 hour ago

Response Rate
100.0 %
Response Time
86.1 hours

■Summary This is a resistance heating type vapor deposition device. It is used for small-scale optical film production.


EBPVD equipment-MPS Co., Ltd.

MPS Co., Ltd.

EBPVD equipment

150+ people viewing

Last viewed: 23 hours ago

Response Rate
100.0 %
Response Time
86.1 hours

■Summary This is an EBPVD device equipped with a 100kW straight gun. It is used for research and development of new heat insulating membranes.


Mixed evaporation and sputtering sources [Combined film forming equipment] nanoPVD-ST15A-

Mixed evaporation and sputtering sources [Combined film forming equipment] nanoPVD-ST15A

20+ people viewing

Last viewed: 1 day ago

■Summary A new 3-in-1 multi-thin film experimental device that combines evaporation and sputtering has been added to the nano benchtop series lineu...


Fractured surface vapor deposition protective film forming equipment FDP-500-II type-Atotech Co., Ltd.

Atotech Co., Ltd.

Fractured surface vapor deposition protective film forming equipment FDP-500-II type

20+ people viewing

Last viewed: 2 hours ago

This device was developed to vacuum deposit Ni, etc. on the fractured surface immediately after breaking various metals, alloy materials, etc. by m...


Thin film formation device standard type vaporization device-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Thin film formation device standard type vaporization device

370+ people viewing

Last viewed: 1 day ago

It is a bestseller type that boasts a wealth of track record in the production process of individual semiconductors and compound semiconductors. Ab...

4 models listed

AAMF-C2280SPB-Thin film formation device standard type vaporization device

Electron beam vacuum evaporation equipment Magnetron sputtering equipment-Atotech Co., Ltd.

Atotech Co., Ltd.

Electron beam vacuum evaporation equipment Magnetron sputtering equipment

20+ people viewing

Last viewed: 6 hours ago

■Features ・Tungsten thin film coating equipment for electron microscopes. - Useful for ultra-high magnification observations in ultra-high resolut...


Thin film formation device lift off process compatible vapor package device-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Thin film formation device lift off process compatible vapor package device

350+ people viewing

Last viewed: 1 hour ago

This is a dedicated vapor equipment that supports the expanded lift off process. The verticality of high evaporation particles and the adoption of ...

2 models listed

AAMF-C1650SBR-Thin film formation device lift off process compatible vapor package device

Electron beam vacuum evaporation equipment-Atotech Co., Ltd.

Atotech Co., Ltd.

Electron beam vacuum evaporation equipment

10+ people viewing

Last viewed: 11 hours ago

This device was developed as an evaporation device suitable for all metals, including Mg alloys, using an electron beam in a clean high vacuum for ...


Thin film forming device Road lock type vapor package device-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Thin film forming device Road lock type vapor package device

290+ people viewing

Last viewed: 1 hour ago

Special specification for electronic devices. Specializes in special processes and devices, and is flexible regardless of the substrate shape or pr...

4 models listed

AAMF-C845SB-L-Thin film forming device Road lock type vapor package device
AAMF-C1065SB-L-Thin film forming device Road lock type vapor package device
AAMF-C1275SB-L-Thin film forming device Road lock type vapor package device
AAMF-C1260SB-M-Thin film forming device Road lock type vapor package device

Electron beam vacuum evaporation equipment 3KV ion gun-Atotech Co., Ltd.

Atotech Co., Ltd.

Electron beam vacuum evaporation equipment 3KV ion gun

10+ people viewing

Last viewed: 1 day ago

The 3KV ion gun is an "Ar sputtering ion gun" for the purpose of cleaning sample surfaces in ultra-high vacuum, and is used for experimental resear...


Thin film forming device horizontal vapor adhesion device-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Thin film forming device horizontal vapor adhesion device

290+ people viewing

Last viewed: 58 minutes ago

Ideal for production of small electronic components such as the end of the resistor, the electrode formation of the crystal vibration. A large amou...

3 models listed

Aamh-C1075SB-Thin film forming device horizontal vapor adhesion device
Aamh-C1080SB-Thin film forming device horizontal vapor adhesion device
Aamh-C20130SB-Thin film forming device horizontal vapor adhesion device

Vapulator for research and development of thin film formation equipment-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Vapulator for research and development of thin film formation equipment

260+ people viewing

Last viewed: 1 hour ago

It is a low -cost small vapor equipment that supports basic research experiments. Various aspects such as evaporation mechanism, substrate heating,...

4 models listed

AMF-645SB-Vapulator for research and development of thin film formation equipment

Thin film forming device large resin substrate vapor package device-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Thin film forming device large resin substrate vapor package device

230+ people viewing

Last viewed: 1 hour ago

It is a large vapor advertisement that corresponds to the film for decorating the exterior of the car. It is possible to vapor a resin substrate at...


Compact, small footprint, high performance vacuum evaporation equipment for “organic materials” and “metal films” nanoPVD-T15A-

Compact, small footprint, high performance vacuum evaporation equipment for “organic materials” and “metal films” nanoPVD-T15A

20+ people viewing

Last viewed: 1 day ago

■Summary nanoPVD-T15A is a tabletop, compact size, high-performance "organic film/metal film deposition" device. Adopts LTE1, a low-temperature org...


Various power supplies/robot related optical EB gun EGP-1G-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Various power supplies/robot related optical EB gun EGP-1G

50+ people viewing

Last viewed: 1 day ago

Response Rate
100.0 %
Response Time
125.8 hours

■Summary EGP-1G is an electron beam evaporation source for optical film deposition that reduces costs by adopting a simple 180º beam deflection met...


Various power supplies/robot related EB gun for evaporation EGK/EGL/EGO series-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Various power supplies/robot related EB gun for evaporation EGK/EGL/EGO series

60+ people viewing

Last viewed: 1 day ago

Response Rate
100.0 %
Response Time
125.8 hours

■Summary All of ULVAC's EB guns for electron beam evaporation use magnetic field deflection. In addition, the structure is designed to prevent cont...


Roll-up vacuum evaporation equipment EW series-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Roll-up vacuum evaporation equipment EW series

70+ people viewing

Last viewed: 1 day ago

Response Rate
100.0 %
Response Time
125.8 hours

■Summary This is a film deposition device that evaporates metals, oxides, etc. while continuously winding plastic film, paper, metal foil, etc. We ...


Batch type high vacuum evaporation equipment ei series-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Batch type high vacuum evaporation equipment ei series

70+ people viewing

Last viewed: 1 day ago

Response Rate
100.0 %
Response Time
125.8 hours

■Summary The batch type high vacuum evaporation equipment ei series is an equipment for forming metal and oxide films on substrates. It is suitable...


High-speed vacuum evaporation equipment VPC-1100-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

High-speed vacuum evaporation equipment VPC-1100

70+ people viewing

Last viewed: 1 day ago

Response Rate
100.0 %
Response Time
125.8 hours

■Water-cooled oil diffusion pump (1,100L/sec) + oil rotary vacuum pump Necessary equipment such as oil diffusion pumps, oil rotary vacuum pumps, Pi...


Small vacuum evaporation equipment VTS-350M/ERH-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Small vacuum evaporation equipment VTS-350M/ERH

100+ people viewing

Last viewed: 1 day ago

Response Rate
100.0 %
Response Time
125.8 hours

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipment such ...


Small vacuum evaporation equipment VTR-060M/ERH-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Small vacuum evaporation equipment VTR-060M/ERH

90+ people viewing

Last viewed: 1 day ago

Response Rate
100.0 %
Response Time
125.8 hours

■Summary This is a small, resistance-heating, low-cost vacuum evaporation device that compactly houses a turbomolecular pump and auxiliary pump ins...


Small vacuum evaporation equipment VTR-350M/ERH-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Small vacuum evaporation equipment VTR-350M/ERH

50+ people viewing

Last viewed: 1 day ago

Response Rate
100.0 %
Response Time
125.8 hours

■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipment such ...








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