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  3. Vacuum Vapor Deposition Devices
Description 9 Manufacturers 136 Products
ULVAC, Inc
ULVAC KIKO, Inc.
ST Instruments B.V
SHOWA SHINKU CO., LTD.
SHINKO SEIKI CO., LTD.
SATO VAC INC.
PREMATEC Corporation
Microphase Co., Ltd.
Japan Create Co., Ltd.

9 Vacuum Vapor Deposition Device Manufacturers in 2026

This section provides an overview for vacuum vapor deposition devices as well as their applications and principles. Also, please take a look at the list of 9 vacuum vapor deposition device manufacturers and their company rankings. Here are the top-ranked vacuum vapor deposition device companies as of April, 2026: 1.ST Instruments B.V, 2.SATO VAC INC., 3.PREMATEC Corporation.

Table of Contents

Categories Related to Vacuum Vapor Deposition Devices

Vacuum Pumps
Probe Cards
Vacuum Furnaces
FPD Lithography Equipment
Cleanrooms
Semiconductor Lithography Equipment
Probers
Sputtering Equipment
Etching Equipment
Semiconductor Manufacturing Equipment Component & Part Machining
ALD Systems
Glass Substrates
Plasma-Enhanced CVD
Deposition Equipment
Lithographers
Vacuum equipment
Chemical Vapor Deposition (CVD) Systems

What Is a Vacuum Vapor Deposition Device?

Vacuum Vapor Deposition DevicesA vacuum vapor deposition device is a device that forms a film on an object by vaporizing a substance under reduced pressure.

A vacuum vapor deposition device can form a smooth coating on an object, and the thickness and composition of the coating can be controlled.

Uses of Vacuum Vapor Deposition Devices

Vacuum vapor deposition devices can form films of various materials, including metallic materials, such as aluminum and organic/inorganic materials.

Vacuum vapor deposition devices are used for the following applications:

  • Optical thin films (antireflection coatings for lenses, special mirrors, etc.)
  • Magnetic tapes (audio and video tapes, etc.)
  • Semiconductors (organic EL, LED, solar cells, etc.)
  • Electronic components (resistors, capacitors, semiconductor integrated circuits, etc.)
  • Food packaging materials (e.g. aluminum evaporated film used for snack bags, etc.)
  • Analytical applications (sample preparations)

Principle of Vacuum Vapor Deposition Devices

Vacuum-Vapor-Deposition-Devices_蒸着装置-1

A rotary pump or turbomolecular pump is used to depressurize the chamber, vaporize the material to be deposited, and deposit it on the object at a distance. The reduced pressure removes impurities from the chamber and improves the diffusion of the vaporized material to produce a smooth film with good adhesion.

Plating is a well-known method of forming a film on the surface of a material. The difference is in plating, raw materials are supplied from the liquid phase, whereas in vapor deposition, raw materials are supplied from the gas phase.

Types of Vacuum Vapor Deposition Devices

Deposition methods used in vacuum vapor deposition devices can be divided into two types according to the method used to vaporize the substance: physical vapor deposition (PVD) and chemical vapor deposition (CVD).

1. Physical Vapor Deposition (PVD)

Vacuum-Vapor-Deposition-Devices_蒸着装置-2

Physical vapor deposition (PVD) is a method of forming films by vaporizing or sublimating evaporation materials through physical means, such as heating. Heating methods include electron beam, resistance heating, high-frequency induction, and laser.

  • Electron Beam Heating
    Vaporization is caused by irradiating the evaporation material stored in a crucible made of refractory materials with an electron beam. Electron beams have high energy and can be applied to materials with high melting points.
  • Resistance Heating
    An electric current is applied to a resistor such as tungsten to generate heat, and the evaporation material is placed on the resistor to heat and vaporize the evaporation material. Since it is relatively difficult to raise the temperature, this method is suitable for materials with low melting points.
  • High-frequency Induction Heating
    The evaporation material is placed in a crucible with a coil wound around it, and a high-frequency current is passed through the coil to generate a strong magnetic field. The current generated by the magnetic field and the heat generated by the electric heat resistance rapidly raise the temperature to vaporize the film material.
  • Laser Heating
    By irradiating the deposition material with a laser, high energy is supplied to vaporize the deposition material.

Plasma and molecular beam methods are also used as physical vapor deposition methods.

  • Molecular Beam Epitaxy (MBE)
    This method uses vacuum deposition in an ultra-high vacuum to align the vaporized molecules in the same direction, allowing for more precise control of film thickness and composition. The growth rate is slow and requires a high vacuum, making it unsuitable for larger equipment and poor for mass production.
  • Sputtering
    When an inert gas, such as argon, is injected into a vacuum and a voltage is applied to the electrode to cause a glow discharge, the plasmaized argon collides with the cathode, repelling atoms and molecules on the cathode. If the object to be deposited is placed on the anode, the repelled atoms are deposited on the surface. Ionization methods include direct current voltage (DC), radio frequency alternating current voltage (RF-AC), magnetrons, and ion beams.

2. Chemical Vapor Deposition (CVD)

Vacuum-Vapor-Deposition-Devices_蒸着装置-3

Chemical vapor deposition (CVD) is a method of forming films by depositing evaporation materials on an object using chemical reactions or other chemical methods. Typical methods include thermal CVD, optical CVD, plasma CVD, organometallic CVD, and atomic layer deposition (ALD).

  • Thermal CVD
    This method uses a resistively heated furnace to create high temperatures, through which raw material gases flow to induce chemical reactions to form thin films. Relatively uniform film thickness can be achieved.
  • Optical CVD
    This method uses ultraviolet lamps or laser beams to cause chemical reactions in a low-temperature process to form thin films. Since no ions are generated, there is little damage to the substrate.
  • Plasma CVD
    Plasma CVD is a method in which the reactivity of raw materials is increased by plasticizing them, causing a reaction to the evaporation target to form a film. High-quality films can be formed because thin films are formed at low temperatures. However, the equipment is expensive and maintenance is difficult.
  • Organometallic CVD
    This method uses an organometallic precursor of the metal to be vapor-deposited as a raw material, which reacts on the target to form a metallic thin film. This method is used for the mass production of LEDs and other devices because it can form films at high speed while precisely controlling film thickness.
  • Atomic Layer Deposition (ALD)
    By depositing and replacing multiple types of raw materials one at a time, the materials react in a controlled manner at a fixed location to form a thin film with a controlled structure and thickness.

In addition to the above, vacuum vapor deposition devices of various methods have been developed and are sold. It is necessary to select the appropriate equipment according to the application.

List of 9 Vacuum Vapor Deposition Device Manufacturers

*Including some distributors, etc.

Sort by Features

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  • Company Size: largest first
  • Year Founded: oldest first
  • Year Founded: earliest first

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  • Japan
  • Netherlands
    • SATO VAC INC.
      • Japan Address: 5-1-27, Oi, Shinagawa-ku, Tokyo, Japan

      Manufacturer Overview

      SATO VAC INC., established in 1932 and based in Tokyo, Japan, is a manufacturer of vacuum equipment including vacuum pumps, measuring instruments, and parts & components. Its production line is segmented into vacuum pumps, gauges, and equipment used in space development, semiconductors, energy, medical, optics, and automobile industries. The company's vacuum equipment includes compact CVD systems, vacuum defoamers, heat treatment furnaces, dryers, and evaporation systems. The company's production process involves structural designing, prototype creation, design review, and performance testing.

    • SHINKO SEIKI CO., LTD.
      • Japan Address: 1-35-3-chome, Takatsukadai, Nishi-ku, Kobe, Hyogo, Japan

      Manufacturer Overview

      SHINKO SEIKI CO., LTD., established in 1949, and located in Kobe, Japan, is a manufacturer of vacuum devices, electric furnaces and semiconductor manufacturing equipment. Its product line includes a vast array of vacuum pumps such as mechanical booster pumps, vacuum exhaust unit, oil sealed rotary vacuum pumps and water ring vacuum pumps. Its product range also inlcudes soldering equipments, optical inspection equipments, thin film forming equipments, and plasma processing equipments. The company holds several certification for its operation such as the ISO 14004, and the ISO 9001.

    • ULVAC KIKO, Inc.
      • Japan Address: 291-7, Chausubaru, Saito-City, Miyazaki, Japan

      Manufacturer Overview

      ULVAC KIKO, Inc., established in 1971 and headquartered in Miyazaki, Japan, is a manufacturer specializing in vacuum pumps and deposition systems. Its product portfolio encompasses oil-sealed rotary vacuum pumps, diaphragm type dry vacuum pumps, rocking piston type dry vacuum pumps, sliding vane type dry vacuum pumps, and high vacuum pumping systems. These products are vital for creating vacuum environments in industries like semiconductor manufacturing and flat panel display production. The company is known for its adherence to quality, holding ISO 9001 certification since 1997 and ISO 14001 certification since 2001.

    • ULVAC, Inc
      • Japan Address: 2500 Hagisono, Chigasaki, Kanagawa, Japan

      Manufacturer Overview

      Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, components, peripheral devices, and materials for the solar cell and semiconductor industries, among others. The company operates businesses in six areas, including materials, components, electronic devices, semiconductors, and flat panel display production equipment. Some of its products include roll coaters, semiconductor production equipment, LED production equipment, leak detectors, and vacuum brazing furnaces. It is ISO9001 certified, and its net sales in the 2022 fiscal year were 227.5 billion Japanese Yen, with 34% of this amount coming from semiconductor and electronic device production equipment.

    • PREMATEC Corporation
      • Japan Address: 11400-327 Aza Harayama, Tamagawa, Chino-City, Nagano, Japan

      Manufacturer Overview

      PREMATEC Corporation, established in 1962, is a manufacturer of equipment used in the production of LCDs based in Nagano, Japan. The company's product portfolio includes bonding, dispensing, slit coater, ambient lamination, and other related equipment. These products are critical in the manufacturing processes of flat panel displays, including LCDs. Additionally, the company is involved in designing and manufacturing special-purpose equipment. These machines are tailored for specific industrial applications. The company serves electronics manufacturers, OEMs, and industrial equipment manufacturers.

    • Microphase Co., Ltd.
      • Japan Address: 1147-9 Onigakubo, Tsukuba-city, Ibaraki, Japan

      Manufacturer Overview

      Microphase Co. Ltd., established in 1999 and headquartered in Ibaraki, Japan, is a manufacturer of nanotechnology products and energy device innovations. The company's products include high-dispersion CNT, long-length CNT, and various Carbon nanotubes (CNT) applications for energy storage and semiconductor devices. It offers sophisticated equipment like desk-top CVD systems for CNT synthesis and multi-purpose CVD Systems. It also provides specialized nanomaterial synthesis and analysis equipment in nanotechnology, energy, and environmental sectors.

    • SHOWA SHINKU CO., LTD.
      • Japan Address: 3062-10 Tana, Chuo-ku, Sagamihara-city, Kanagawa, Japan

      Manufacturer Overview

      Showa Shinku Co. Ltd., founded in 1953 and headquartered in Tokyo, Japan, is a manufacturer of vacuum equipment and components for quartz devices, optical thin films, and more. Its product line features vacuum evaporation equipment, sputtering equipment, ion plating equipment, atomic layer deposition equipment, and dry etching and ashing equipment. These products are integral to various manufacturing processes, particularly in the production of quartz devices, which hold significant importance in industrial applications.

Vacuum Vapor Deposition Device Manufacturer Ranking

*Including some distributors, etc.

Derivation Method

The ranking is calculated based on the click share within the vacuum vapor deposition device page as of April 2026. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.

Number of Employees

  1. ULVAC, Inc: 6,235
  2. SHOWA SHINKU CO., LTD.: 195
  3. Japan Create Co., Ltd.: 40

Newly Established Company

  1. Microphase Co., Ltd.: 1999 (27 years ago)
  2. Japan Create Co., Ltd.: 1963 (63 years ago)
  3. SHOWA SHINKU CO., LTD.: 1953 (73 years ago)

Company with a History

  1. SATO VAC INC.: 1932 (94 years ago)
  2. SHINKO SEIKI CO., LTD.: 1949 (77 years ago)
  3. PREMATEC Corporation: 1951 (75 years ago)

Global Distribution of Vacuum Vapor Deposition Device Manufacturers by Country

*Including some distributors, etc.

Country Number of Companies Share (%)
Japan Japan 8 88.9%
Netherlands Netherlands 1 11.1%

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List of Vacuum Vapor Deposition Device Products

136 products found - Page 2

136 products - Page 2

High-speed vacuum evaporation equipment VPC-1100-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

High-speed vacuum evaporation equipment VPC-1100

450+ people viewing

■Water-cooled oil diffusion pump (1,100L/sec) + oil rotary vacuum pump Necessary equipment such as oil diffusion pumps, oil rotary vacuum pumps, Pi...


Thin film forming device Road lock type vapor package device-SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Thin film forming device Road lock type vapor package device

290+ people viewing

Last viewed: 20 hours ago

Special specification for electronic devices. Specializes in special processes and devices, and is flexible regardless of the substrate shape or pr...

4 models listed

AAMF-C845SB-L-Thin film forming device Road lock type vapor package device
AAMF-C1065SB-L-Thin film forming device Road lock type vapor package device
AAMF-C1275SB-L-Thin film forming device Road lock type vapor package device
AAMF-C1260SB-M-Thin film forming device Road lock type vapor package device

Batch type high vacuum evaporation equipment ei series-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Batch type high vacuum evaporation equipment ei series

530+ people viewing

Last viewed: 1 day ago

■Summary The batch type high vacuum evaporation equipment ei series is an equipment for forming metal and oxide films on substrates. It is suitable...


Deposition controller for evaporation TMC-13-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Deposition controller for evaporation TMC-13

590+ people viewing

■Summary TMC-13 is a film thickness monitor compatible with standard 6MHz crystal resonators. It can be operated from the LCD touch panel and has a...


Roll-up vacuum evaporation equipment EW series-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Roll-up vacuum evaporation equipment EW series

630+ people viewing

■Summary This is a film deposition device that evaporates metals, oxides, etc. while continuously winding plastic film, paper, metal foil, etc. We ...


Organic vapor deposition cell KOD-Cell-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Organic vapor deposition cell KOD-Cell

590+ people viewing

Last viewed: 1 day ago

This product is a low-temperature cell (Organic Deposition Cell: KOD-Cell) that can operate stably at low temperatures for growing thin films of hi...

Price (without tax)

$ 3,120.00

Tabletop type/small vacuum evaporation equipment VPC-260F-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Tabletop type/small vacuum evaporation equipment VPC-260F

620+ people viewing

■Summary Adopts air-cooled diffusion pump (200L/sec) + oil rotary pump. Low-cost, compact vacuum evaporation equipment (resistance heating type). N...


Small vacuum evaporation equipment VFR-200M/ERH-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Small vacuum evaporation equipment VFR-200M/ERH

410+ people viewing

■Summary Adopts air-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipm...


Vacuum deposition equipment HSV series-Irie Co., Ltd.

Irie Co., Ltd.

Vacuum deposition equipment HSV series

460+ people viewing

■Summary Resistance heating compact vapor deposition equipment for research and development and small lot production. Some models in this series ca...


Small vacuum evaporation equipment VTR-060M/ERH-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Small vacuum evaporation equipment VTR-060M/ERH

400+ people viewing

■Summary This is a small, resistance-heating, low-cost vacuum evaporation device that compactly houses a turbomolecular pump and auxiliary pump ins...


Organic EL prototype device manufacturing equipment Organic vapor deposition source heat treatment cleaning equipment-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Organic EL prototype device manufacturing equipment Organic vapor deposition source heat treatment cleaning equipment

510+ people viewing

Last viewed: 1 day ago

■Features This equipment cleans organic vapor deposition sources for manufacturing elements such as organic EL, organic transistors, and organic th...


Metal evaporation cell Ternary metal evaporation cell KMDT-Cell-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Metal evaporation cell Ternary metal evaporation cell KMDT-Cell

460+ people viewing

Last viewed: 10 hours ago

■Features ・Compact and easy to use ・Easy maintenance ・Filament heating crucible configuration for electrical heating ・3 types of metal material...


Metal Deposition Cell Binary Metal Deposition Cell KMDW-Cell-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Metal Deposition Cell Binary Metal Deposition Cell KMDW-Cell

400+ people viewing

■Features ・Compact and easy to use ・Easy maintenance ・Filament heating crucible configuration for electrical heating ・Two types of metal materi...


Metal evaporation cell Single element evaporation simple cell KMDS-Cell-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Metal evaporation cell Single element evaporation simple cell KMDS-Cell

580+ people viewing

Last viewed: 7 hours ago

■Features ・Compact and easy-to-use vapor deposition source ・Easy maintenance ・Filament heating crucible configuration for electrical heating ・C...


Various power supplies/robot related EB gun for metal deposition EGN series-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Various power supplies/robot related EB gun for metal deposition EGN series

330+ people viewing

■Summary The EGN series is an electron beam evaporation source for metal deposition that was newly developed with a focus on improving maintainabil...


Metal vapor deposition cell KMD-Cell-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Metal vapor deposition cell KMD-Cell

480+ people viewing

■Features ・Compact and easy to use ・Crucible capacity is 10cc, wide range of uses ・Uniform crucible temperature ・Easy maintenance ・Excellent t...

Price (without tax)

$ 7,800.00

Power supply for organic vapor deposition cell (alternative model) KTC-15A-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Power supply for organic vapor deposition cell (alternative model) KTC-15A

420+ people viewing

Last viewed: 1 day ago

This power supply is a small AC power supply compatible with our organic vapor deposition cell KOD series. Power supply control is phase control us...

Price (without tax)

$ 2,080.00

Organic vapor deposition cell type II KOD-CellⅡ-Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.

Organic vapor deposition cell type II KOD-CellⅡ

460+ people viewing

Last viewed: 1 day ago

■Features ・Compact/space-saving design with ICF-70 ・Shutter mechanism standard equipment ・Temperature setting possible by ±0.1℃ ・The crucible i...

Price (without tax)

$ 4,420.00

Various power supplies/robot related EB gun for evaporation EGK/EGL/EGO series-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Various power supplies/robot related EB gun for evaporation EGK/EGL/EGO series

490+ people viewing

■Summary All of ULVAC's EB guns for electron beam evaporation use magnetic field deflection. In addition, the structure is designed to prevent cont...


Various power supplies/robot related optical EB gun EGP-1G-ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.

Various power supplies/robot related optical EB gun EGP-1G

250+ people viewing

■Summary EGP-1G is an electron beam evaporation source for optical film deposition that reduces costs by adopting a simple 180º beam deflection met...


Vacuum application equipment Small vacuum evaporation equipment-Fuji Inback Co., Ltd.

Fuji Inback Co., Ltd.

Vacuum application equipment Small vacuum evaporation equipment

300+ people viewing

Last viewed: 1 day ago

■Summary Space-saving type that uses inexpensive DP for the exhaust system


Vacuum application equipment Vacuum deposition equipment-Fuji Inback Co., Ltd.

Fuji Inback Co., Ltd.

Vacuum application equipment Vacuum deposition equipment

330+ people viewing

■Summary Compact vacuum evaporation equipment with two evaporation sources








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