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  4. Thin film forming device Road Rocks Patta ring device (SHINKO SEIKI CO., LTD.)

Thin film forming device Road Rocks Patta ring device
SHINKO SEIKI CO., LTD.

About This Product

It is a road rock -type sputtering device that realizes space. The maximum φ270 tray can be set as standard in the cassette room, and continuous sputtering can be performed. Characteristics of the product -The multilayer film can be formed because this unit has 3 yuan with a φ100mm cathode. ･ Achieves a film thickening of φ250mm in ± 10 % or less STL5111 / parallel flat plate type STL5311 / parallel flat plate type STL5321 / parallel flat plate type The transport room and the film forming room are always vacuumed, so it is a space -saving road lock -type sputter ring that can shorten the throughput. By adopting a touch panel, you can check the process in real time.

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    Thin film forming device Road Rocks Patta ring device

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0 Models of Thin film forming device Road Rocks Patta ring device

Image Part Number Price (excluding tax) Processing board Target / Cathode type Target / Size x number Sputta direction Base platform / rotation mechanism Base board / substrate heating Base platform / membrane thick distribution Base board / transport method Exhaust system / Achievement power Exhaust system / exhaust time Exhaust system / main pump Operation method / exhaust operation Operation method / film formation operation Sputta power supply / RF Spatta power supply / DC Gas introduction system

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About Company Handling This Product

SHINKO SEIKI CO., LTD.

Company Overview

SHINKO SEIKI CO., LTD., established in 1949, and located in Kobe, Japan, is a manufacturer of vacuum devices, ...

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  • Japan

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SHINKO SEIKI CO., LTD.

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