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Thin film forming device Road Rocks Patta ring deviceHandling Company
SHINKO SEIKI CO., LTD.Categories
Click on the part number for more information about each product
| Image | Part Number | Price (excluding tax) | Processing board | Target / Cathode type | Target / Size x number | Sputta direction | Base platform / rotation mechanism | Base board / substrate heating | Base platform / membrane thick distribution | Base board / transport method | Exhaust system / Achievement power | Exhaust system / exhaust time | Exhaust system / main pump | Operation method / exhaust operation | Operation method / film formation operation | Sputta power supply / RF | Spatta power supply / DC | Gas introduction system |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
STL5321 |
Available upon quote |
¢ 270mm tray x16 sheets |
Plena magnetron |
¢ 100mm x 3 |
down |
◯ |
500 ° C on the board stand |
Within ± 10%(¢ 210) |
Rθ robot |
2.0 x 10-⁵ PA or less |
5.0 x 10-⁴ PA within 20 minutes |
Turbo molecular pump |
Automatic |
Automatic |
500W |
3kw |
Two systems |
STL5111 |
Available upon quote |
¢ 270mm tray x 16 sheets |
RMC |
¢ 350mm x 1 |
up |
option |
500 ° C on the board stand |
Within ± 5%(¢ 200) |
Rθ robot |
2.0 x 10-⁵ PA or less |
5.0 x 10-⁴ PA within 20 minutes |
Cry -pump |
Automatic |
Automatic |
option |
15kW |
Two systems |
|
STL5311 |
Available upon quote |
¢ 100mm wafer x 3 sheets |
Plena magnetron |
¢ 100mm x 3 |
up |
◯ |
500 ° C on the board stand |
Within ± 10%(¢ 90) |
Elastic arm |
2.0 x 10-⁵ PA or less |
5.0 x 10-⁴ PA within 20 minutes |
Cry -pump |
Automatic |
Automatic |
500W |
3kw |
Two systems |
Click on the part number for more information about each product
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Reviews shown here are reviews of companies.
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