This product is registered by SHINKO SEIKI CO., LTD..
About This Product
EXAM is a multipurpose plasma etching device that can handle multiple purposes that make use of the know -how of semiconductor product devices.
Multi -processing is possible in the same chamber such as etching and assessing by switching gas and plasma mode.
Product features
･ Batch plasma etching device with a 250mm processing stage
･ Compatible not only for silicon, oxide membrane, and nitride film but also for quartz etching
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