All Categories
History
Product
Multi PVD Silam Memorial <Dash Series>Handling Company
NanotechCategories
Click on the part number for more information about each product
| Image | Part Number | Price (excluding tax) | v | Effective area (mm) | Board holder | Installed discharge system | Achievement pressure | Exhaust speed | Board heating mechanism | Board bias | Device control | Exhaust system | Need for power | Installation area (M) | Cooling water | Compressed air |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
Dash-500 |
Available upon quote |
500W x 500W x 600H |
φ200 × 200L |
Self -open type (custom -made production according to product shape) |
・ DLC ion source (ionized vapor source), HCD gun, sputtering arc, EB gun, ion injection source |
6.7E-4PA or less |
Within 30 minutes to 6.7E-3PA |
Options (sheath heaters, lamp heaters, etc.) |
MAX3,000V500MA |
Completely automatic driving with recipe screen setting * Excludes some complex types |
Turbo molecular pump + rotary pump |
3φ200V15KVA ~ |
2.5W x 3.0D x 2.5H |
3kgf/CM220L -40L/min |
6kgf/cm2 or higher |
|
|
Dash-800 |
Available upon quote |
φ800 × 650H |
φ500 × 200L |
Self -open type (custom -made production according to product shape) |
・ DLC ion source (ionized vapor source), HCD gun, sputtering arc, EB gun, ion injection source |
6.7E-4PA or less |
Within 30 minutes to 6.7E-3PA |
Options (sheath heaters, lamp heaters, etc.) |
MAX3,000V500MA |
Completely automatic driving with recipe screen setting * Excludes some complex types |
Turbo molecular pump + rotary pump |
3φ200V25KVA ~ |
3.0W x 4.0D x 2.5H |
3kgf/CM220L -40L/min |
6kgf/cm2 or higher |
|
|
DASH-1000 |
Available upon quote |
φ1000 × 900H |
φ600 × 500L |
Self -open type (custom -made production according to product shape) |
・ DLC ion source (ionized vapor source), HCD gun, sputtering arc, EB gun, ion injection source |
6.7E-4PA or less |
Within 30 minutes to 6.7E-3PA |
Options (sheath heaters, lamp heaters, etc.) |
MAX3,000V500MA |
Completely automatic driving with recipe screen setting * Excludes some complex types |
Turbo molecular pump + rotary pump |
3φ200V30KVA ~ |
4.0W x 4.0D x 2.5H |
3kgf/CM220L -40L/min |
6kgf/cm2 or higher |
Click on the part number for more information about each product
Reviews shown here are reviews of companies.
Reviews shown here are reviews of companies.
