Dash-500 | Multi PVD Silam Memorial <Dash Series>
Nanotech
Price (excluding tax)
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Achievement pressure
Board bias
Board heating mechanism
Board holder
Compressed air
Cooling water
Device control
Effective area (mm)
Exhaust speed
Exhaust system
Installation area (M)
Installed discharge system
Need for power
v
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Part Number
Dash-500
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Handling Company
Nanotech
Multi PVD Silam Memorial <Dash Series> Dash-500's performance table
Items marked with have different values depending on the model number.
| Product Image | Price (excluding tax) | Achievement pressure | Board bias | Board heating mechanism | Board holder | Compressed air | Cooling water | Device control | Effective area (mm) | Exhaust speed | Exhaust system | Installation area (M) | Installed discharge system | Need for power | v |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
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Available upon quote | 6.7E-4PA or less | MAX3,000V500MA | Options (sheath heaters, lamp heaters, etc.) | Self -open type (custom -made production according to product shape) | 6kgf/cm2 or higher | 3kgf/CM220L -40L/min | Completely automatic driving with recipe screen setting * Excludes some complex types | φ200 × 200L | Within 30 minutes to 6.7E-3PA | Turbo molecular pump + rotary pump | 2.5W x 3.0D x 2.5H | ・ DLC ion source (ionized vapor source), HCD gun, sputtering arc, EB gun, ion injection source | 3φ200V15KVA ~ | 500W x 500W x 600H |
There are 3 models for this product.
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