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Response Rate
100.0%
Response Time
120.0hours
Product
Vacuum Plasma Etcher CPE-B seriesHandling Company
SAKIGAKE-SemiconductorCategories
Click on the part number for more information about each product
Image | Part Number | Price (excluding tax) | External dimensions | Stage dimensions | Processing pressure adjustment | Vacuum gauge | Gas system | power supply | remarks |
---|---|---|---|---|---|---|---|---|---|
CPE-100B |
Available upon quote |
392mm (W) x 500mm (d) x 1,050mm (h) (not included, upper lid closing time), 850mm (W) x 900mm (d) x 1,050mm (without protrusions. |
Diameter 100mm, diameter 400mm |
Manual adjustment by manual exhaust valve and gas introduced |
Analog display Pirani vacuum |
One system |
Single-phase 100V, 15A (50Hz/60Hz) model CPE-400B, single-phase 100V, 30A (50Hz/60Hz) |
- | |
CPE-1000B |
Available upon quote |
1,600mm (W) x 1.600mm (d) x 1,100mm (H) (not included, close lid closing) |
Diameter 1,000mm |
Manual adjustment by manual exhaust valve and gas introduced |
Analog display Pirani vacuum |
One system |
Single phase 200V, 30A (50Hz/60Hz) |
* Vacuum pumps are sold separately. In addition, we accept specification changes separately. |
Click on the part number for more information about each product
Reviews shown here are reviews of companies.
Reviews shown here are reviews of companies.
Response Rate
100.0%
Response Time
120.0hrs