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This section provides an overview for vacuum vapor deposition devices as well as their applications and principles. Also, please take a look at the list of 9 vacuum vapor deposition device manufacturers and their company rankings. Here are the top-ranked vacuum vapor deposition device companies as of January, 2025: 1.ST Instruments B.V, 2.SATO VAC INC., 3.ULVAC, Inc.
Table of Contents
A vacuum vapor deposition device is a device that forms a film on an object by vaporizing a substance under reduced pressure.
A vacuum vapor deposition device can form a smooth coating on an object, and the thickness and composition of the coating can be controlled.
Vacuum vapor deposition devices can form films of various materials, including metallic materials, such as aluminum and organic/inorganic materials.
Vacuum vapor deposition devices are used for the following applications:
A rotary pump or turbomolecular pump is used to depressurize the chamber, vaporize the material to be deposited, and deposit it on the object at a distance. The reduced pressure removes impurities from the chamber and improves the diffusion of the vaporized material to produce a smooth film with good adhesion.
Plating is a well-known method of forming a film on the surface of a material. The difference is in plating, raw materials are supplied from the liquid phase, whereas in vapor deposition, raw materials are supplied from the gas phase.
Deposition methods used in vacuum vapor deposition devices can be divided into two types according to the method used to vaporize the substance: physical vapor deposition (PVD) and chemical vapor deposition (CVD).
Physical vapor deposition (PVD) is a method of forming films by vaporizing or sublimating evaporation materials through physical means, such as heating. Heating methods include electron beam, resistance heating, high-frequency induction, and laser.
Plasma and molecular beam methods are also used as physical vapor deposition methods.
Chemical vapor deposition (CVD) is a method of forming films by depositing evaporation materials on an object using chemical reactions or other chemical methods. Typical methods include thermal CVD, optical CVD, plasma CVD, organometallic CVD, and atomic layer deposition (ALD).
In addition to the above, vacuum vapor deposition devices of various methods have been developed and are sold. It is necessary to select the appropriate equipment according to the application.
*Including some distributors, etc.
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SATO VAC INC., established in 1932 and based in Tokyo, Japan, is a manufacturer of vacuum equipment including vacuum pumps, measuring instruments, and parts & components. Its production line is segmented into vacuum pumps, gauges, and equipment used in space development, semiconductors, energy, medical, optics, and automobile industries. The company's vacuum equipment includes compact CVD systems, vacuum defoamers, heat treatment furnaces, dryers, and evaporation systems. The company's production process involves structural designing, prototype creation, design review, and performance testing.
SHINKO SEIKI CO., LTD., established in 1949, and located in Kobe, Japan, is a manufacturer of vacuum devices, electric furnaces and semiconductor manufacturing equipment. Its product line includes a vast array of vacuum pumps such as mechanical booster pumps, vacuum exhaust unit, oil sealed rotary vacuum pumps and water ring vacuum pumps. Its product range also inlcudes soldering equipments, optical inspection equipments, thin film forming equipments, and plasma processing equipments. The company holds several certification for its operation such as the ISO 14004, and the ISO 9001.
ULVAC KIKO, Inc., established in 1971 and headquartered in Miyazaki, Japan, is a manufacturer specializing in vacuum pumps and deposition systems. Its product portfolio encompasses oil-sealed rotary vacuum pumps, diaphragm type dry vacuum pumps, rocking piston type dry vacuum pumps, sliding vane type dry vacuum pumps, and high vacuum pumping systems. These products are vital for creating vacuum environments in industries like semiconductor manufacturing and flat panel display production. The company is known for its adherence to quality, holding ISO 9001 certification since 1997 and ISO 14001 certification since 2001.
Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, components, peripheral devices, and materials for the solar cell and semiconductor industries, among others. The company operates businesses in six areas, including materials, components, electronic devices, semiconductors, and flat panel display production equipment. Some of its products include roll coaters, semiconductor production equipment, LED production equipment, leak detectors, and vacuum brazing furnaces. It is ISO9001 certified, and its net sales in the 2022 fiscal year were 227.5 billion Japanese Yen, with 34% of this amount coming from semiconductor and electronic device production equipment.
PREMATEC Corporation, established in 1962, is a manufacturer of equipment used in the production of LCDs based in Nagano, Japan. The company's product portfolio includes bonding, dispensing, slit coater, ambient lamination, and other related equipment. These products are critical in the manufacturing processes of flat panel displays, including LCDs. Additionally, the company is involved in designing and manufacturing special-purpose equipment. These machines are tailored for specific industrial applications. The company serves electronics manufacturers, OEMs, and industrial equipment manufacturers.
Microphase Co. Ltd., established in 1999 and headquartered in Ibaraki, Japan, is a manufacturer of nanotechnology products and energy device innovations. The company's products include high-dispersion CNT, long-length CNT, and various Carbon nanotubes (CNT) applications for energy storage and semiconductor devices. It offers sophisticated equipment like desk-top CVD systems for CNT synthesis and multi-purpose CVD Systems. It also provides specialized nanomaterial synthesis and analysis equipment in nanotechnology, energy, and environmental sectors.
Showa Shinku Co. Ltd., founded in 1953 and headquartered in Tokyo, Japan, is a manufacturer of vacuum equipment and components for quartz devices, optical thin films, and more. Its product line features vacuum evaporation equipment, sputtering equipment, ion plating equipment, atomic layer deposition equipment, and dry etching and ashing equipment. These products are integral to various manufacturing processes, particularly in the production of quartz devices, which hold significant importance in industrial applications.
Ranking as of January 2025
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | ST Instruments B.V |
22.9%
|
| 2 | SATO VAC INC. |
22.9%
|
| 3 | ULVAC, Inc |
12.5%
|
| 4 | PREMATEC Corporation |
8.3%
|
| 5 | Microphase Co., Ltd. |
8.3%
|
| 6 | ULVAC KIKO, Inc. |
8.3%
|
| 7 | SHINKO SEIKI CO., LTD. |
8.3%
|
| 8 | SHOWA SHINKU CO., LTD. |
6.3%
|
| 9 | Japan Create Co., Ltd. |
2.1%
|
Derivation Method
The ranking is calculated based on the click share within the vacuum vapor deposition device page as of January 2025. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
Newly Established Company
Company with a History
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
|
Japan
|
8 | 88.9% |
Netherlands
|
1 | 11.1% |
83 products found - Page 3
83 products - Page 3
ULVAC Sales Co., Ltd.
110+ people viewing
Last viewed: 13 hours ago
■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipment such ...
ULVAC Sales Co., Ltd.
100+ people viewing
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■Summary This is a small, resistance-heating, low-cost vacuum evaporation device that compactly houses a turbomolecular pump and auxiliary pump ins...
ULVAC Sales Co., Ltd.
60+ people viewing
Last viewed: 12 hours ago
■Summary Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipment such ...
ULVAC Sales Co., Ltd.
80+ people viewing
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■Summary Adopts water-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equi...
ULVAC Sales Co., Ltd.
50+ people viewing
■Summary Adopts air-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipm...
ULVAC Sales Co., Ltd.
100+ people viewing
Last viewed: 13 hours ago
■Summary Adopts air-cooled diffusion pump (200L/sec) + oil rotary pump. Low-cost, compact vacuum evaporation equipment (resistance heating type). N...
ULVAC Sales Co., Ltd.
90+ people viewing
Last viewed: 2 hours ago
■Summary This equipment is intended for vacuum distillation processing. It is possible to distill highly heat-sensitive substances (substances that...
ULVAC Sales Co., Ltd.
100+ people viewing
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■Summary The EGN series is an electron beam evaporation source for metal deposition that was newly developed with a focus on improving maintainabil...
Japan Create Co., Ltd.
240+ people viewing
5.0 Company Review
2 models listed
Atotech Co., Ltd.
30+ people viewing
Last viewed: 14 hours ago
SPUTTER ION SOURCE The control power supply for the 3KV ion gun (SIG030) has an auto-emission mechanism and is a stable ion source.
