Fuji Inback Co., Ltd.'s Vacuum Pumps

■Application ・Load lock chamber ・Transfer chamber ・Semiconductor manufacturing ■Features Designed to be installed directly on the tool or facto...

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• Vacuum Pumps

■Application ·etching ・Implant ・PVD ■Features A3P series dry pumps have an internal structure that is resistant to corrosive gases and are equip...

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• Vacuum Pumps

■Application ·etching ・PECVD ・SACVD ・ALD ・Solar power generation ·LED ■Features A4H series dry pumps have high gas throughput and improved pow...

• Pumps

• Vacuum Pumps

■Application ·etching ・PECVD ・SACVD ・ALD ・Solar power generation ·LED ■Features A4H series dry pumps have high gas throughput and improved pow...

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• Vacuum Pumps

■Application ·etching ・PECVD ・SACVD ・ALD ・Solar power generation ·LED ■Features With all the technical advantages of the A4H and A4X series, t...

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• Vacuum Pumps

■Application ・Coating industry ・R&D ・Freeze drying ■Features Ideal for industrial and R&D applications as well as where particulate or oil cont...

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• Vacuum Pumps

■Application ・ALD ・Epitaxial growth ・EUV ・Solar power generation (a-Si, µSi PECVD, etc.) ・LED (MOCVD GaN etc.) ■Features One of the biggest a...

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• Vacuum Pumps

■Application ・Surface observation ・Leak detector (back pump) ・Plasma cleaning ・Vacuum coating ・Cryopump regeneration ■Features A mechanism wi...

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• Vacuum Pumps

■Application ・Glass coating ・Semiconductor process ・Flat panel display manufacturing (LED/OLED) ・Load lock application ・Solar power generation...

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• Vacuum Pumps

■Summary Intelligent high performance roots pump for low and medium vacuum applications. Intelligent and flexible The innovative HiLobe® series Roo...

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• Vacuum Pumps

■Application ·analysis ・Surface observation ·the study ■Features ・Top-level basic performance (pumping speed, light gas compression ratio) ・Use...

• Pumps

• Vacuum Pumps

■Application ·coating ・Semiconductor process ・Electron beam welding ■Features ・Kepla® coating applied to pump rotor ・High pumping speed for bo...

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• Vacuum Pumps

■Application ・Ion implantation ■Features ・Specialized for light gas exhaust ・High durability achieved by nickel coated rotor ・Temperature cont...

• Pumps

• Vacuum Pumps

■Application ·analysis ・Surface observation ·the study ■Features ・Industry's highest class H2 compression ratio (1×107 *For HiPace300H) ・Specia...

• Pumps

• Vacuum Pumps

■Application ・High-end electron microscope ・Residual gas analysis ・Optical coating ・Plasma research ・Biotechnology ・Medical technology ・Semi...

• Pumps

• Vacuum Pumps

■Application ·coating ・Semiconductor process ・Electron beam welding ■Features ・Kepla® coating applied to pump rotor ・Can be installed in any d...

• Pumps

• Vacuum Pumps

■Application ·analysis ・Surface observation ·the study ■Features ・Low vibration ・Low leakage magnetic field ・Ideal for analysis equipment such...

• Pumps

• Vacuum Pumps

■Application ・Radiation environment ・High magnetic field environment ■Features By separating the electronic unit from the pump body, it is ideal...

• Pumps

• Vacuum Pumps

■Application ·analysis ・Surface observation ·the study ■Features ・Approximately 20% vibration reduction due to laser balancing (compared to prev...

• Pumps

• Vacuum Pumps

■Summary Heavy-duty OktaLine® pumps offer pumping speeds ranging from 145 to 27,400 m3/h. Due to natural cooling, operating costs are significantly...

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• Vacuum Pumps

■Summary ATEX-certified magnetic coupling pump according to Directive 2014/34/EU meeting the highest level of explosion protection requirements for...

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• Vacuum Pumps

■Summary This is a gas circulation cooling Roots pump, which is a special version of the conventional Roots pump. Achieves pumping speeds of 250 to...

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• Vacuum Pumps

■Summary Roots pump pumping systems offer high pumping speeds, especially in the transition range between low and medium vacuum. CombiLine™ is a wi...

• Pumps

• Vacuum Pumps