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ULVAC, Inc's Vacuum Pumps

ULVAC, Inc

66 products found

ULVAC, Inc

Oil diffusion pump BW-02

70+ people viewing

Last viewed: 1 hour ago

Prevents backflow of oil vapor from the oil diffusion pump to the intake side. ■Features ・Protects the inside of the vacuum container from steam ...

ULVAC, Inc

Multistage roots type dry vacuum pump CR

160+ people viewing

Last viewed: 9 hours ago

The dry vacuum pump CR series VerB is an air-cooled roots-type dry vacuum pump that has obtained international standards (CE, cTUVus). No oil is us...

ULVAC, Inc

Diaphragm type dry vacuum pump standard type (2 stage type) DA-121D

80+ people viewing

Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standard type dry vacuum pump with ...

ULVAC, Inc

Diaphragm type dry vacuum pump standard type (2 stage type) DA-15D

80+ people viewing

Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features ・Standard type dry vacuum p...

ULVAC, Inc

Diaphragm type dry vacuum pump standard type (2 stage type) DA-20D

80+ people viewing

Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standard type dry vacuum pump with ...

ULVAC, Inc

Diaphragm type dry vacuum pump standard type (2 stage type) DA-30D

100+ people viewing

Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standard type of dry vacuum pump wi...

ULVAC, Inc

Diaphragm type dry vacuum pump standard type (2 stage type) DA-41D

70+ people viewing

Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standard type dry vacuum pump with ...

ULVAC, Inc

Diaphragm type dry vacuum pump standard type (2 stage type) DA-60D

80+ people viewing

Last viewed: 1 day ago

Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standard type dry vacuum pump with ...

ULVAC, Inc

Diaphragm type dry vacuum pump standard type (2 stage type) DAL-181D

80+ people viewing

Standard type/Two-stage exhaust system/Built-in thermal protector/With input terminal block (no cord) ■Features ・Standard type dry vacuum pump wi...

ULVAC, Inc

Diaphragm type dry vacuum pump standard type (2 stage type) DAP-6D

100+ people viewing

Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features ・Standard type dry vacuum p...

ULVAC, Inc

Diaphragm type dry vacuum pump standard type (2 stage type) DAP-9D-DC24

80+ people viewing

Last viewed: 11 hours ago

Standard type/Two-stage exhaust system/With lock protection/overcurrent protection function/Equipped with DC motor ■Features ・Standard type of dr...

ULVAC, Inc

Diaphragm type dry vacuum pump standard type (2 stage type) DAT-50D

80+ people viewing

Last viewed: 7 hours ago

Standard type / 2-stage exhaust system / Built-in thermal protector / Motor lead wire crimp terminal included ■Features ・Standard type dry vacuum...

ULVAC, Inc

Scroll type dry vacuum pump DIS-252

180+ people viewing

Last viewed: 9 hours ago

This is a vacuum pump that performs evacuation by eccentrically moving a spiral wall (driven scroll) facing a fixed spiral wall (fixed scroll). ■F...

ULVAC, Inc

Scroll type dry vacuum pump DIS-501

130+ people viewing

Last viewed: 9 hours ago

Double wrap type/Built-in thermal protector (for single phase)/With input terminal block (no cord) ■Features ・Large displacement and compact size...

ULVAC, Inc

Scroll type dry vacuum pump DIS-90

140+ people viewing

Last viewed: 1 day ago

Double wrap type/Built-in thermal protector/With input terminal block (no cord)/With switch ■Features ・Large displacement and compact size. ・Hig...

ULVAC, Inc

Scroll type dry vacuum pump DISL-102

140+ people viewing

Single wrap type/Built-in thermal protector/With input terminal block (no cord)/With switch ■Features ・Large displacement and compact size. - Vac...

ULVAC, Inc

Scroll type dry vacuum pump DISL-503

150+ people viewing

Last viewed: 9 hours ago

Single wrap type/with input terminal block (no cord) ■Features ・Large displacement and compact size. - Vacuum pump that is resistant to high humi...

ULVAC, Inc

Oscillating piston type dry vacuum pump DOP-120SY

140+ people viewing

Last viewed: 9 hours ago

Standard type/1 stage exhaust system/Built-in thermal protector ■Features ・Large displacement and compact size. ・Dry type vacuum pump that does ...

ULVAC, Inc

Oscillating piston type dry vacuum pump DOP-181SA

110+ people viewing

Last viewed: 1 day ago

Standard type/1-stage exhaust method/Built-in thermal protector/Power cord (discrete end) ■Features ・Large displacement and compact size. ・Dry t...

ULVAC, Inc

Oscillating piston type dry vacuum pump DOP-301SB

120+ people viewing

Last viewed: 1 day ago

Standard type/Single-stage exhaust system/Built-in thermal protector/With input terminal block (no cord) ■Features ・Large displacement and compac...

ULVAC, Inc

Oscillating piston type dry vacuum pump DOP-400SB

100+ people viewing

Standard type/Single-stage exhaust system/Built-in thermal protector/With input terminal block (no cord) ■Features ・Large displacement and compac...

ULVAC, Inc

Oscillating piston type dry vacuum pump DOP-40D

110+ people viewing

Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord (disassembled end) ■Features ・Large displacement and compact size. ...

ULVAC, Inc

Oscillating piston type dry vacuum pump DOP-80S

110+ people viewing

Standard type/1-stage exhaust system/Built-in thermal protector/Power cord (disassembled end) ■Features ・Large displacement and compact size. ・D...

ULVAC, Inc

Oscillating piston type dry vacuum pump DOP-80SP

130+ people viewing

Last viewed: 9 hours ago

Pressure-only type/1-stage exhaust method/Built-in thermal protector/Power cord (disassembled end) ■Features ・Large displacement and compact size...

ULVAC, Inc

Oil diffusion pump DPF-050

120+ people viewing

Last viewed: 1 day ago

This is a vacuum pump that evacuates by ejecting heated oil that becomes steam from a jet section at supersonic speed. Air-cooled type that does no...

ULVAC, Inc

Oil diffusion pump DPF-200

120+ people viewing

Last viewed: 9 hours ago

This is a vacuum pump that evacuates by ejecting heated oil that becomes steam from a jet section at supersonic speed. Air-cooled type that does no...

ULVAC, Inc

Rotary vane dry vacuum pump DSB-151

90+ people viewing

Last viewed: 1 day ago

Standard type/1 stage exhaust method/with input terminal block (no cord) ■Features ・Large displacement and compact size. ・The position of the in...

ULVAC, Inc

Rotary vane dry vacuum pump DSB-251

60+ people viewing

Last viewed: 1 day ago

Standard type/1 stage exhaust method/with input terminal block (no cord) ■Features ・Large displacement and compact size. ・The position of the in...

ULVAC, Inc

Rotary vane dry vacuum pump DSB-451

70+ people viewing

Last viewed: 1 day ago

Standard type/1 stage exhaust method/with input terminal block (no cord) ■Features ・Large displacement and compact size. ・The position of the in...

ULVAC, Inc

Rotary vane dry vacuum pump DSB-602

90+ people viewing

Last viewed: 1 day ago

Standard type/1 stage exhaust method/with input terminal block (no cord) ■Features ・Large displacement and compact size. ・The position of the in...

ULVAC, Inc

Multi-stage roots type dry vacuum pump ECO-SHOCK

170+ people viewing

Last viewed: 9 hours ago

ECO-SHOCK is an innovative attachment that allows you to significantly save energy by attaching it to your current dry vacuum pump. ■Features Cont...

ULVAC, Inc

Multi-stage roots type dry vacuum pump GR

160+ people viewing

The dry vacuum pump GR series is a simple pump designed for general industry, based on the proven and reliable LR and HR series. ■Features ・Can b...

ULVAC, Inc

Sputter ion pump GST-07L-B

80+ people viewing

Last viewed: 1 day ago

A multi-functional sputter ion pump control equipped with a CPU. Features ■Small and lightweight Multi-functionality with built-in CPU. This one u...

ULVAC, Inc

Oil rotary vacuum pump Gv135

90+ people viewing

Two-stage exhaust system / With backflow prevention mechanism / With gas ballast mechanism / Built-in thermal protector / With switch / Input termi...

ULVAC, Inc

Multistage roots type dry vacuum pump HR

160+ people viewing

Last viewed: 9 hours ago

By uniformly heating the pump body in a high-temperature region, the pump is able to exhaust sublimable exhaust substances generated during CVD, et...

ULVAC, Inc

Multistage roots type dry vacuum pump LR

150+ people viewing

Last viewed: 9 hours ago

By uniformly heating the pump body in a low-temperature range, this pump is ideal for PVD processes as well as for exhausting loading and unloading...

ULVAC, Inc

Screw type dry vacuum pump LS

200+ people viewing

Last viewed: 4 hours ago

The LS series is a vacuum pump classified as a screw type dry vacuum pump. Conventionally, increasing the pumping speed required a lot of power, bu...

ULVAC, Inc

Mechanical booster pump MBS-053

100+ people viewing

Last viewed: 1 day ago

■Features This is a small type of roots type vacuum pump. It is possible to significantly increase the pumping speed in the pressure range where th...

ULVAC, Inc

Screw type dry vacuum pump MS

200+ people viewing

Last viewed: 1 hour ago

The MS series is a vacuum pump classified as a screw type dry vacuum pump. This is a process-resistant dry vacuum pump based on the conventional LS...

ULVAC, Inc

Oil diffusion pump PBL

80+ people viewing

Last viewed: 16 hours ago

ULVAC's PBL type oil diffusion ejector pump is a diffusion pump that can increase pumping speed in the medium vacuum region. It is resistant to for...

ULVAC, Inc

Oil diffusion pump PFL

110+ people viewing

Last viewed: 1 day ago

ULVAC's PFL type oil diffusion pumps are designed and manufactured by taking advantage of many years of research and abundant manufacturing experie...

ULVAC, Inc

Oil rotary vacuum pump PKS

110+ people viewing

The PKS series is a swinging piston type belt-driven oil rotary vacuum pump.It is a robust oil rotary vacuum pump with stable exhaust characteristi...

ULVAC, Inc

Mechanical booster pump PMB-C

120+ people viewing

Last viewed: 11 hours ago

The large PMB series is a belt-driven low-speed mechanical booster pump. In combination with a robust rocking piston type oil rotary vacuum pump, i...

ULVAC, Inc

Mechanical booster pump PMB-D

120+ people viewing

Last viewed: 9 hours ago

■General-purpose mechanical booster pump PMB series Ver.D is a general-purpose mechanical booster pump. Surface treatment and atmospheric pressure ...

ULVAC, Inc

Mechanical booster pump PRC

100+ people viewing

Last viewed: 55 minutes ago

The PRC series is a mechanical booster pump designed primarily for use in semiconductor and liquid crystal manufacturing processes that require par...

ULVAC, Inc

Sputter ion pump PST

140+ people viewing

Last viewed: 9 hours ago

This pump utilizes the getter action of sputtered activated titanium to enhance pumping characteristics in ultra-high vacuum areas. By optimizing t...

ULVAC, Inc

Oil rotary vacuum pump PVD

90+ people viewing

The PVD series is a rotary vane type (two-stage) belt-driven oil rotary vacuum pump.It is a belt-driven oil rotary vacuum pump that has been used b...

ULVAC, Inc

Multistage roots type dry vacuum pump RDA-281H

120+ people viewing

Last viewed: 4 hours ago

■Features ・Achieving performance equivalent to dry oil rotary vacuum pumps. ・Can be operated in all pressure ranges from atmospheric pressure to ...

ULVAC, Inc

Multistage roots type dry vacuum pump RDA-501H

70+ people viewing

Last viewed: 12 hours ago

6-stage exhaust system/built-in thermostat ■Features ・Achieving performance equivalent to dry oil rotary vacuum pumps. ・Can be operated in all p...

ULVAC, Inc

Multistage roots type dry vacuum pump RS

160+ people viewing

A silencer exclusively for dry pumps. Exhaust noise can be reduced. ■Features ・Excellent sound deadening effect. - Can be connected to the pump e...

ULVAC, Inc

Scroll type dry vacuum pump SGT-100

150+ people viewing

Last viewed: 9 hours ago

■Features ・A filter that can be used for vacuum pumps used in various vacuum devices. -Can be installed on either the vacuum side or the exhaust s...

ULVAC, Inc

Scroll type dry vacuum pump SGT-200

150+ people viewing

■Features ・A filter that can be used for vacuum pumps used in various vacuum devices. -Can be installed on either the vacuum side or the exhaust s...

ULVAC, Inc

Oil rotary vacuum pump TM201

140+ people viewing

Last viewed: 9 hours ago

This is a trap that collects oil smoke exhausted from an oil rotary vacuum pump. A clean work environment can be achieved without polluting indoor ...

ULVAC, Inc

Oil rotary vacuum pump TM401

120+ people viewing

Last viewed: 9 hours ago

This is a trap that collects oil smoke exhausted from an oil rotary vacuum pump. A clean work environment can be achieved without polluting indoor ...

ULVAC, Inc

Oil rotary vacuum pump TMX-1

100+ people viewing

Last viewed: 1 day ago

This is a trap that collects oil smoke exhausted from an oil rotary vacuum pump. A clean work environment can be achieved without polluting indoor ...

ULVAC, Inc

Oil diffusion pump ULK

130+ people viewing

Last viewed: 9 hours ago

ULVAC's ULK type oil diffusion pump is a high vacuum pump that is compact and designed with large critical back pressure. It is widely used from re...

ULVAC, Inc

Multistage roots type dry vacuum pump UR

170+ people viewing

Last viewed: 1 minute ago

By uniformly heating the pump body in a high-temperature region, the pump is able to exhaust sublimable exhaust substances generated during CVD, et...

ULVAC, Inc

Turbomolecular pump UTM-MI

170+ people viewing

Last viewed: 9 hours ago

A turbo molecular pump with integrated controller that uses magnetic bearings. By integrating the pump body and controller, wiring and space saving...

ULVAC, Inc

Turbomolecular pump UTM-MS

150+ people viewing

Last viewed: 9 hours ago

This is a turbo molecular pump with a separate controller that uses magnetic bearings. We have a lineup of models with pumping speeds of 300 to 4,0...

ULVAC, Inc

Turbo molecular pump UTM-B

180+ people viewing

Last viewed: 9 hours ago

This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrating the controller and pump. E...

ULVAC, Inc

Oil rotary vacuum pump VD Ver.C

90+ people viewing

Last viewed: 1 day ago

The VD series Ver.C is a rotary vane type (2 stage) direct drive oil rotary vacuum pump. The two-stage rotary vane structure allows for good ultima...

ULVAC, Inc

Oil rotary vacuum pump VS1501/VS2401

100+ people viewing

VS1501/VS2401 is a rotary vane type (single stage) oil rotary vacuum pump. Water cooling and forced lubrication system provide stable exhaust perfo...

ULVAC, Inc

Oil rotary vacuum pump VS300A-W

100+ people viewing

Last viewed: 1 day ago

VS300A-W is a rotary vane type (single stage) oil rotary vacuum pump. With the smallest footprint in its class, it is now possible to directly moun...

ULVAC, Inc

Oil rotary vacuum pump VS650B / VS750B

100+ people viewing

Last viewed: 20 hours ago

VS650B/VS750B is a rotary vane type (single stage) oil rotary vacuum pump. In addition to being able to choose between air cooling and water coolin...

ULVAC, Inc

Turbomolecular pump YTP-B

140+ people viewing

Last viewed: 9 hours ago

YTP series Ver.B is a high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. Evacuation from atmospheric pressure ...

ULVAC, Inc

Turbo molecular pump YTP70A

140+ people viewing

Last viewed: 9 hours ago

This is a desktop high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. In consideration of the desktop usage env...


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