ULVAC, Inc's Vacuum Pumps

Prevents backflow of oil vapor from the oil diffusion pump to the intake side. ■Features ・Protects the inside of the vacuum container from steam ...

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The dry vacuum pump CR series VerB is an air-cooled roots-type dry vacuum pump that has obtained international standards (CE, cTUVus). No oil is us...

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Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standard type dry vacuum pump with ...

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Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features ・Standard type dry vacuum p...

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Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standard type dry vacuum pump with ...

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• Vacuum Pumps

Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standard type of dry vacuum pump wi...

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• Vacuum Pumps

Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standard type dry vacuum pump with ...

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• Vacuum Pumps

Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord with plug/With switch ■Features ・Standard type dry vacuum pump with ...

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Standard type/Two-stage exhaust system/Built-in thermal protector/With input terminal block (no cord) ■Features ・Standard type dry vacuum pump wi...

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Standard type/Two-stage exhaust system/Built-in thermal protector/Power supply with plug (with switch) cord ■Features ・Standard type dry vacuum p...

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Standard type/Two-stage exhaust system/With lock protection/overcurrent protection function/Equipped with DC motor ■Features ・Standard type of dr...

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Standard type / 2-stage exhaust system / Built-in thermal protector / Motor lead wire crimp terminal included ■Features ・Standard type dry vacuum...

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This is a vacuum pump that performs evacuation by eccentrically moving a spiral wall (driven scroll) facing a fixed spiral wall (fixed scroll). ■F...

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Double wrap type/Built-in thermal protector (for single phase)/With input terminal block (no cord) ■Features ・Large displacement and compact size...

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Double wrap type/Built-in thermal protector/With input terminal block (no cord)/With switch ■Features ・Large displacement and compact size. ・Hig...

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Single wrap type/Built-in thermal protector/With input terminal block (no cord)/With switch ■Features ・Large displacement and compact size. - Vac...

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Single wrap type/with input terminal block (no cord) ■Features ・Large displacement and compact size. - Vacuum pump that is resistant to high humi...

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Standard type/1 stage exhaust system/Built-in thermal protector ■Features ・Large displacement and compact size. ・Dry type vacuum pump that does ...

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Standard type/1-stage exhaust method/Built-in thermal protector/Power cord (discrete end) ■Features ・Large displacement and compact size. ・Dry t...

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Standard type/Single-stage exhaust system/Built-in thermal protector/With input terminal block (no cord) ■Features ・Large displacement and compac...

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Standard type/Single-stage exhaust system/Built-in thermal protector/With input terminal block (no cord) ■Features ・Large displacement and compac...

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• Vacuum Pumps

Standard type/Two-stage exhaust system/Built-in thermal protector/Power cord (disassembled end) ■Features ・Large displacement and compact size. ...

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• Vacuum Pumps

Standard type/1-stage exhaust system/Built-in thermal protector/Power cord (disassembled end) ■Features ・Large displacement and compact size. ・D...

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Pressure-only type/1-stage exhaust method/Built-in thermal protector/Power cord (disassembled end) ■Features ・Large displacement and compact size...

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This is a vacuum pump that evacuates by ejecting heated oil that becomes steam from a jet section at supersonic speed. Air-cooled type that does no...

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• Vacuum Pumps

This is a vacuum pump that evacuates by ejecting heated oil that becomes steam from a jet section at supersonic speed. Air-cooled type that does no...

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• Vacuum Pumps

Standard type/1 stage exhaust method/with input terminal block (no cord) ■Features ・Large displacement and compact size. ・The position of the in...

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• Vacuum Pumps

Standard type/1 stage exhaust method/with input terminal block (no cord) ■Features ・Large displacement and compact size. ・The position of the in...

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• Vacuum Pumps

Standard type/1 stage exhaust method/with input terminal block (no cord) ■Features ・Large displacement and compact size. ・The position of the in...

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• Vacuum Pumps

Standard type/1 stage exhaust method/with input terminal block (no cord) ■Features ・Large displacement and compact size. ・The position of the in...

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ECO-SHOCK is an innovative attachment that allows you to significantly save energy by attaching it to your current dry vacuum pump. ■Features Cont...

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The dry vacuum pump GR series is a simple pump designed for general industry, based on the proven and reliable LR and HR series. ■Features ・Can b...

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A multi-functional sputter ion pump control equipped with a CPU. Features ■Small and lightweight Multi-functionality with built-in CPU. This one u...

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Two-stage exhaust system / With backflow prevention mechanism / With gas ballast mechanism / Built-in thermal protector / With switch / Input termi...

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By uniformly heating the pump body in a high-temperature region, the pump is able to exhaust sublimable exhaust substances generated during CVD, et...

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By uniformly heating the pump body in a low-temperature range, this pump is ideal for PVD processes as well as for exhausting loading and unloading...

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The LS series is a vacuum pump classified as a screw type dry vacuum pump. Conventionally, increasing the pumping speed required a lot of power, bu...

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■Features This is a small type of roots type vacuum pump. It is possible to significantly increase the pumping speed in the pressure range where th...

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The MS series is a vacuum pump classified as a screw type dry vacuum pump. This is a process-resistant dry vacuum pump based on the conventional LS...

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ULVAC's PBL type oil diffusion ejector pump is a diffusion pump that can increase pumping speed in the medium vacuum region. It is resistant to for...

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ULVAC's PFL type oil diffusion pumps are designed and manufactured by taking advantage of many years of research and abundant manufacturing experie...

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The PKS series is a swinging piston type belt-driven oil rotary vacuum pump.It is a robust oil rotary vacuum pump with stable exhaust characteristi...

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The large PMB series is a belt-driven low-speed mechanical booster pump. In combination with a robust rocking piston type oil rotary vacuum pump, i...

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■General-purpose mechanical booster pump PMB series Ver.D is a general-purpose mechanical booster pump. Surface treatment and atmospheric pressure ...

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The PRC series is a mechanical booster pump designed primarily for use in semiconductor and liquid crystal manufacturing processes that require par...

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This pump utilizes the getter action of sputtered activated titanium to enhance pumping characteristics in ultra-high vacuum areas. By optimizing t...

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The PVD series is a rotary vane type (two-stage) belt-driven oil rotary vacuum pump.It is a belt-driven oil rotary vacuum pump that has been used b...

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■Features ・Achieving performance equivalent to dry oil rotary vacuum pumps. ・Can be operated in all pressure ranges from atmospheric pressure to ...

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6-stage exhaust system/built-in thermostat ■Features ・Achieving performance equivalent to dry oil rotary vacuum pumps. ・Can be operated in all p...

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A silencer exclusively for dry pumps. Exhaust noise can be reduced. ■Features ・Excellent sound deadening effect. - Can be connected to the pump e...

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■Features ・A filter that can be used for vacuum pumps used in various vacuum devices. -Can be installed on either the vacuum side or the exhaust s...

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■Features ・A filter that can be used for vacuum pumps used in various vacuum devices. -Can be installed on either the vacuum side or the exhaust s...

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This is a trap that collects oil smoke exhausted from an oil rotary vacuum pump. A clean work environment can be achieved without polluting indoor ...

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This is a trap that collects oil smoke exhausted from an oil rotary vacuum pump. A clean work environment can be achieved without polluting indoor ...

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• Vacuum Pumps

This is a trap that collects oil smoke exhausted from an oil rotary vacuum pump. A clean work environment can be achieved without polluting indoor ...

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ULVAC's ULK type oil diffusion pump is a high vacuum pump that is compact and designed with large critical back pressure. It is widely used from re...

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By uniformly heating the pump body in a high-temperature region, the pump is able to exhaust sublimable exhaust substances generated during CVD, et...

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A turbo molecular pump with integrated controller that uses magnetic bearings. By integrating the pump body and controller, wiring and space saving...

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This is a turbo molecular pump with a separate controller that uses magnetic bearings. We have a lineup of models with pumping speeds of 300 to 4,0...

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This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrating the controller and pump. E...

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The VD series Ver.C is a rotary vane type (2 stage) direct drive oil rotary vacuum pump. The two-stage rotary vane structure allows for good ultima...

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VS1501/VS2401 is a rotary vane type (single stage) oil rotary vacuum pump. Water cooling and forced lubrication system provide stable exhaust perfo...

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VS300A-W is a rotary vane type (single stage) oil rotary vacuum pump. With the smallest footprint in its class, it is now possible to directly moun...

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VS650B/VS750B is a rotary vane type (single stage) oil rotary vacuum pump. In addition to being able to choose between air cooling and water coolin...

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YTP series Ver.B is a high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. Evacuation from atmospheric pressure ...

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This is a desktop high vacuum pumping unit equipped with a ceramic ball bearing type turbomolecular pump. In consideration of the desktop usage env...

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