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This section provides an overview for plasma-enhanced cvd as well as their applications and principles. Also, please take a look at the list of 36 plasma-enhanced cvd manufacturers and their company rankings. Here are the top-ranked plasma-enhanced cvd companies as of December, 2024: 1.Akrion Technologies Inc., 2.Plasma-Therm, LLC, 3.Business Communications LLC.
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1975~1995: Worked at Hitachi, Ltd.
Engaged in research on the irradiation effects of nuclear reactor materials at the Energy Research Institute.
Received the Japan-American Atomic Energy Society Award for his research achievements.
1996~2015,
Engaged in soft error research caused by environmental neutron beams in semiconductor devices at the Institute of Industrial Science.
Research achievements: Awarded the IEEE Fellow and the Teiichi Yamazaki Award.
Currently active as a writer.
Plasma CVD equipment is a type of equipment that performs a type of chemical vapor deposition method.
Plasma CVD stands for plasma-enhanced chemical vapor deposition. The raw material gas is turned into a low-temperature plasma state (glow discharge ionized into cations and electrons) to generate active ions and radicals that cause chemical reactions on the substrate to deposit and form a thin film.
Plasma CVD technology is used for reinforcing films for cutting tools (titanium nitride, carbon nitride, DLC (diamond-like carbon)), semiconductor insulating and protective films, wiring and electrode materials (silicon nitride, silicon oxide, copper, aluminum, tungsten, polycrystalline silicon, compound semiconductors, etc.). These materials are used as insulators, protective films, wiring and electrode materials (silicon nitride, copper, aluminum, tungsten, polycrystalline silicon, compound semiconductors, etc.). Its use in high-performance power devices to control and supply energy, which is key to economic and industrial development, is also expanding rapidly.
The supply gas for plasma CVD systems is usually a carrier gas such as hydrogen, nitrogen, argon, or ammonia mixed with a raw material gas such as SiH4 (silane) or WF6 (tungsten hexafluoride).
Silicon dioxide (SiO2) is an oxide of silicon. It has excellent electrical insulation and thermal stability and is used in semiconductor device interlayer insulating films.
As semiconductors become thinner, they are more prone to leakage currents, where current leaks out from unplanned locations; the presence of SiO2 helps prevent leakage currents.
Silicon nitride (Si3N4) is a nitride of silicon. It has excellent strength and thermal conductivity and is used as a substrate material for power devices that generate a lot of heat.
Nitrogen and ammonia are used together with SiH4 to form nitrides, so they also play the role in raw material gases. Semiconductors in general perform functions related to arithmetic and memory, such as memory. Power devices, on the other hand, are for things like diodes.
Silicon carbide (SiC) is a carbide of silicon, a member of the compound semiconductor family along with GaN (gallium nitride, or GaN), AlGaN, etc. Like Si3N4, it is used in power devices in place of Si IGBTs because of its superior strength and thermal conductivity.
Compared to silicon compounds, power loss is lower, leading to smaller devices.
The gate of a transistor is formed from a gate oxide film (formed by thermal oxidation) and a gate electrode (mostly polycrystalline silicon). Tungsten plugs used for the gate electrode and source-drain contacts are formed by plasma CVD. (See Figure 3)
Figure 1. Basic configuration of a plasma CVD system
The raw material gas is selected from a pressure reduction range of 10-4 to 100 Pa, depending on the desired conditions. The power supply frequency most commonly used for plasma excitation is 13.56 MHz (RF: Radio Frequency), and the discharge type is a capacitively coupled type using parallel plate electrodes.
One of the parallel plates may be used as a shower head to supply process gas, or a heater may be inserted in one of the plates to control the temperature. There are many controllable parameters, such as power supply frequency, electrode structure other than the parallel plate type, raw gas composition, discharge volume, and temperature. Therefore, it is possible to deposit various types of thin films with various functionalities, ranging from inorganic to organic materials.
Figure 2. Basic structure of semiconductor devices (memory)
Plasma CDV systems are widely used in the manufacture of semiconductor devices. For example, in the case of memory devices, complex multilayer wiring is formed on top of the MOSFET (metal oxide semiconductor field-effect transistor) formed on the substrate (wafer). layers are formed on top of the MOSFET (metal oxide semiconductor field-effect transistor) formed on the substrate (wafer) and separated by an interlayer insulating film.
Plasma CVD systems are mainly used to form MOSFET gate electrodes, wiring layers, and interlayer insulators, which require fine patterning after deposition. Basically, printing technology is used for patterning, and the following steps are repeated.
Figure 3. Basic deposition process for semiconductor devices
By repeating the above process, semiconductor devices can be formed.
Depending on the energy given, it can be classified into plasma CVD, thermal CVD, and optical CVD.
*Including some distributors, etc.
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Sunstone Engineering LLC is a designer and manufacturer of high-tech micro welding and engraving solutions based out of Payson, Utah. Under the Orion, Avis, PW, and Seit brands, the company serves industries as diverse as jewelry, power sell manufacturing, aerospace, and orthodontics. The company’s customers include Boeing, Ford, Tesla, and Microsoft. The company’s product lines include lasers, pulse arcs, HF inverters, and hot bar reflow welding systems. The company produces almost all its products at its factories in Utah and distributes them to customers around the world.
Plasma-Therm, LLC, established in 1974 and headquartered in St. Petersburg, Florida, United States, is a manufacturer of plasma processing equipment for the semiconductor industry. Some of the products offered include plasma etch systems, plasma deposition systems, as well as plasma dicing systems, and plasma cleaning systems. These products are used for the fabrication of semiconductor devices like microprocessors, memory chips, and diodes. The company's quality management system has been assessed and complies with ISO 9001:2015.
Akrion Technologies Inc., founded in 1989 and headquartered in Allentown, Pennsylvania, USA, is a manufacturer of semiconductor components and assembly equipment. The company offers analog, digital, and power type integrated circuits (ICs) for use in electronic devices. It also offers LED lighting solutions, and quartz tube, boat, and mask type cleaners for maintaining semiconductor components. The company’s products are used by clients in the information technology (IT), consumer electronics, and smartphone industries.
VaporTech designs, builds, and services thin-film coating equipment which deposit PVD and PE-CVD coatings to enhance the quality of numerous products. We exhibit a steadfast commitment to our craft, recognizing that a product's finish is a direct reflection of its quality, underlining a brand's dedication to quality and value. For over three decades, VaporTech's PVD coating equipment has been assisting customers in applying stunning and durable hard coatings that not only enhance but differentiate the aesthetics, texture, and functionality of a plethora of items including home hardware, medical devices, automobiles, industrial tooling, consumer electronics, sporting goods, among others. We are located in Longmont, Colorado, extending our sales, service, and support on a global scale.
FindLight, located in Berkeley, California, United States, is an online marketplace for the photonics industry, connecting buyers and sellers of photonics products on a single platform, was founded in 2013. The company's platform is organized into a hierarchy of product categories, including lasers, optics, optomechanics, light detection systems, and other photonics products. They aim to simplify the shopping process in the photonics industry by seamlessly connecting sellers and buyers on one easy-to-use platform. They were founded after an extensive customer discovery process conducted in the frameworks of NSF I-Corp Entrepreneurship Program at UC Berkeley.
Denton Vacuum, Inc. is a supplier of Ion energy and plasma control process equipment. The company was founded in 1964 by Richard A. Denton with headquarters in Moorestown, New Jersey USA. The company provides process equipment for manufacturing semiconductor and optoelectronic devices. Denton Vacuum supplies thin film technology to global innovators and research facilities including ASML, Intel, Micron, Samsung, IBM, Apple, and many more. The products and services of the company are applied in the semiconductor, medical, aerospace, and tech industries.
Tystar Corporation, established in 1988 and based in Garden Grove, California, is a supplier of thermal processing equipment for semiconductor and micro-electro-mechanical systems applications. The company specializes in designing and manufacturing systems for rapid thermal processing, annealing, and oxidation of wafers. Its main products include digital gas flow controllers, diffusion, oxidation, and LPCVD furnace systems. These tools find applications in semiconductor fabrication, research, and development. The company’s featured customers include Alibaba Group, Samsung, Harvard University, The University Of Chicago, and Oak Ridge National Laboratory.
CVD Equipment Corporation, founded in 1982 and based in Central Islip, New York, is a supplier of chemical vapor deposition and thermal process equipment. The company designs, develops, and manufactures a broad range of equipment and process solutions used to develop and manufacture materials and coatings for industrial applications and research. Its products are used in production environments as well as within academic, federal, and corporate research and development centers. With its expertise in CVD and thermal process equipment design and manufacturing, it is uniquely positioned to address the high-growth silicon carbide (SiC) market driven by global EV adoption.
SHINKO SEIKI CO., LTD., established in 1949, and located in Kobe, Japan, is a manufacturer of vacuum devices, electric furnaces and semiconductor manufacturing equipment. Its product line includes a vast array of vacuum pumps such as mechanical booster pumps, vacuum exhaust unit, oil sealed rotary vacuum pumps and water ring vacuum pumps. Its product range also inlcudes soldering equipments, optical inspection equipments, thin film forming equipments, and plasma processing equipments. The company holds several certification for its operation such as the ISO 14004, and the ISO 9001.
SPI Lasers, founded in 1923, is a top manufacturer and supplier of advanced technology such as machines and systems, lasers, power electronics, power tools, smart factories, and software. Their primary goal is to develop and connect production technology, making it more efficient, precise, and future-proof for the benefit of manufacturing and its upstream and downstream processes. They offer cutting-edge software solutions to make the Smart Factory possible, enabling us to implement high-tech processes in industrial electronics.
Collomix GmbH, founded in 1974 and headquartered in Bayern, Germany, is a manufacturer of mixing technology and tools for the construction and color industry. This company’s product range includes Collomixer, paddle mixers, and the Collomatic system, enhanced by the HEXAFIX quick coupling system suitable for different materials. It designs solutions for construction professionals to provide improved end results, ease of use, and long-term health protection. The company also offers after-sales support, including factory repair service and a supply of spare parts for discontinued models.
iTOOLS I/S, founded in Denmark in 2004, is a manufacturer of flooring tools and equipment. The company offers a comprehensive range of tools for all types of flooring installations, including hardwood, laminate, tile, carpet, and vinyl. Its product line includes precision cutting solutions for tiles and ceramics., flooring rollers, essential tools for carpet installation and quality materials to prepare the subfloor. t also provides custom tool design and fabrication services.
Exact Tools Oy, founded in 1993 and based in Helsinki, Finland, is a manufacturer of pipe-cutting and beveling tools with over 20 years in the industry and 20,000 customers. Its products are called Exact tools and include pipe saws, pipe beveling, blades, and special pipe saws. The pipe cutters are suitable for several pipe materials, including Stainless steel, Steel, Cast Iron, Copper pipes, and all kinds of plastics. Exact tools PipeCut 360E, 280E, and 220E were granted the red dot design, while the PipeCut 220E was also awarded the Good Design Award.
AcXys Technologies, founded in 2000 and headquartered in France, is a manufacturer of atmospheric pressure plasma technologies for surface treatment. The company provides off-the-shelf and OEM equipment, including the UL coat ranges, quickset motion solutions, and ULscan. With in-house electronics, automation, and chemistry capabilities, it ensures optimized solutions for improving adhesion, cleaning organic materials, and thin film coating. The company's test inks, smart drop-E, and smart drop-F technologies facilitate the measurement of surface tension, which is crucial for assessing plasma treatment efficiency and ensuring optimal surface preparation.
Zhengzhou CY Scientific Instrument Co., Ltd., established in 2013 and based in Zhengzhou, Henan, China, is a manufacturer of scientific research equipment. The company primarily offers standard laboratory furnaces along with customized furnaces and related accessories. Some of its products include diamond color change furnace, plasma cleaner, spin coater, and more. The company maintains its manufacturing base and collaborate with several subcontracting factories, enabling them to supply equipment and technologies tailored to diverse customer needs and specifications.
Zhengzhou Kejia Furnace Co., Ltd., established in 2005 and based in Zhengzhou, China, is a manufacturer of a comprehensive range of furnaces and heat treatment equipment. The company’s product offerings include tube furnaces, rotary tube furnaces, box furnaces, CVD (Chemical Vapor Deposition) systems, PECVD (Plasma Enhanced Chemical Vapor Deposition) systems, and customized furnaces to meet specific industrial needs. It holds ISO 9001 and CE certifications, and the equipment finds applications in various industries, including materials research, nanotechnology, electronics, and dental labs, resulting in advancements in research and manufacturing processes across multiple sectors.
Sumitomo Precision Products Co. Ltd., established in 1961 and headquartered in Amagasaki, Japan, is a manufacturer of several products, including hydraulic controls, semiconductor manufacturing equipment, aerospace equipment, and environmental systems. It began manufacturing large heat exchangers in 1963, large propellers in 1967, and LNG vaporizers in 1969. In 1974, it began making ozone generators, and in 1988, it started manufacturing equipment for space applications. The company is ISO 14001 certified, and its product portfolio includes landing gear systems for commercial flights, high-temperature heat exchangers, coolant components for machine tools, LNG vaporizers, and silicon oxide sacrificial layer etching systems.
Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, components, peripheral devices, and materials for the solar cell and semiconductor industries, among others. The company operates businesses in six areas, including materials, components, electronic devices, semiconductors, and flat panel display production equipment. Some of its products include roll coaters, semiconductor production equipment, LED production equipment, leak detectors, and vacuum brazing furnaces. It is ISO9001 certified, and its net sales in the 2022 fiscal year were 227.5 billion Japanese Yen, with 34% of this amount coming from semiconductor and electronic device production equipment.
Samco Inc, founded in 1979 and headquartered in Kyoto, Japan, is a manufacturer and supplier specializing in semiconductor and electronic component manufacturing systems. The company's product portfolio includes low-stress chemical vapor deposition systems, atomic layer deposition systems, reactive ion etching systems, plasma cleaners, and Aqua Plasma Cleaners. These products are applied in various industries, including semiconductor manufacturing, the electronics industry, optoelectronics, photonics, and biotechnology. The company has office locations overseas, including China, the USA, Singapore, Malaysia, and Liechtenstein.
Sidamo, established in 1967 and headquartered in La Chaussée St Victor, France, is a manufacturer that develops technical tools for professional users in the building and industry sectors. The company offers a wide range of products, including a tip groove mill, straight slotting mill, floor drill press, metal band saw, and more. It also offers the Pro Move 3600, which is a large format cutting system for handling operations. Its product has an automatic setting of the tip and a constant mill diameter. The company has achieved ISO 14001 certification. It serves industries such as manufacturing, construction, metalworking, and precision.
Unitec Power Tools (Unitec) was founded in 1990 and operates out of Norwalk Connecticut and Deer Park, Texas. The company is a developer and producer of tools for metalworking, concrete, masonry, petrochemical, hazardous environments and Ex Zones, underwater, and mining. The company developed the first air-powered band saw in 1991. The company's tool types include cutting tools, surface preparation tools, dust collection systems, safety tools, and various specialty tools. The company offers support in both English and Spanish.
Dorico Technologies SRL, established in 2000 and headquartered in Manoppello, Pescara, Italy, is an electromechanical engineering company, an abrasive tool and machinery manufacturer, and a B2B supplier. The company primarily offers a range of stone machinery, abrasives, and adhesives and has expanded into new markets, including floor sanding, polishing, and cleaning, with the creation of its grinding division. This newer range of products includes industrial vacuum cleaners, scrubber-dryers, and orbital floor grinding machines. These products are used in construction projects for floor surfacing and by commercial cleaning companies.
SPTS Technologies Ltd, a subsidiary of KLA Corporation, is a British manufacturer established in 2009 and based in Ringland Way, Newport, specializing in technology and solutions for semiconductor and microelectronic device manufacturers and research institutions. SPTS Technologies offers process technologies tailored for advanced packaging schemes, including high density fan-out wafer level packaging (FOWLP) and three-dimensional integrated circuit (3DIC) packaging. The company also provides support for wafer processing systems used in the manufacturing of Micro Electro Mechanical Systems (MEMS) devices. Additionally, SPTS Technologies offers plasma processing technology to assist the compound semiconductor applications in manufacturing radio frequency (RF) and photonic devices.
Business Communications LLC., established in 1976 and headquartered in Dubai, UAE, is a manufacturer of business supplies and equipment area. The company offers the following products and services, including thermal fingerprint development, IR fluorescent fingerprint powders, handheld/portable XRF spectrometry, and S1 titan. It also offers Tracer 5 series, autoclaves, pressure vessels and reactors, and vacuum Furnace. Its product can be used for several chemical reactions and other applications like hydrogenation, catalyst screening, polymerization, and corrosion testing. The company has achieved ISO 9001:2015. It serves industries such as government, food and pharma industries, healthcare, renewable, and more.
Omicron Scientific Equipment was established in the year 2000 based in New Delhi, India and it is a manufacturer, supplier, and exporter of scientific equipment. The company manufactures products like microwaves, radio frequency equipment, DC power supplies, thermal evaporation systems, electron beam gun-based evaporation systems, spin coating systems, scrubbers, semiconductor processing equipment, chemical benches, equipments for research and development and vacuum furnaces. The company is a member of Trade India and is also ISO certified.
Leman S.A., established in 1976 and headquartered in Saint-Clair-de-la-Tour, France, is a global trade tool and equipment designer, manufacturer, and B2B supplier. The company offers an extensive range of products for construction, wood, and metal professionals worldwide. Its products include cutting discs, router tools, and dust collection machines. These products are used in the manufacture of wooden furniture, HVAC systems, and the construction of residential homes. The company sells its products directly to customers in France, and its products are available worldwide through our distribution partners, including material dealers, hardware stores, and specialists.
Tyrolit, established in 1919 and headquartered in Tyrol, Austria, is a manufacturer of bonded grinding, cutting, and dressing tools and a supplier of tool and machine systems for the construction industry. The company specializes in precision super abrasives, diamond tools, and coated abrasives. Its products include precision machining tools for engines and large-diameter cut-off wheels for steel manufacturing. Its products incorporate Tyrolean technology, effectively grind, cut, and drill diverse materials of varying hardness. As part of the Swarovski Group, the company supplies tools and machine systems to automotive, aerospace, and construction industries.
Scienta Omicron, established as a supplier and distributor of cutting-edge scientific instruments, was founded in 1983 in Germany. The company specializes in providing scientific tools for researchers and institutions worldwide, and its product range covers a wide spectrum, including advanced surface analysis systems, electron spectrometers, scanning probe microscopes, and sophisticated deposition systems. Notable offerings encompass X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) systems, used for examining material surfaces at the atomic and molecular levels. Its products are used across fields like materials science, nanotechnology, surface physics, and more, catering to academic, industrial, and laboratory research.
ELMAG Entwicklungs und Handels GmbH, founded in 1984 and located in Tumeltsham, Austria is a wholesaler and supplier of industrial machinery and equipment. The company’s product category includes compressed air technology, welding technology, stone cutting, workshop equipment, and power generators. It also offers welding equipment, plasma cutters, extraction systems, Metal cleaning equipment, and induction heaters. It is ISO 9001 certified, indicating that its production processes and products are of standard quality. It has service points in Austria, Germany, Switzerland, Slovenia, and Hungary, serving customers worldwide.
Lam Research Corporation, founded in 1980 and based in Fremont, California, is a global supplier of semiconductor fabrication equipment. Specializing in thin film deposition, plasma etch, and photoresist strip processes, the company utilizes a line of high-precision mass metrology systems, enabling an Å-level quantification to process changes, and accommodating parts up to 8 meters in size. Its products and services enable its customers to build smaller, faster, and power-efficient electronic devices.
Ranking as of December 2024
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | Akrion Technologies Inc. |
12.4%
|
| 2 | Plasma-Therm, LLC |
9.2%
|
| 3 | Business Communications LLC |
4.6%
|
| 4 | Denton Vacuum, Inc. |
4.6%
|
| 5 | Sunstone Engineering LLC |
4.6%
|
| 6 | FindLight |
4.1%
|
| 7 | Tystar Corporation |
4.1%
|
| 8 | CVD Equipment Corporation |
4.1%
|
| 9 | Kenosistec Sr |
3.7%
|
| 10 | Scienta Omicron |
3.7%
|
Derivation Method
The ranking is calculated based on the click share within the plasma-enhanced cvd page as of December 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
Newly Established Company
Company with a History
*Including some distributors, etc.
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
|
United States of America
|
8 | 28.6% |
|
Japan
|
5 | 17.9% |
|
Germany
|
3 | 10.7% |
|
China
|
2 | 7.1% |
|
India
|
2 | 7.1% |
|
Denmark
|
1 | 3.6% |
|
Finland
|
1 | 3.6% |
|
France
|
1 | 3.6% |
|
Sweden
|
1 | 3.6% |
Singapore
|
1 | 3.6% |
Italy
|
1 | 3.6% |
Malaysia
|
1 | 3.6% |
|
Austria
|
1 | 3.6% |
24 products found
24 products
DINOVAC
200+ people viewing
Last viewed: 1 day ago
Standard Response
■ Applications and features ･ Experimental plasma CVD device that can form film into three -dimensional objects ･ Corresponding membrane species: D...
SAKIGAKE-Semiconductor
280+ people viewing
Last viewed: 10 hours ago
The industry's first safe plasma CVD that directly forms a film from a liquid raw material. ■ Product overview ･ Thin film formation device that a...
Arios Co., Ltd.
40+ people viewing
Last viewed: 21 hours ago
Very Fast Response
■Summary This equipment is a microwave plasma CVD equipment for diamond production. By making full use of our unique plasma technology, we have ach...
Microphase Co., Ltd.
40+ people viewing
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Facilitates gas ionization and precursor decomposition ■Summary ・By generating high-frequency induced plasma upstream of the horizontal tube furn...
Arios Co., Ltd.
30+ people viewing
Last viewed: 11 hours ago
Very Fast Response
■Summary CVD is an abbreviation for Chemical Vapor Deposition, and refers to the process of supplying a raw material with gas, decomposing it with ...
Japan Create Co., Ltd.
500+ people viewing
Last viewed: 19 hours ago
5.0 Company Review
It is a film forming device specialized in DLC coating that we are good at, applying plasma CVD processing technology and is commonly used as resin...
Japan Create Co., Ltd.
360+ people viewing
Last viewed: 19 hours ago
5.0 Company Review
It is a film forming device specialized in DLC coating that we are good at, applying plasma CVD processing technology and is commonly used as resin...
Oxford Instruments Ltd.
190+ people viewing
Standard Response
The ICPCVD (Inductively Coupled Plasma) process module is designed to produce high-quality thin films at low temperatures and uses a high-density r...
Oxford Instruments Ltd.
190+ people viewing
Standard Response
Chemical vapor deposition (CVD) and plasma enhanced CVD (PECVD) are suitable tools for the growth of 1D and 2D nanomaterials and the formation of h...
Oxford Instruments Ltd.
180+ people viewing
Last viewed: 10 hours ago
Standard Response
The PlasmaPro 100 PECVD system is a specially designed system for producing high-quality thin films with excellent uniformity and controlled film p...
Oxford Instruments Ltd.
210+ people viewing
Last viewed: 15 hours ago
Standard Response
The PlasmaPro 80 is a compact, space-saving system that provides versatile etch and deposition solutions in an easy-to-use, open-load format. This ...
Oxford Instruments Ltd.
200+ people viewing
Last viewed: 10 hours ago
Standard Response
■Summary PlasmaPro 80 Reactive Ion Etching (RIE) is a compact, space-saving system that provides a variety of etch and deposition solutions with an...
Oxford Instruments Ltd.
210+ people viewing
Last viewed: 19 hours ago
Standard Response
The PlasmaPro 800 provides a flexible solution for plasma-enhanced chemical vapor deposition (PECVD) processes for large wafer batches and 300mm wa...
Kitano Seiki Co., Ltd.
30+ people viewing
Last viewed: 2 hours ago
■Features This device is a hot wire type CVD device that uses a tungsten filament, and has the characteristics of large area and high purity thin f...
Japan Create Co., Ltd.
350+ people viewing
Last viewed: 19 hours ago
5.0 Company Review
■ Characteristics ・ Realizes low stress, high hardness, and high insulation by 2 frequency independent sealing method. ・ Realizes excellent membr...
MPS Co., Ltd.
140+ people viewing
Last viewed: 11 hours ago
■Summary This is an experimental device for making nitrides. The raw materials used are chloride and ammonia. For film formation, you can choose be...
MPS Co., Ltd.
110+ people viewing
Last viewed: 11 hours ago
■Summary This is a plasma CVD device for diamond-like carbon that uses DC high-voltage pulse discharge. Methane or acetylene can be selected as the...
MPS Co., Ltd.
160+ people viewing
Last viewed: 20 hours ago
■Summary This is a plasma CVD device that uses RF (13.56MHz). DLC film formation is possible even on insulating materials.
SHINKO SEIKI CO., LTD.
230+ people viewing
Last viewed: 2 hours ago
It is a large plasma CVD device that supports 600mm board. It is possible to form a dense silicon oxide film and is suitable for producing thin fil...
XQ Instruments
80+ people viewing
Last viewed: 12 hours ago
■Features ・Less substrate damage because ion energy does not increase in proportion to power level ・The applicable vacuum range is wide from 1x10...
ULVAC Sales Co., Ltd.
50+ people viewing
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■Summary Single wafer PE-CVD equipment CME-200E/400 is a PE-CVD equipment for mass production that is ideal for forming silicon-based insulating fi...
ULVAC Sales Co., Ltd.
70+ people viewing
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■Summary The CMD series is a single-wafer CVD system for forming a-Si films, silicon oxide films, and nitride films using SiH4 and TEOS. ■Applicat...
ULVAC Sales Co., Ltd.
50+ people viewing
Last viewed: 10 hours ago
■Summary The CC-200/400 load-lock plasma CVD equipment is small and easy to use, and is suitable for everything from research and development to pr...
Japan Create Co., Ltd.
230+ people viewing
Last viewed: 18 hours ago
5.0 Company Review
■ Characteristics ・ Chamber volume 1m3 ・ Unique plasma control method ・ Multi -stage multi -dose batch processing is possible ・ Simple structur...
