Fuji Inback Co., Ltd.'s Dry, Oilless & Oil-Free Vacuum Pumps

10 products found

Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Light Duty Applications Compact A100L / A200L

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■Application ・Load lock chamber ・Transfer chamber ・Semiconductor manufacturing ■Features Designed to be installed directly on the tool or facto...

Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Medium Corrosive Applications A3P series

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■Application ·etching ・Implant ・PVD ■Features A3P series dry pumps have an internal structure that is resistant to corrosive gases and are equip...

Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Medium Corrosive Applications A4H series

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■Application ·etching ・PECVD ・SACVD ・ALD ・Solar power generation ·LED ■Features A4H series dry pumps have high gas throughput and improved pow...

Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Harsh Duty Applications A4X series

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■Application ·etching ・PECVD ・SACVD ・ALD ・Solar power generation ·LED ■Features A4H series dry pumps have high gas throughput and improved pow...

Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Extremely Duty Applications A4XN series

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■Application ·etching ・PECVD ・SACVD ・ALD ・Solar power generation ·LED ■Features With all the technical advantages of the A4H and A4X series, t...

Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Light Duty Applications Industrial use ACP120G / ACG600G

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■Application ・Coating industry ・R&D ・Freeze drying ■Features Ideal for industrial and R&D applications as well as where particulate or oil cont...

Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Harsh Duty Applications ADH series

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■Application ・ALD ・Epitaxial growth ・EUV ・Solar power generation (a-Si, µSi PECVD, etc.) ・LED (MOCVD GaN etc.) ■Features One of the biggest a...

Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Light Duty Applications Air-cooled ACP series

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■Application ・Surface observation ・Leak detector (back pump) ・Plasma cleaning ・Vacuum coating ・Cryopump regeneration ■Features A mechanism wi...

Fuji Inback Co., Ltd.

Dry pump (scroll type) Scroll pump HiScroll series

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■What is a scroll pump? This is a dry pump that does not use oil. By rotating two alternating spiral blades, the gas is compressed and a vacuum is ...

Fuji Inback Co., Ltd.

Dry pump (diaphragm type)

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Last viewed: 2 hours ago

Pfeiffer Vacuum's diaphragm pumps provide clean, dry vacuum in a variety of applications and markets. ■What is a diaphragm pump? A type of positiv...

Check the product list of Fuji Inback Co., Ltd.

Fuji Inback Co., Ltd.'s Dry, Oilless & Oil-Free Vacuum Pumps

Dry pump (multi-stage roots type) Light Duty Applications Compact A100L / A200L

Dry pump (multi-stage roots type) Medium Corrosive Applications A3P series

Dry pump (multi-stage roots type) Medium Corrosive Applications A4H series

Dry pump (multi-stage roots type) Harsh Duty Applications A4X series

Dry pump (multi-stage roots type) Extremely Duty Applications A4XN series

Dry pump (multi-stage roots type) Light Duty Applications Industrial use ACP120G / ACG600G

Dry pump (multi-stage roots type) Harsh Duty Applications ADH series

Dry pump (multi-stage roots type) Light Duty Applications Air-cooled ACP series

Dry pump (scroll type) Scroll pump HiScroll series

Dry pump (diaphragm type)

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