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  4. Ultra-high vacuum focused ion beam/electron microscope Ultra-high vacuum FIB/SEM column (Unisoku Co., Ltd.)
Ultra-high vacuum focused ion beam/electron microscope Ultra-high vacuum FIB/SEM column-COBRA-FIB Column
Ultra-high vacuum focused ion beam/electron microscope Ultra-high vacuum FIB/SEM column-Unisoku Co., Ltd.

Ultra-high vacuum focused ion beam/electron microscope Ultra-high vacuum FIB/SEM column
Unisoku Co., Ltd.

About This Product

UNISOKU has formed a technical partnership with France's Orsay Physics to provide high spatial resolution FIB/SEM columns that are compatible with ultra-high vacuum. ■Features ・Supports ultra-high vacuum environment (UHV-SEM, UHV-FIB) ・High spatial resolution (top model 2.5nm or less) ・Sophisticated user interface software ・Can be used as a gas source for metal deposition ■Diverse column types ・i-FIB: 25 nm@1 pA (WD=12 mm, 30 kV) ・COBRA-FIB: 2.5 nm@ 1pA (WD-12 mm, 30 kV) ・Orage-FIB: 2.5 nm@1 pA (WD=12 mm, 30 kV) ・Vortex SEM: 25 nm@10 pA ・e-CLIPSE Plus SEM: 4 nm@<30pA ■Focused ion beam column: FIB ・COBRA-FIB Column (High-spec model, high-end model FIB column boasting high spatial resolution) ・Orage-FIB Column (high-resolution, low-energy, high-current FIB column) ・i-FIB Column (FIB column for high-speed processing, 50 times faster than GuFIB) ・Additional accessories (metal deposition gas source: Mono GIS, various ion source cartridges, high-sensitivity secondary electron detector: SED) ■Scanning electron microscope column: SEM ・e-CLIPSE Plus SEM Column (High-end SEM column with high spatial resolution) ・Vortex SEM Column (compact and highly versatile SEM column)

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    Ultra-high vacuum focused ion beam/electron microscope Ultra-high vacuum FIB/SEM column

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1 Models of Ultra-high vacuum focused ion beam/electron microscope Ultra-high vacuum FIB/SEM column

Product Image Part Number Price (excluding tax) Current range Energy range Spatial resolution
Ultra-high vacuum focused ion beam/electron microscope Ultra-high vacuum FIB/SEM column-Part Number-COBRA-FIB Column

COBRA-FIB Column

Available upon quote 1pA-50nA 1-30keV 2.5nm@1pA

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Unisoku Co., Ltd.

  • Japan

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