Schottky field emission scanning electron microscope JSM-IT800 series
Cosmo Trading Co., Ltd.
About This Product
The JSM-IT800 is equipped with an "in-lens Schottky Plus field emission electron gun" to achieve high-resolution observation, a next-generation electro-optical control system "Neo Engine", and an easy-to-use system to realize high-speed elemental mapping. Our common platform is a system that incorporates our own EDS into the GUI "SEM Center" that pursues
By replacing the SEM objective lens with a module, we can provide equipment that meets the various needs of our customers.
The JSM-IT800 has two versions: a hybrid lens version (HL), which is a general-purpose FE-SEM, and a super hybrid lens version (SHL/SHLs), which enables higher resolution observation and analysis, depending on the objective lens. ), a semi-in-lens version (I/IS, 2 versions depending on function), which is good at observing semiconductor samples, and 5 versions are available.
Additionally, the JSM-IT800 can be equipped with new backscattered electron detectors, the scintillator backscattered electron detector (SBED) and the multipurpose backscattered electron detector (VBED). SBED allows the acquisition of material contrast images with good response and low accelerating voltage. VBED can obtain 3D, unevenness, and material contrast images, so you can expect to obtain information that was previously unavailable and improve measurement problems.
In-lens Schottky Plus Field Emission Electron Gun (FEG)
High brightness has been achieved by combining an electron gun and a low aberration condenser lens. Sufficient irradiation current can be obtained even at low accelerating voltage (100nA@5kV), allowing you to perform everything from high-resolution observation to high-speed elemental mapping, EBSD analysis, and soft X-ray analysis without changing objective lenses.
■Neo Engine (New Electron Optical Engine)
Equipped with a next-generation electro-optical control system that brings together the best of JEOL's electro-optic technology. Stable observation is possible even when conditions change. We have also achieved significant improvements in usability, including automatic functions.
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Product
Schottky field emission scanning electron microscope JSM-IT800 series
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Handling Company
Cosmo Trading Co., Ltd.
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Categories
5 Models of Schottky field emission scanning electron microscope JSM-IT800 series
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Analysis function (optional) | Aperture Optimized Lens (ACL) | Electron gun | Emitter warranty period | Incident voltage | Low vacuum mode (optional) | Magnification | Main uses (examples) | Motor control | Objective lens | Probe current | Resolution | Sample size | Sample stage | Standard detector |
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JSM-IT800 HL version |
Available upon quote |
EDS WDS EBSD C.L. |
Built-in | In-lens Schottky Plus field emission electron gun | 3 years | 0.01~30kV | Possible |
Photo magnification ×10 ~ 2,000,000 (When displayed at 128 × 96 mm) Display magnification × 27 ~ 5,480,000 (When displaying 1,280 × 960 pixels) |
Magnetic material, wide area EBSD | 5 axis motor control | Hybrid lens |
Several pA ~300nA (30kV) Several pA ~100nA (5kV) |
0.7nm (20kV) 1.3nm (1kV) 3.0nm (15kV, 5nA, WD 10mm) |
Sample stage Type1 (Maximum diameter: 170 mm Maximum height: 45 mm (WD 5 mm)) Stage movement range (X:70mm Y:50mm Z:1~41mm Tilt: -5~70° Rotation: 360°) |
Full eucentric goniometer stage |
Secondary electron detector (SED) Upper electron detector (UED) |
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JSM-IT800 is version |
Available upon quote |
EDS WDS EBSD C.L. |
Built-in | In-lens Schottky Plus field emission electron gun | 3 years | 0.01~30kV | Possible |
Photo magnification ×25 ~ 2,000,000 (When displayed at 128 × 96 mm) Display magnification × 69 ~ 5,480,000 (When displaying 1,280 × 960 pixels) |
Semiconductor device analysis | 5 axis motor control | Semi-in lens |
Several pA ~300nA (30kV) Several pA ~100nA (5kV) |
0.6nm (15kV) 1.0nm (1kV) 3.0nm (15kV, 5nA, WD 8mm) |
Sample stage Type1 (Maximum diameter: 170 mm Maximum height: 45 mm (WD 5 mm)) Stage movement range (X:70mm Y:50mm Z:1~41mm Tilt: -5~70° Rotation: 360°) |
Full eucentric goniometer stage |
Secondary electron detector (SED) Upper In-Lens Detector (UID) |
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JSM-IT800 i version |
Available upon quote |
EDS WDS EBSD C.L. |
Built-in | In-lens Schottky Plus field emission electron gun | 3 years | 0.01~30kV | Possible |
Photo magnification ×25 ~ 2,000,000 (When displayed at 128 × 96 mm) Display magnification × 69 ~ 5,480,000 (When displaying 1,280 × 960 pixels) |
Semiconductor device analysis | 5 axis motor control | Semi-in lens |
Several pA ~500nA (30kV) Several pA ~100nA (5kV) |
0.5nm (15kV) 0.7nm (1kV) 3.0nm (15kV, 5nA, WD 8mm) |
Sample stage Type1 (Maximum diameter: 170 mm Maximum height: 45 mm (WD 5 mm)) Stage movement range (X:70mm Y:50mm Z:1~41mm Tilt: -5~70° Rotation: 360°) |
Full eucentric goniometer stage |
Secondary electron detector (SED) Upper In-Lens Detector (UID) Upper electron detector (UED) |
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JSM-IT800 SHLs version |
Available upon quote |
EDS WDS EBSD C.L. |
Built-in | In-lens Schottky Plus field emission electron gun | 3 years | 0.01~30kV | Possible |
Photo magnification ×10 ~ 2,000,000 (When displayed at 128 × 96 mm) Display magnification × 27 ~ 5,480,000 (When displaying 1,280 × 960 pixels) |
Magnetic materials, EBSD, biology (array tomography, CLEM) | 5 axis motor control |
Super hybrid lens |
Several pA ~500nA (30kV) Several pA ~100nA (5kV) |
0.6nm (15kV) 1.1nm (1kV) 3.0nm (15kV, 5nA, WD 10mm) |
Sample stage Type1 (Maximum diameter: 170 mm Maximum height: 45 mm (WD 5 mm)) Stage movement range (X:70mm Y:50mm Z:1~41mm Tilt: -5~70° Rotation: 360°) |
Full eucentric goniometer stage |
Secondary electron detector (SED) Upper hybrid detector (UHD) |
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JSM-IT800 SHL version |
Available upon quote |
EDS WDS EBSD C.L. |
Built-in | In-lens Schottky Plus field emission electron gun | 3 years | 0.01~30kV | Possible |
Photo magnification ×10 ~ 2,000,000 (When displayed at 128 × 96 mm) Display magnification × 27 ~ 5,480,000 (When displaying 1,280 × 960 pixels) |
Magnetic materials, EBSD, biology (array tomography, CLEM) | 5 axis motor control |
Super hybrid lens |
Several pA ~500nA (30kV) Several pA ~100nA (5kV) |
0.5nm (15kV) 0.7nm (1kV) 0.9nm (500V) 3.0nm (15kV, 5nA, WD 10mm) |
Sample stage Type1 (Maximum diameter: 170 mm Maximum height: 45 mm (WD 5 mm)) Stage movement range (X:70mm Y:50mm Z:1~41mm Tilt: -5~70° Rotation: 360°) |
Full eucentric goniometer stage |
Secondary electron detector (SED) Upper hybrid detector (UHD) |
Click on the part number for more information about each product
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