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Vacuum Plasma Etcher Semi-Auto Series CPE-S Series-CPE-S series
Vacuum Plasma Etcher Semi-Auto Series CPE-S Series-SAKIGAKE-Semiconductor

Vacuum Plasma Etcher Semi-Auto Series CPE-S Series
SAKIGAKE-Semiconductor

SAKIGAKE-Semiconductor's Response Status

Response Rate

100.0%

Response Time

120.0hours


About This Product

Ptfe (Teflon) nytherization. Water -repellent treatment of various materials. Glass film formation. Such

■ Product overview

・ A new semi -auto series is now available in the plasma device CPE series. ・ In addition to manual operation, you can easily operate the touch panel, and by registering the recipe in advance, you can simply drive a button. ・ Large area of ​​φ300mm (we also accept changes in size)

  • Product

    Vacuum Plasma Etcher Semi-Auto Series CPE-S Series

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1 Models of Vacuum Plasma Etcher Semi-Auto Series CPE-S Series

Image Part Number Price (excluding tax) External dimensions Discharge dimensions weight Output adjustment Gas system Gas control method Pressure adjustment power supply
Vacuum Plasma Etcher Semi-Auto Series CPE-S Series-Part Number-CPE-S series

CPE-S series

Available upon quote

680mm (W) x 785mm (d) x 1,020mm (H)

Diameter 300mm (circular)

160kg

can be

1 system (2 systems are optional)

Mass flow controller

valve

AC100V, 30A (50Hz/60Hz)

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About Company Handling This Product

Response Rate

100.0%


Response Time

120.0hrs

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