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  4. FE-Low Energy Electron Microscope/Photoelectron Microscope FE-LEEM/PEEM P90 Series (Tokyo Instruments, Inc)
FE-Low Energy Electron Microscope/Photoelectron Microscope FE-LEEM/PEEM P90 Series-FE-LEEM P90
FE-Low Energy Electron Microscope/Photoelectron Microscope FE-LEEM/PEEM P90 Series-Tokyo Instruments, Inc

FE-Low Energy Electron Microscope/Photoelectron Microscope FE-LEEM/PEEM P90 Series
Tokyo Instruments, Inc

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About This Product

■Summary

The FE-LEEM/PEEM P90 series, manufactured by SPECS in Germany, is an electron microscope that can be selected between LEEM mode, which irradiates low-energy electrons and obtains backscattered electron images, and PEEM mode, which irradiates light and obtains photoelectron images. Using a 90° deflector, we achieved a high spatial resolution of 5 nm in LEEM mode. By adding the optional spherical aberration correction function, the spatial resolution is improved to 3nm (standard value, maximum resolution 1.6nm) and throughput is 8 times higher than before. By using a high brightness, low energy dispersion FE-electron gun, high energy resolution measurements are achieved.

■Features

・Compact, all-in-one design ・High resolution guaranteed value 3nm, maximum resolution 1.6nm (LEEM, model with spherical aberration correction function added) ・High brightness, low energy dispersion FE-electron gun (half width 300meV) ・Spherical aberration correction function (optional) ・High-precision 5-axis piezo sample stage ・High scalability

  • Product

    FE-Low Energy Electron Microscope/Photoelectron Microscope FE-LEEM/PEEM P90 Series

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1 Models of FE-Low Energy Electron Microscope/Photoelectron Microscope FE-LEEM/PEEM P90 Series

Image Part Number Price (excluding tax) Energy width of electron beam Position repeatability of sample stage Observation field Spatial resolution Maximum sample heating temperature Occupied area Magnification Base pressure Starting energy Energy resolution LEEM spot size Kinetic energy
FE-Low Energy Electron Microscope/Photoelectron Microscope FE-LEEM/PEEM P90 Series-Part Number-FE-LEEM P90

FE-LEEM P90

Available upon quote

<300meV

~500nm

800nm~100μm

Guaranteed value 5nm (maximum resolution 4.2nm)

Up to 1,500K (when imaging)

1.6×2.3m (height 2.3m)

400~50,000 times

2×10^-10mbar

Up to 1,000eV

Spectrometry <250meV
Imaging <1.7eV

<40μm
Minimum 200nm (when using micro-diffraction aperture)

Typical 15keV, minimum 2keV

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Tokyo Instruments, Inc

Response Rate

100.0%

Response Time

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Company Overview

Tokyo Instruments, Inc., established in 1981, and headquartered in Tokyo, Japan, is a manufacturer of opto-ele...

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