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  4. Diamond film deposition equipment (Japan Koshuha Co., Ltd.)
Diamond film deposition equipment-Diamond film deposition equipment
Diamond film deposition equipment-Japan Koshuha Co., Ltd.

Diamond film deposition equipment
Japan Koshuha Co., Ltd.

About This Product

A high-output (up to 5kW) microwave power supply and automatic matching device (4E tuner) generate stable high-density plasma, allowing high-quality diamonds to be synthesized at high speed.

■Features

Our unique plasma control function allows you to control the plasma distribution on the board while the plasma is on.

  • Product

    Diamond film deposition equipment

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1 Models of Diamond film deposition equipment

Image Part Number Price (excluding tax) Alignment method Film formation speed Film forming range Shape Pressure control Reactive gas MW power supply
Diamond film deposition equipment-Part Number-Diamond film deposition equipment

Diamond film deposition equipment

Available upon quote

Automatic matching with 4E tuner (manufactured by Nippon Koshuha)

20μm/h tool grade, 4μm/h optical grade

2 inch diameter

1,500mm (W) × 900mm (D) × 2,000mm (H)

Automatic pressure control

Methane, hydrogen, oxygen (can be expanded)

2,450MHz, maximum output 5kW (manufactured by Nippon Koshuha)

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About Company Handling This Product

Japan Koshuha Co., Ltd.

  • Japan

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ALD Systems
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