Diamond film deposition equipment
Japan Koshuha Co., Ltd.
About This Product
A high-output (up to 5kW) microwave power supply and automatic matching device (4E tuner) generate stable high-density plasma, allowing high-quality diamonds to be synthesized at high speed.
■Features
Our unique plasma control function allows you to control the plasma distribution on the board while the plasma is on.
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Product
Diamond film deposition equipment
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Handling Company
Japan Koshuha Co., Ltd.
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Categories
1 Models of Diamond film deposition equipment
| Product Image | Part Number | Price (excluding tax) | Alignment method | Film formation speed | Film forming range | MW power supply | Pressure control | Reactive gas | Shape |
|---|---|---|---|---|---|---|---|---|---|
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Diamond film deposition equipment |
Available upon quote | Automatic matching with 4E tuner (manufactured by Nippon Koshuha) | 20μm/h tool grade, 4μm/h optical grade | 2 inch diameter | 2,450MHz, maximum output 5kW (manufactured by Nippon Koshuha) | Automatic pressure control | Methane, hydrogen, oxygen (can be expanded) | 1,500mm (W) × 900mm (D) × 2,000mm (H) |
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About Company Handling This Product
- Japan