Product
Spatta device Multipurpose Simple operating type Magnetron Patta Silamon Memoral Ms. MSP-40THandling Company
Vacuum deviceProduct Image | Part Number | Price (excluding tax) | Achievement vacuum | Chamber size | Device size | Electrode -sample platform interval | Introduction of atmosphere gas | Maximum sample size | Safety measure | Sample stage size | Spatta power supply | Target cooling mechanism | Target size | Target type | Vacuum exhaust system | Vacuum measurement | control panel | power supply | timer |
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MSP-40T |
Available upon quote | 1x10-4pa or less | Inner diameter 178mm, depth 159mm stainless steel chamber | Width 504 m m, depth 486mm, height 497mm, weight 37.7kg | 115mm, 95mm, 70mm included with each sample stand | Automatic gas flow rate adjustment by mass flow controller. Argon gas. 0.08 to 0.1MPa. φ1/4 inch connection | 50mm in diameter, 50mm high | Circuit breaker by system, interlock by program control | 50mm in diameter, anode electrode separation floating system | Ionized current: 0 to 640ma voltage: 0 to 650V | Water -cooled target electrode mechanism. Flow switch interlock. 0.5 to 1ℓ/min. Φ6mm tube connection. | Standard target size: 50mm in diameter, 3mm thick) (Option: 1mm thick, 2mm compatible, thickness 0.5mm precious metal target + thickness 0.6mmNi plate) | PT Other precious metals, MO, TA, W, ITO, C, Si, GE, Ni, FE, etc. | Turbo pump (TMP): 67ℓ/sec (directly connected to the built -in equipment chamber) diamond fram pump (DFP): 20ℓ/min (device external, tube connection, weight 6.5kg) | Full range vacuum meter | Equipped with a touch panel type operation display | AC100V (single -phase 100V15A) 3P plug with earth | Adjustment range: 0 to 9999sec |