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  4. Spatta device Small magnetron patta device MSP -mini (Vacuum device)
Spatta device Small magnetron patta device MSP -mini-Msp -mini
Spatta device Small magnetron patta device MSP -mini-Vacuum device

Spatta device Small magnetron patta device MSP -mini
Vacuum device

Vacuum device's Response Status

Response Rate

100.0%

Response Time

40.2hours

About This Product

Magnetron Patta device is applied to promote ionization on the cathode surface layer using a powerful magnet on the back of the target, and apply a metal molecule to collide with a magnetic field by a magnetic field. Precious metals such as gold and platinum are used mainly for electron microscopes. In addition, we have a lineup of top models that can spat other metal targets.

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    Spatta device Small magnetron patta device MSP -mini

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1 Models of Spatta device Small magnetron patta device MSP -mini

Image Part Number Price (excluding tax) target Metal to be filmated Target metal life (T = 10nm) Sample stage Target -sample interval Sample size Chamber size timer Exhaust system Safety measure Device size power supply
Spatta device Small magnetron patta device MSP -mini-Part Number-Msp -mini

Msp -mini

Available upon quote

φ30mm magnetron type

Au (standard), option (AG)

Au (about 800 times), AG (about 4000 times)

φ82mm

25.5mm

Effective diameter φ30mm, height 15mm or less

Inner diameter 90mmx depth 42mm

OMRON's electronic timer

External RP5ℓ/Min

With fuse by system

Body W190mm x H183mm x D265mm5kg

AC100V, 10A Earth wire 3m used 3m

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About Company Handling This Product

Vacuum device

Response Rate

100.0%

Response Time

40.2hrs

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Sputtering Equipment　Vacuum device
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