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Achievement pressure
Board bias
Board heating mechanism
Board holder
Compressed air
Cooling water
Device control
Effective area (mm)
Exhaust speed
Exhaust system
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Installed discharge system
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Part Number
ICF-800Product
ICF membrane deviceHandling Company
NanotechCategories
| Image | Price (excluding tax) | Achievement pressure | Board bias | Board heating mechanism | Board holder | Compressed air | Cooling water | Device control | Effective area (mm) | Exhaust speed | Exhaust system | Installation area (M) | Installed discharge system | Need for power | Vacant tank (mm) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
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Available upon quote | 6.7E-4PA or less | MAX3,000V500MA | Options (sheath heaters, lamp heaters, etc.) | Self -open type (custom -made production according to product shape) | 6kgf/cm2 or higher | 3kgf/cm220 ~ 40L/min | Completely automatic driving by recipe screen settings | φ500 × 200L | Within 30 minutes to 6.7E-3PA | Turbo molecular pump + rotary pump | 3.0W x 4.0D x 2.5H | DLC ion source (ionized vapor resource) | 3φ200v20kva | φ800 × 650H |
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Reviews shown here are reviews of companies.
