Organic EL film deposition equipment SOLCIET, SATELLA, ZELDA series
ULVAC Sales Co., Ltd.
About This Product
■Summary
ULVAC has a lineup of materials development experiment systems for organic EL, mass production cluster systems, and inline systems.
■Applications
Organic EL display, organic EL lighting
■Features
SOLCIET has independent room configurations such as a pretreatment room, organic film formation room, electrode film formation room, intermediate room, and glove box, and is an experimental system that can perform everything from material evaluation to device characteristic evaluation. In addition to various evaporation sources, we also offer a wide range of options such as sputter cathodes to expand the range of experimental uses. The standard compatible board size is □100mm.
SATELLA has a multi-chamber style in which each process chamber is independent, making it possible to perform full-color device evaluation, which was difficult with SOLCIET. It has an octagonal transfer chamber and can accommodate 2 to 4 organic film deposition chambers depending on your needs. In addition, it is equipped with a high-definition mask alignment mechanism and is compatible with active matrix full color devices. The standard compatible board size is □200mm.
The ZELDA series is a system compatible with mass production. We have a wide range of applications available, including newly developed evaporation sources. Compatible board sizes are G2 and above.
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Product
Organic EL film deposition equipment SOLCIET, SATELLA, ZELDA series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Organic EL film deposition equipment SOLCIET, SATELLA, ZELDA series
| Product Image | Part Number | Price (excluding tax) | Board size (MAX) | Device form | Purpose of use | System configuration |
|---|---|---|---|---|---|---|
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SOLCIET |
Available upon quote | □100mm |
Independent chamber Concatenated type |
Research and development | Pretreatment → hole layer → light emitting layer → electron transport layer → electrode layer → sealing (manual) |
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About Company Handling This Product
- Japan