This product is registered by ULVAC Sales Co., Ltd..
About This Product
■Summary
The SPW series is a roll-up type sputtering device that can form multilayer films such as optical films and metals on plastic films. By separating the atmosphere between the film-forming chambers, high-performance multilayer films can be deposited all at once.
■Applications
・Wiring film for touch panels, transparent conductive film, invisible film, etc.
・Electrode film for FPC
■Features
- Modules can be selected according to process and productivity
・Can be applied to various uses by arbitrarily selecting and adding modules
・Equipment operation can be done at floor level
・High-rate deposition of high-quality films is possible with excellent atmosphere separation performance and improved deposition process.
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