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  2. Attotive pressure (remote) dielectric barrier discharge device surface type SKIP-CBL300 (SAKIGAKE-Semiconductor)
Attotive pressure (remote) dielectric barrier discharge device surface type SKIP-CBL300-SKIP-CBL300
Attotive pressure (remote) dielectric barrier discharge device surface type SKIP-CBL300-SAKIGAKE-Semiconductor

Attotive pressure (remote) dielectric barrier discharge device surface type SKIP-CBL300
SAKIGAKE-Semiconductor

SAKIGAKE-Semiconductor's Response Status

Response Rate

100.0%

Response Time

120.0hours

About This Product

Attotive pressure (remote) dielectric barrier discharge device surface type SKIP-CBL300 (Technology of Kyoto University Dr. Sakai) Realizes uniform processing to 300mm square. There is almost no heat damage. It is not an arc state with a concentrated current like a corona discharge. Plasma of all gas. Not only rare gas such as AR and HE, but also nitrogen and air can be easily converted.

■ Product overview

･ Realize uniform processing to 300mm square. → Because plasma is generated on a surface, batch processing is possible. ･ There is almost no damage due to heat. → It is possible to process a vulnerable sample against heat. ･ It is not an arc state with a concentrated current like a corona discharge. → Do not cause charge damage to processed objects. ･ Plasma of all gas. → Not only rare gas such as AR and HE, but also nitrogen and air can be easily converted.

■ Optional

･ Multiple conversion of supply gas systems ･ 1-axis robot X-Y robot R to R ･ Touch panel control ･ We will respond to the addition of the coot (spray dip slit) and the addition of the drying process and other requests.

  • Product

    Attotive pressure (remote) dielectric barrier discharge device surface type SKIP-CBL300

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1 Models of Attotive pressure (remote) dielectric barrier discharge device surface type SKIP-CBL300

Image Part Number Price (excluding tax) Electrode process Process pressure Recommended gas Gas flow meter Gas flow control mechanism power supply
Attotive pressure (remote) dielectric barrier discharge device surface type SKIP-CBL300-Part Number-SKIP-CBL300

SKIP-CBL300

Available upon quote

~ ◻︎300mm

Atmospheric pressure

Argon
* Discharge will be discharged even with other gas.

Up to 1,000L/min

Ukiko type ORMFC

AC200V

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About Company Handling This Product

SAKIGAKE-Semiconductor

Response Rate

100.0%

Response Time

120.0hrs

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