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  3. Plasma Etching Systems
  4. Vacuum Plasma Etcher CPE Series (SAKIGAKE-Semiconductor)
Vacuum Plasma Etcher CPE Series-CPE series
Vacuum Plasma Etcher CPE Series-SAKIGAKE-Semiconductor

Vacuum Plasma Etcher CPE Series
SAKIGAKE-Semiconductor

SAKIGAKE-Semiconductor's Response Status

Response Rate

100.0%

Response Time

120.0hours

About This Product

SIO2 and SI etching, etc. Made fine circuits such as semiconductor integration circuits.

■ Product overview

·compact ･ Easy operability ･ Touch panel operation (auto, manual)

  • Product

    Vacuum Plasma Etcher CPE Series

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1 Models of Vacuum Plasma Etcher CPE Series

Image Part Number Price (excluding tax) External dimensions Discharge dimensions Output adjustment Gas system Gas control method Pressure adjustment power supply
Vacuum Plasma Etcher CPE Series-Part Number-CPE series

CPE series

Available upon quote

510mm (W) x 760mm (d) x 1,090mm (H)

200mm in diameter (circular)

can be

1 system (2 systems are optional)

Mass flow controller

valve

Power supply AC100V, 15A (50Hz/60Hz)

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About Company Handling This Product

SAKIGAKE-Semiconductor

Response Rate

100.0%

Response Time

120.0hrs

Related search keywords

Plasma Etching Systems
Plasma Etching Systems　SAKIGAKE-Semiconductor
SAKIGAKE-Semiconductor

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